激光合成非晶态Si3N4粉末 |
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引用本文: | 李道火 仲志英. 激光合成非晶态Si3N4粉末[J]. 激光技术, 1991, 15(4): 220-224 |
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作者姓名: | 李道火 仲志英 |
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作者单位: | 1.中国科学院, 安徽光机所, 合肥 |
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摘 要: | 本文描述了大功率CO2激光辐照SiH4+NH3的快速流动气体合成Si3H4超细粉末的实验,揭示了激光谱线变化对合成反应的影响。讨论了粉末红外吸收光谱的畸变现象等。
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关 键 词: | 激光 合成 氮化硅 陶瓷 粉末 |
收稿时间: | 1990-06-19 |
Synthesizing amorphous Si3N4 powders by laser |
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Abstract: | The experiment of synthesizing superfine Si3N4 powder by using the CW CO2 laser to irradiate the fast flowing gases (SiH4+NH3) is described.The effect of the laser spectrum variation on the synthesis reaction has been revealed.The deformation phenomenon of the infrared absorption spectrum of the powder has been discovered. |
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