| 陶瓷微板热隔离气体传感器阵列热干扰分析 |
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| 引用本文： | 赵文杰,王暄,王欣,施云波,周真. 陶瓷微板热隔离气体传感器阵列热干扰分析[J]. 仪器仪表学报, 2016, 37(3): 579-585 |
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| 作者姓名： | 赵文杰 王暄 王欣 施云波 周真 |
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| 作者单位： | 1.哈尔滨理工大学黑龙江省电解质工程国家重点实验室培育基地哈尔滨150080;2.哈尔滨理工大学测控技术与仪器黑龙江省高校重点实验室哈尔滨150080,哈尔滨理工大学黑龙江省电解质工程国家重点实验室培育基地哈尔滨150080,哈尔滨理工大学测控技术与仪器黑龙江省高校重点实验室哈尔滨150080,哈尔滨理工大学测控技术与仪器黑龙江省高校重点实验室哈尔滨150080,哈尔滨理工大学测控技术与仪器黑龙江省高校重点实验室哈尔滨150080 |
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| 基金项目： | 国家自然科学青年基金(61501149)、黑龙江省青年基金（QC2013C059）、黑龙江省教育厅科技项目（12541141）、哈尔滨市青年后备人才项目（2015PQQXJ041）资助 |
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| 摘 要： | 热干扰特性是影响微热板气体传感器阵列热结构设计的重要因素之一。为探讨微热板阵列传感器单元之间的热力学特性关系,设计并制备了具有独立式加热功能的热隔离结构4单元微热板气体阵列,传感器阵列单元由Al N陶瓷衬底、Pt膜电极组成,为提高加热效率,阵列单元中间加热区采用激光微加工刻蚀热隔离通孔设计,与边缘形成微梁连接结构。利用有限元法对传感器阵列结构进行了热干扰仿真分析,验证了热隔离结构设计的合理性。给出了4种热干扰测试模式,并进行了热干扰特性测试分析,给出了4单元之间的热干扰规律曲线,得出传感器单元功耗300m W时最大干扰温度达169.6℃,最小热干扰温度84.7℃。热隔离通孔设计可有效降低传感器单元热传导损耗,热干扰分析对微热板传感器阵列的热结构设计具有重要意义。
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| 关 键 词： | 气体传感器阵列；陶瓷微热板；热干扰；微机电系统 |
Thermalinterference analysis of ceramic micro plate thermal isolatedgas sensor arrays |
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| Zhao Wenjie,Wang Xuan,Wang Xin,Shi Yunbo and Zhou Zhen. Thermalinterference analysis of ceramic micro plate thermal isolatedgas sensor arrays[J]. Chinese Journal of Scientific Instrument, 2016, 37(3): 579-585 |
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| Authors: | Zhao Wenjie Wang Xuan Wang Xin Shi Yunbo Zhou Zhen |
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| Affiliation: | 1.State Key Laboratory Breeding Base of DielectricsEngineering , Harbin University of Science and Technology, Harbin 150080, China;2. The higher educational key laboratory for Measuring & Control Technology and Instrumentations of HeilongjiangProvince, School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China,State Key Laboratory Breeding Base of DielectricsEngineering , Harbin University of Science and Technology, Harbin 150080, China,The higher educational key laboratory for Measuring & Control Technology and Instrumentations of HeilongjiangProvince, School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China,The higher educational key laboratory for Measuring & Control Technology and Instrumentations of HeilongjiangProvince, School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China and The higher educational key laboratory for Measuring & Control Technology and Instrumentations of HeilongjiangProvince, School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China |
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| Abstract: | |
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| Keywords: | gassensor arrays ceramic micro hotplate thermal interference micro electro mechanical system(MEMS) |
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