| 条形和脊型SOI 波导微环结构传感性能研究 |
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| 引用本文： | 邓丽莉,石强,张辉,段倩倩,菅傲群,桑胜波,张文栋. 条形和脊型SOI 波导微环结构传感性能研究[J]. 红外与激光工程, 2015, 44(2): 752-757 |
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| 作者姓名： | 邓丽莉 石强 张辉 段倩倩 菅傲群 桑胜波 张文栋 |
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| 作者单位： | 1.太原理工大学微纳系统研究中心,山西太原030024; |
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| 基金项目： | 国家自然科学基金(91123036,51105267);高等学校博士学科点专项科研基金(20131402110013,20111402120007);山西省科技厅科技重大专项(20121101004);山西省高等学校特色重点建设学科项目(晋教材[2012]45号);山西省回国留学人员科技活动项目择优资助项目 |
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| 摘 要： | 使用时域有限差分(FDTD)方法研究了基于SOI微环谐振腔结构的条形和脊型波导,探究了微环谐振腔应用于生物传感的理论。分析了结构的几何尺寸对生物传感器灵敏度的影响。通过分析条形和脊型波导的模场分布图,解释了条形波导的灵敏度明显高于脊型波导的原因,且随着波导宽度的增加其灵敏度系数的变化遵循相同的趋势。并且,当条形波导取得最高的灵敏度系数时,其横截面是方形的,然而脊型波导的最大灵敏度值对应的却是不完全对称的几何结构。当条形波导的横截面全对称时,灵敏度达到最大值172.3 nm/RIU。
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| 关 键 词： | 条形和脊型波导 微环谐振腔 生物传感器 横截面 |
| 收稿时间： | 2014-06-10 |
Investigation on the sensing performances of strip and rib SOI waveguides microring structures |
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| Deng Lili;Shi Qiang;Zhang Hui;Duan Qianqian;Jian Aoqun;Sang Shengbo;Zhang Wendong. Investigation on the sensing performances of strip and rib SOI waveguides microring structures[J]. Infrared and Laser Engineering, 2015, 44(2): 752-757 |
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| Authors: | Deng Lili Shi Qiang Zhang Hui Duan Qianqian Jian Aoqun Sang Shengbo Zhang Wendong |
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| Affiliation: | 1.MicroNano System Research Center,Taiyuan University of Technology,Taiyuan 030024,China;2.Key Laboratory of Advanced Transducers and Intelligent Control System,Shanxi Province and Ministry of Education,Taiyuan 030024,China |
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| Abstract: | The strip and rib waveguides based on silicon-on-insulator (SOI) microring resonator structures are investigated by the Finite Difference Time Domain (FDTD) method. The theory of microring resonators used in biosensing was explored. The effects of geometric structure dimension on biosensor sensitivity were considered and analyzed. It is demonstrated that the sensitivity of strip waveguide is much higher than that of rib waveguide, which is proved by their mode field distributions, and the sensitivity coefficients of both strip and rib waveguides have the similar trend with the increase of waveguide width. Furthermore, the strip waveguide has the highest sensitivity coefficient when the cross section is square, whereas that of rib waveguide corresponds to a not totally symmetrical geometry. The maximum sensitivity of strip waveguide is 172.3 nm/RIU when the cross section is fully symmetry. |
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