| 高精度控制光电光栅刻划机的光栅外差干涉仪 |
| |
| 引用本文： | 王芳,齐向东. 高精度控制光电光栅刻划机的光栅外差干涉仪[J]. 激光技术, 2008, 32(5): 474-474 |
| |
| 作者姓名： | 王芳 齐向东 |
| |
| 作者单位： | 中国科学院,长春光学机密机械与物理研究所,长春,130033;中国科学院,研究生院,北京,100039;中国科学院,长春光学机密机械与物理研究所,长春,130033 |
| |
| 基金项目： | 国家科技支撑计划重大基金 |
| |
| 摘 要： | 为提高光电式光栅刻划机的控制精度,设计了一种自准直式激光光栅外差干涉仪的新型测量系统。以光栅衍射和偏振光学为理论基础,结合电子学的相关知识对系统进行了理论分析,设计了基准光栅,并进行了大量的实验研究。由实验研究可知,这种利用光栅的自准直衍射和以光栅栅距作为计量基准的干涉测量系统,具有受环境因素的影响低,结构简单、装调方便等优点;采用双频激光得到的测量信号增益大,信噪比高;该系统用于光栅刻划,得到的栅线间距刻划偏差优于10nm,在3mm行程内累积误差约为0.3μm。结果表明,该系统具有纳米级分辨力,用于实时测量控制系统,测量误差很小,完全达到了中阶梯光栅等特种光栅对刻划机的高精度分度要求。
|
| 关 键 词： | 测量与计量 光栅干涉仪 位移测量 自准直衍射 刻划机 双频激光 |
| 收稿时间： | 2007-07-26 |
| 修稿时间： | 2007-09-04 |
Design on grating heterodyne interferometer of high accuracy controlling the photoelectric ruling engine |
| |
| WANG Fang,QI Xiang-dong. Design on grating heterodyne interferometer of high accuracy controlling the photoelectric ruling engine[J]. Laser Technology, 2008, 32(5): 474-474 |
| |
| Authors: | WANG Fang QI Xiang-dong |
| |
| Affiliation: | WANG Fang1,2,QI Xiang-dong1(1.Changchun Institute of Optics,Fine Mechanics , Physics,Chinese Academy of Science,Changchun 130033,China,2.Graduate School,Chinese Academy of Sciences,Beijing 100039,China) |
| |
| Abstract: | In order to heighten the manipulative accuracy of the ruled engine,a new measurement system auto-collimating grating heterodyne interferometer was proposed.Based on the diffraction and polarization of grating and some theories of the electronics,the system was analyzed.After the benchmark grating was designed,and lots of experiments were carried out.Because the interferometer measurement system takes grating constant as the measurement standard,the effect of environment on measurement accuracy is reduced.Th... |
| |
| Keywords: | measurement and metrology grating interferometer displacement measurement auto-collimating diffraction ruling engine dual-frequency laser |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《激光技术》浏览原始摘要信息 |
|
点击此处可从《激光技术》下载免费的PDF全文 |
|
