提高嵌入式时栅传感器精度的测头设计方法

为了提高嵌入式时栅传感器的测量精度,结合传感器自身的特点,从布置方式和数据处理方式两方面设计了特殊的测头结构。首先利用谐波分析确定传感器误差的主要频次,然后分别针对长短周期的误差采用多组测头对径和间隔特定空间角度的测头布置方式,测头之间采用数字量相加的数据处理方式,最后通过实验验证了这种测头结构和数据处理方式的有效性。结果表明,与单测头结构相比,这种方式将长周期误差降低了75%,短周期误差降低了83.6%,更有效地提高了嵌入式时栅传感器的测量精度。

Probe design method for improving the precision of embedded time grating sensor

To improve the measurement precision of embedded time grating sensor, combined with the characteristics of the sensor, a special probe structure is designed from the aspects of probe arrangement and data processing. Firstly, the harmonic analysis is used to determine the main frequency components of the sensor error. Then, aiming at long and short period errors, the probe arrangement is adopted, which uses multiple probes with diametrically opposite arrangement and a certain angle spacing. The digital addition technology is applied for the probe measurement results to improve the measuring accuracy. Finally, experiment was conducted to verify the effectiveness of the proposed probe structure and data processing method. The experiment results show that using this method, the long and short period errors are reduced by 75% and 83.6%, respectively compared with that using single probe structure. The proposed method effectively improves the measuring precision of embedded time grating sensor.