| 一种高分辨率ITO线路缺陷检测系统 |
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| 引用本文： | 沈淦松,叶玉堂,李昌海. 一种高分辨率ITO线路缺陷检测系统[J]. 激光技术, 2013, 37(1): 24-27. DOI: 10.7510/jgjs.issn.1001-3806.2013.O1.006 |
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| 作者姓名： | 沈淦松 叶玉堂 李昌海 |
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| 作者单位： | 1.电子科技大学光电信息学院, 成都 610054 |
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| 摘 要： | 为了满足微米量级氧化铟锡线路检测的需求,提出了一种高分辨率的用于检测氧化铟锡线路缺陷的检测系统,其检测精度可达2m.采用高分辨率线阵CCD相机以及中长焦镜头以获得较高的图像放大率与图像精度;通过分离相机与镜头及镜头倒置以获得较大的动态范围和较好的调制转换函数优化值;采用直线电机提高系统的运动精度与稳定度;同时采用大理石底座以减小周围环境的振动等对系统精度的影响.通过具体分析系统精度与速度要求,再考虑现场环境,对不同结构系统的优劣势进行了研究与论证.结果表明,该系统具有精度高、稳定性高、操作灵活等显著特点.
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| 关 键 词： | 测量与计量 成像系统 高分辨率 光学检测 线扫描系统 |
| 收稿时间： | 2012-05-10 |
A high resolution defect detection system for ITO lines |
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| SHEN Gan-song , YE Yu-tang , LI Chang-hai. A high resolution defect detection system for ITO lines[J]. Laser Technology, 2013, 37(1): 24-27. DOI: 10.7510/jgjs.issn.1001-3806.2013.O1.006 |
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| Authors: | SHEN Gan-song YE Yu-tang LI Chang-hai |
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| Affiliation: | (School of Opto-electronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China) |
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| Abstract: | A defect detection system for lines on indium tin oxide glass was designed and the detection precision reached 2m.Firstly,higher image magnification and image accuracy were obtained by using a high resolution linear CCD camera and the telephoto lenses;secondly,larger dynamic range was realized through the separation of camera and lens and a suitable modulation transfer function value was achieved through ceiling mounting the lens;the system precision and system stability were improved with a linear motor.At the same time,marble base was used to reduce the influence of surrounding vibration on the accuracy of the system.Finally,the advantages and disadvantages of system with different structure were concretely analyzed.Experiments show that the system has high precision,high stability,flexible operation,and other notable features. |
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