微小球面曲率半径的测量研究

验证了测量平面面形误差的重叠四步平均算法（OAF）应用于测量微小球面曲率半径的可行性。采用Linnik显微移相干涉装置，测量了光纤连接器端面的曲率半径，给出了测量数据及处理结果；通过对已知曲率半径的标准微小凸球面样板的测量，得到相对误差为0．093％。同时，从理论上对OAF和其他算法对PZT位移误差的抑制能力作了分析比较。结果表明，OAF算法可用于微小球面曲率半径的测量，且相对于其他算法而言，其对PZT位移误差具有更强的抑制能力。

Study on the measurement of radii of curvature of mini-spheres

Originally Overlap Averaging 4-Frame algorithm(OAF) is used for measuring flatness error.Now the feasibility of applying OAF algorithm to measure the radius of curvature(ROC) of mini-sphere is verified.By using Linnik-type microscopic interference system,the ROC of a fiber connector was determined,the measurement data and the processing result were given.To inspect the systematic error of the algorithm,a standard mini-sphere with ROC of 9.96 mm was measured and the relative error was 0.093%.Moreover,the effects of calibration error and non-linearity of PZT on ROC measurement are compared for OAF and other algorithms.Experiment and analysis results show that OAF algorithm is completely applicable to mini-sphere ROC measurement,and it has stronger capability in suppressing phase-shifting error effect than other algorithms.