| 车削加工硫化锌晶体工艺 |
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| 引用本文： | 李世杰,徐超,黄岳田,王守义,刘卫国. 车削加工硫化锌晶体工艺[J]. 红外与激光工程, 2020, 49(7): 20190567-1-20190567-8. DOI: 10.3788/IRLA20190567 |
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| 作者姓名： | 李世杰 徐超 黄岳田 王守义 刘卫国 |
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| 作者单位： | 西安工业大学 光电工程学院 陕西省薄膜技术与光学检测重点实验室，陕西 西安 710021 |
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| 基金项目： | 西安市科技局科技创新引导项目;重点实验室项目;陕西省科技厅项目 |
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| 摘 要： | 随着硫化锌晶体光学元件在红外光学系统中的广泛应用，对其表面质量的要求越来越高，但由于该材料的脆性特点，很难获得高质量的表面粗糙度。为了获得高质量的硫化锌晶体表面，首先，介绍了基于单点金刚石车床的车削加工与飞切加工的技术原理，以及影响表面粗糙度的因素。然后，通过工艺实验，采用单一变量法，研究了不同参数的金刚石刀具和不同的加工参数对硫化锌平面元件的表面粗糙度的影响。采用显微镜和白光干涉仪对加工表面的质量进行了检测，并反馈了优化加工参数。最后，基于最优加工参数，采用两种加工方式均获得了表面粗糙度Sa为1 nm左右的高质量硫化锌平面光学元件。该研究结果对高质量硫化锌光学元件的研制提供了技术支持，具有广泛的工程应用价值。
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| 关 键 词： | 硫化锌晶体 车削加工 飞切加工 表面粗糙度 |
| 收稿时间： | 2020-11-11 |
Processing technology of cutting ZnS crystal |
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| Affiliation: | Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, School of Photoelectric Engineering, Xi'an Technological University, Xi'an 710021, China |
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| Abstract: | With the wide application of ZnS crystal optical elements in infrared optical system, the surface quality of ZnS crystal optical elements is more and more demanding, but due to the brittleness of the material, it is difficult to obtain high quality surface roughness. In order to obtain high quality surface of ZnS crystal, the principle of cutting and fly-cutting based on single point diamond lathe was introduced, as well as the factors affecting surface roughness. And then the influence of different parameters of diamond tool and different processing parameters on the surface roughness of ZnS flat element was studied by single variable method through process experiment. The quality of the machined surface was tested by microscope and white light interferometer, and the processing parameters were optimized by feedback. Finally, based on the optimal processing parameters, high quality ZnS flat optical elements with surface roughness Sa of about 1 nm were obtained in the both different methods. The results provide technical support for the development of high quality optical elements of ZnS crystal and have good engineering application value. |
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