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基于微探针加工技术的分子自组装过程实验研究
引用本文:谢磊,闫永达,曹永智,孙涛,董申,DONG Shen.基于微探针加工技术的分子自组装过程实验研究[J].机械工程师,2009(8):18-20.
作者姓名:谢磊  闫永达  曹永智  孙涛  董申  DONG Shen
作者单位:哈尔滨工业大学精密工程研究所,哈尔滨,150001
基金项目:国家自然科学基金资助项目(50605012)中国博士后基金 
摘    要:运用原子力显微镜纳米加工系统,在工件表面加工出了多种复杂微结构。并以此为基底,研究了基底形貌对嵌段共聚物自组装纳米微结构的调控作用。将自上而下的基于AFM微探针的纳米机械技术与自下而上的分子自组装技术相结合,实现了对有序纳米微结构的调控。

关 键 词:原子力显微镜  分子自组装  嵌段共聚物

Experimental Study on Self-assembly Process Based on Micro-Probe Mechanical Scratching Technology
XIE Lei,YAN Yong-da,CAO Yong-zhi,SUN Tao,FEI Wei-dong,DONG Shen.Experimental Study on Self-assembly Process Based on Micro-Probe Mechanical Scratching Technology[J].Mechanical Engineer,2009(8):18-20.
Authors:XIE Lei  YAN Yong-da  CAO Yong-zhi  SUN Tao  FEI Wei-dong  DONG Shen
Affiliation:(Center of Precision Engineering, Harbin Institute of Technology, Harbin 150001, China)
Abstract:Manipulate the atomic force microscope (AFM) to machine many sorts of micro-structures on the sample surface. Based on this etched substrate, the controlling effects of block copolymer self-assembling are studied and presented. Combination of the AFM-based top-down nanomachining and bottom-up self-assembly methods, controlling of the ordered nano-structure is achieved.
Keywords:atomic force microscope(AFM)  self-assembly  block copolymer
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