| 微细加工技术研究进展 |
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| 引用本文： | 周焱.微细加工技术研究进展[J].机械工程师,2006(11):29-31. |
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| 作者姓名： | 周焱 |
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| 作者单位： | 湖南科技职业学院,机电系,长沙,410004 |
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| 摘 要： | 微细加工技术是随着微机电系统(MEMS)技术的发展而被广泛接受的一种在微小尺度内实现功能、信息集成化的生产加工技术。文中阐述近年来国内外微细加工的发展动向及开发的一些新加工技术,详细介绍了基于超精密加工、硅微加工、LIGA加工、原子力显微镜加工及微/纳压印加工技术等微细加工技术,探讨了各种加工技术的优越性、适用性及可靠性并提出展望。
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| 关 键 词： | 微机电系统 微细加工 |
| 文章编号： | 1002-2333(2006)11-0029-03 |
| 收稿时间： | 2006-06-17 |
| 修稿时间： | 2006年6月17日 |
Development of Micromachining Technologies |
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| ZHOU Yan.Development of Micromachining Technologies[J].Mechanical Engineer,2006(11):29-31. |
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| Authors: | ZHOU Yan |
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| Affiliation: | Department of Meehanies and Electries, Hunan Science and Technology College, Changsha 410004, China |
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| Abstract: | With the development of Micro-electro-mechanical systems (MEMS), micromachining technologies have been accepted widely as micro-processes due to their performances and information integrations in micro-scale. The concept, the content and the recent products developed of micromachining are presented in detail. Super-precision, silicon micro-processing, LIGA, atomic force microscope(AFM) and imprint lithography technologies have used for micromachining in MEMS have been introduced, and their advantages and disadvantages, applicability and reliability have been discussed in the future in detail. |
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| Keywords: | micro-electro-mechanical systems(MEMS) micromachining |
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