| 一种光纤光栅振动传感器的金属化封装方法 |
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| 引用本文： | 南秋明,吴皓莹,李盛. 一种光纤光栅振动传感器的金属化封装方法[J]. 焊接学报, 2016, 37(2): 17-20 |
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| 作者姓名： | 南秋明 吴皓莹 李盛 |
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| 作者单位： | 1.武汉理工大学 光纤传感技术国家工程实验室, 武汉 430074;武汉理工大学 光纤传感技术与信息处理教育部重点试验室, 武汉 430074 |
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| 基金项目： | 国家自然科学基金重大项目资金资助(61290311)，国家自然科学基金青年基金资助(61403289)，武汉市城建科研资助项目(201310)，中央高校基本科研业务费专项资金资助(2014-IV-090) |
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| 摘 要： | 文中研究了一种光纤光栅振动传感器的金属化封装工艺,包括光纤光栅的表面金属化工艺和激光焊接封装工艺. 首先通过磁控溅射法对光栅及端头光纤进行预镀银,然后用电镀法镀镍,再通过激光焊接将镀镍的光纤光栅封装到传感器结构上. 通过对传感器性能的测试,检验了金属化封装的效果. 与采用环氧胶封装的传感器的性能进行了比较,结果表明,金属化封装的光纤光栅振动传感器谐振频率为1 495 Hz,增加约50%;加速度灵敏度下降15%,约为60 mV/ms-2,线性测量范围增加约20%,达12 m/s2;重复性误差小于4.7%;双光栅的匹配状态不随环境温度变化而变化. 上述研究结果表明采用的光纤光栅金属化封装方法可行,且有利于提高光纤光栅传感器的传感性能和长期稳定性.
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| 关 键 词： | 光纤光栅振动传感器 金属化封装 磁控溅射 激光焊接 |
| 收稿时间： | 2014-04-29 |
Metallization packaging method for FBG vibration sensor |
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| NAN Qiuming,WU Haoying and LI Sheng. Metallization packaging method for FBG vibration sensor[J]. Transactions of The China Welding Institution, 2016, 37(2): 17-20 |
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| Authors: | NAN Qiuming WU Haoying LI Sheng |
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| Affiliation: | National Engineering Laboratory for Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan 430070, China;Key Laboratory of Fiber optic Sensing Technology and Information Processing, Ministry of Education, Wuhan University of Technology, Wuhan 430070, China,Key Laboratory of Fiber optic Sensing Technology and Information Processing, Ministry of Education, Wuhan University of Technology, Wuhan 430070, China and National Engineering Laboratory for Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan 430070, China |
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| Abstract: | A metallization packaging technology for fiber Bragg grating (FBG) vibration sensor was investigated in the paper, including surface metallization and laser welding packaging of FBG. The FBGs and fiber ends were pre-plated with sliver by magnetron sputtering method, and then plated with nickel by electrolytic plating. Finally, the plated components were packaged in the sensor structure through laser welding to shape a fully metalized packaged FBG sensor. To verify the effect of FBG vibration sensor metallization packaging, the performance of sensors were tested and compared to that of sensors with epoxy package. It was found that the resonant frequency increased by 50% to 1495Hz, the acceleration sensitivity decreased by 15% to about 60 mV/ms-2, the linear measurement range increased about 20% up to 12 m/s2, the repeatability error was less than 4.7%, and the matching state of double FBGs did not vary with temperature. The results show that the metalized packaging method is feasible for FBG sensors and can improve their performance and long-term stability. |
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| Keywords: | FBG vibration sensor metalized package magnetron sputter plating laser welding |
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