勾形磁场的优化设计与实现

本文采用有限元法对8英寸单晶炉（16寸坩埚）勾形磁场的磁场分布和磁场强度,以及影响磁场强度的线圈匝数、导线面积、线圈间距等因素进行了模拟分析和优化,并依据模拟结果得到磁场结构的优化设计参数。最后通过实验对磁场的设计参数进行了验证,结果表明：磁场分布和磁场强度模拟结果与实际测试结果可较好吻合;磁场的关键参数满足晶体生长的磁场要求;模拟方法是正确的、符合实际的。此方法为磁场设计提供了一种可靠的模拟新方法和经验数据。

Optimum design and realization of cusp magnetic field

The magnetic field distribution,intensity and the factors that influence magnetic field intensity,such as turns of the coil,section area of the copper wire,distance between two coils and etc.,of the cusp magnetic field in 8 inch mono-crystal furnace(sixteen-inch crucible)were simulated and optimized using finite element method.The optimum magnetic design parameters of the cusp magnetic field were obtained from the simulation results.Experi- ments were carried out to verify the validity of the design parameters.Experiment results show that the experimental results coincide with the simulation results,the simulation method is correct and the key parameters of the magnetic field satisfy the requirement of the crystal growth.The simulation method proposed in this paper can be used for the practical design of cusp magnetic field.