| 化学机械抛光超薄SUS304不锈钢抛光液研究 |
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| 引用本文： | 秦洪权,王永胜,李庆,陈佳鹏,刘振辉,苏建修. 化学机械抛光超薄SUS304不锈钢抛光液研究[J]. 金刚石与磨料磨具工程, 2016, 36(6): 25-28,34. DOI: 10.13394/j.cnki.jgszz.2016.6.0006 |
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| 作者姓名： | 秦洪权 王永胜 李庆 陈佳鹏 刘振辉 苏建修 |
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| 作者单位： | 1. 河南理工大学 机械与动力工程学院, 河南 焦作 454000;2. 驻马店技师学院 机械工程系, 河南 驻马店 463000;3. 河南科技学院 机电学院, 河南 新乡 453003 |
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| 基金项目： | 国家自然科学基金面上项目资助（NO.51375149） |
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| 摘 要： | 柔性显示已成为下一代显示技术的研究热点，不锈钢材料是柔性大尺寸显示器衬底的主要材料之一。为优化不锈钢表面的超光滑无损伤加工，采用化学机械抛光（CMP）技术，通过正交试验，研究磨料粒度尺寸、分散剂、氧化剂、磨料质量、缓蚀剂用量等因素对抛光后材料去除率和表面粗糙度的影响。试验结果表明:磨料粒度尺寸对表面粗糙度的影响最大，其次为双氧水、丙三醇、草酸、磨料质量；影响材料去除率的因素排列是磨料粒度尺寸、磨料含量、丙三醇含量、草酸含量、双氧水含量。
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| 关 键 词： | 304不锈钢片 化学机械抛光 抛光液 材料去除率 表面粗糙度 |
Polishing slurry of chemical mechanical polishing SUS304 ultrathin stainless steel sheet |
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| QIN Hongquan,WANG Yongsheng,LI Qing,CHEN Jiapeng,LIU Zhenhui,SU Jianxiu. Polishing slurry of chemical mechanical polishing SUS304 ultrathin stainless steel sheet[J]. Diamond & Abrasives Engineering, 2016, 36(6): 25-28,34. DOI: 10.13394/j.cnki.jgszz.2016.6.0006 |
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| Authors: | QIN Hongquan WANG Yongsheng LI Qing CHEN Jiapeng LIU Zhenhui SU Jianxiu |
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| Affiliation: | 1. School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454000, China;2. Department of Mechanical Engineering, Zhumadian Technician College, Zhumadian 463000, China;3. School of Mechanical and Electrical Engineering, Henan Institute of Science andTechnology, Xinxiang 453003, China |
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| Abstract: | Flexible display has become a research hot spot as next generation display technology and stainless steel is one of the main materials of flexible large size display substrate. To realize a super-smooth no-damage surface on stainless steel,chemical mechanical polishing(CMP) is adopted. The influence of abrasive size and contents of dispersion agent,oxidant agent,abrasive and corrosion inhibitor agent on the material removal rate and the surface roughness of CMP 304 stainless steel had been studied by orthogonal tests. The results show that abrasive size has the most significant effect on the surface roughness,followed by contents of H2O2,glycerol,oxalic acid,abrasive in turn. The abrasive size has the maximum effect on the material removal rate,followed by contents of abrasive,glycerol,oxalic acid and H2O2. |
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