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纳米精度外差式激光干涉仪非线性误差修正方法研究
引用本文:黎永前,李晓莹,朱名铨.纳米精度外差式激光干涉仪非线性误差修正方法研究[J].仪器仪表学报,2005,26(5):542-546.
作者姓名:黎永前  李晓莹  朱名铨
作者单位:1. 西北工业大学机电工程学院,西安,710072;大连理工大学微系统研究中心,大连,116023
2. 西北工业大学机电工程学院,西安,710072
摘    要:提出一种外差干涉非线性误差修正方法,采用混频技术将光频信号降低到通用数据采集系统频率响应范围内;采用高速数据采集板实现外差干涉测量信号和参考信号双通道同步实时采集;对采集数据进行光滑处理,滤除高阶非线性误差;解出位移量对应的相位差。试验结果表明,所提出的修正方法可以较好地修正双频激光干涉仪中存在的非线性误差,使外差干涉仪测量不确定度由原来的20nm降低到10nm。

关 键 词:外差干涉  非线性误差  误差修正  混频
修稿时间:2003年6月1日

A New Method to Correct the Nonlinear Errors in Heterodyne Interferometry
Li Yongqian,Li Xiaoying,ZHU Mingquan.A New Method to Correct the Nonlinear Errors in Heterodyne Interferometry[J].Chinese Journal of Scientific Instrument,2005,26(5):542-546.
Authors:Li Yongqian  Li Xiaoying  ZHU Mingquan
Affiliation:Li Yongqian 1,2 Li Xiaoying1 Zhu Mingquan1 1
Abstract:A new nonlinear-error correction-method for the heterodyne interferometer was proposed.The data are smoothened to filter the higher order nonlinear errors.The frequencies of both the measurement signals and the reference signals are lowened synchronously within the band of the data acquiring systems using the mixing-frequency technique,and the signals are acquired synchronously through double channels A/D boards,and then the phases to be measured are evaluated.The experimental setup is given.The experimental results illustrate that the proposed nonlinear-error-correction method can reduced the uncertainty in the heterodyne interferometer from 20nm to 10nm.
Keywords:Heterodyne interferometry Nonlinearity errors Error correction Mixter frequency
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