| FeSiAl微波衰减材料激光3D打印技术研究 |
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| 引用本文： | 刘颖琴, 张永清, 肖静宇, 李光华, 金鹤, 高向阳. FeSiAl微波衰减材料激光3D打印技术研究[J]. 真空科学与技术学报, 2020, 40(3): 207-213. DOI: 10.13922/j.cnki.cjovst.2020.03.05 |
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| 作者姓名： | 刘颖琴 张永清 肖静宇 李光华 金鹤 高向阳 |
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| 作者单位： | 1.1. 中国科学院大学 北京 101407 |
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| 基金项目： | 国家重点研发计划(2018YFB1105200) |
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| 摘 要： | 为适应新型微波真空电子器件对微波衰减材料“薄、轻、宽、强”的发展需求,解决传统人工涂敷和烧结无法精确控制涂层厚度的问题,本文提出了使用3D打印SLM技术制备FeSiAl涂层的新思路。首先,筛选出SLM成型后衰减性能最好的FeSiAl合金粉末;其次,研究3D打印工艺参数对成型件衰减性能的影响规律。研究表明,选择200目以细、Fe∶Si∶Al∶O的质量百分比为74.63∶11.64∶3.36∶10.37的FeSiAl合金粉末,取3D打印的工艺参数为激光功率175 W、扫描速度1600mm/s、扫描间距0.06 mm、铺粉厚度0.02 mm,预热温度为80℃,可制备出具有优异微波衰减性能的FeSiAl涂层,较好地满足器件设计及制造需求。
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| 关 键 词： | FeSiAl涂层 3D打印 SLM 微波衰减 |
| 收稿时间： | 2019-06-12 |
Selective Laser Melting of 3D-Printed FeSiAl Microwave Attenuating Material:An Experimental Study |
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| Liu Yingqin, Zhang Yongqing, Xiao Jingyu, Li Guanghua, Jin He, Gao Xiangyang. Selective Laser Melting of 3D-Printed FeSiAl Microwave Attenuating Material:An Experimental Study[J]. CHINESE JOURNAL VACUUM SCIENCE AND TECHNOLOGY, 2020, 40(3): 207-213. DOI: 10.13922/j.cnki.cjovst.2020.03.05 |
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| Authors: | Liu Yingqin Zhang Yongqing Xiao Jingyu Li Guanghua Jin He Gao Xiangyang |
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| Affiliation: | 1.1. University of Chinese Academy of Sciences, Beijing 101407, China |
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| Abstract: | We addressed the selective laser melting(SLM) of 3 D printed FeSiAl microwave attenuating material for fabrication of advanced microwave vacuum electronic devices.The influence of 3 D printing and SLM solidification conditions,including the grain-size/mass-ratio/thickness of FeSiAl powder,preheating temperature and power/scanning-speed/scanning line-width of laser beam,on the microstructures,microwave attenuation and mechanical properties of the FeSiAl pattern was investigated.The results show that the printing and solidification conditions all had a major impact.For example,the optimized conditions included:grain-size of 200 mesh,Fe∶Si∶Al∶O mass-ratio of 74.63∶11.64∶3.36∶10.37,thickness of 0.02 mm,laser beam power of 175 W,scanning speed of 1600 mm/s,scanning line-width of 0.06 mm,and preheating temperature of 80℃.The FeSiAl pattern,formed by 3 D printing and SLM solidification under the optimized conditions,displays good attenuation properties and meets the requirements on design/fabrication of microwave vacuum electronic devices. |
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| Keywords: | FeSiAl coating 3D printing SLM microwave attenuation |
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