大功率准分子激光器的智能监控系统研究

大型准分子激光器的运行控制是一个多影响因素、多控制目标，且存在本质非线性和时滞性的复杂控制系统，很难建立准确的数学模型和确定最优解。根据实际手动控制数据，采用模糊控制技术，提出了辨识模糊控制规则，给出了基于知识／推理规则的智能控制方案，即在获取的知识库引导下，完成对准分子激光器工作时的技术参数的测量，实现快速响应和较高的控制精度。实验结果表明，该装置使用方便，控制灵活，误差小，较好地解决了模型复杂的综合控制，具有较好的实用价值。

Research on the Intelligent Monitoring System for High Power Excimer Laser

The controlling system for high power excimer laser is somehow complicated with non linearities, variable delay time and uncertainties associated to multi influence factors and control objectives. To confirm such a system's accurate mathematical model and optimum answer is very difficult. In this paper, we present a new method to form a set of fuzzy control rules by means of human operator's control actions and propose an intelligence control method based on the knowledge/reasoning regulation. Guided with the knowledge base, the controlling system completes the measurement of characteristics of excimer laser when it works, to realize fast reaction and high precision. Integrated with expert control, fuzzy control and hierarchical control, the device has the features of easy to operate, flexible control and small error, and experimentally shows that it is stable and practicable.