A stand‐alone compact EUV microscope based on gas‐puff target source |
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| Authors: | ALFIO TORRISI PRZEMYSLAW WACHULAK ŁUKASZ WĘGRZYŃSKI TOMASZ FOK ANDRZEJ BARTNIK TOMÁŠ PARKMAN ŠÁRKA VONDROVÁ JANA TURŇOVÁ BARTŁOMIEJ J. JANKIEWICZ BARTOSZ BARTOSEWICZ HENRYK FIEDOROWICZ |
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| Affiliation: | 1. Institute of Optoelectronics, Military University of Technology, Warsaw, Poland;2. Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic |
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| Abstract: | We report on a very compact desk‐top transmission extreme ultraviolet (EUV) microscope based on a laser‐plasma source with a double stream gas‐puff target, capable of acquiring magnified images of objects with a spatial (half‐pitch) resolution of sub‐50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi‐monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy. |
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| Keywords: | EUV microscopy Fresnel zone plate gas‐puff target EUV source imaging |
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