| 微细电火花加工及其关键技术 |
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| 引用本文： | 李刚,赵万生.微细电火花加工及其关键技术[J].机械工程师,2004(2):3-7. |
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| 作者姓名： | 李刚 赵万生 |
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| 作者单位： | 哈尔滨工业大学,机电学院,黑龙江,哈尔滨,150001 |
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| 摘 要： | 综述了微细电火花加工的基本原理及最新研究进展。比较了LIGA技术与微细电火花加工的特点与应用。简要分析了微细电火花加工的关键技术：微细电极的在线制作、微进给装置、微小能量的脉冲电源、微小电极的运动轨迹规划、电极的损耗及补偿策略。展望了微细电火花加工在微三维结构加工中的应用前景。
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| 关 键 词： | 微细电火花加工 LIGA 微三维结构 |
| 文章编号： | 1002-2333(2004)02-0003-05 |
| 修稿时间： | 2004年1月12日 |
Micro-EDM and its Key Techniques |
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| LI Gang-ZHAO Wan-sheng.Micro-EDM and its Key Techniques[J].Mechanical Engineer,2004(2):3-7. |
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| Authors: | LI Gang-ZHAO Wan-sheng |
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| Affiliation: | School of Electromechanics-Harbin Institute of Technology-Harbin150001-China |
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| Abstract: | This paper summarizes the principle of micro-EDM and its current progress-compares the character and application of LIGA technique with that of micro-EDM.It analyzes several key techniques of micro-EDM:manufacturing the micro electrode online-micro feed device-EDM pulse source of micro energy-planning the track for thin electrode-wear of electrode and the method to compensate it.The prospective application of micro-EDM in the manufacture of micro three-dimensional structures is discussed as well. |
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| Keywords: | micro-EDM LIGA micro three-dimensional structure |
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