Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator |
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| Affiliation: | 1. College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China;2. Southwestern Institute of Physics, Chengdu 610041, China;3. School of Physics and Materials Engineering, Dalian Nationalities University,Dalian 116600, China;4. Laser and Plasma Research Institute, Shahid Beheshti University, Evin, Tehrar, Iran;5. School of Physics and Mechanical & Electrical Engineering, Xiamen University,Xiamen 361005, China |
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| Abstract: | An experimental investigation of the saturation ion current densities(Jions) in hydrogen inductively coupled plasma(ICP) produced by a large-power(2-32 kW) radio frequency(RF) generator is reported,then some reasonable explanations are given out.With the increase of RF power,the experimental results show three stages:in the first stage(2-14 kW),the electron temperature will rise with the increase of RF power in the ICP,thus,the J_(ions) increases continually as the electron temperature rises in the ICR In the second stage(14-20 kW),as some H~- ions lead to the mutual neutralization(MN),the slope of J_(ions) variation firstly decreases then increases.In the third stage(20-32 kW),both the electronic detachment(ED) and the associative detachment(AD) in the ICP result in the destruction of H~- ions,therefore,the increased amplitude of the J_(ions) in the third stage is weaker than the one in the first stage.In addition,with the equivalent transformer model,we successfully explain that the J_(ions) at different radial locations in ICP has the same rule.Finally,it is found that the J_(ions) has nothing to do with the outer/inner puffing gas pressure ratio,which is attributed to the high-speed movement of hydrogen molecules. |
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| Keywords: | saturation ion current densities large-power RF generator outer/inner puffing gas pressure ratio H-ion transformer model |
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