| 纳秒激光诱导铜箔喷射机制的研究 |
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| 引用本文： | 黄亚军,蔡文莱,陈英怀,黄志刚. 纳秒激光诱导铜箔喷射机制的研究[J]. 红外与激光工程, 2019, 48(2): 206003-0206003(7). DOI: 10.3788/IRLA201948.0206003 |
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| 作者姓名： | 黄亚军 蔡文莱 陈英怀 黄志刚 |
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| 作者单位： | 1.广东工业大学 机电工程学院,广东 广州 510006; |
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| 基金项目： | 国家自然科学基金（11172072,51175091） |
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| 摘 要： | 使用纳秒Nd:YAG脉冲激光进行了微米厚铜箔的激光诱导喷射机制研究。通过控制激光脉冲能量10~500 J,揭示了三种不同的喷射现象:无喷射、稳定喷射和溅射。在稳定喷射模式中,发现了由单一脉冲同时引发的向前和向后喷射现象,可同时在接收层与靶材层方向制备出微细结构。用有限元方法对激光辐照产生的温度场和铜箔相变进行了计算,揭示了纳秒激光诱导喷射主要是由气相膨胀所带动的流体动力学所引起,并界定了发生稳定喷射所需的激光能量阈值。采用Rayleigh-Plesset方程对激光诱导的汽泡动力学进行了计算,分析认为汽泡的迅速扩张和收缩,是分别引起向前和向后喷射的主要原因。根据实验和仿真结果,提出了通过控制激光参数实现稳定喷射的方法。
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| 关 键 词： | 激光诱导向前转移 喷射机制 数值仿真 激光诱导空化 |
| 收稿时间： | 2018-09-12 |
Study on ejection mechanism of copper film induced by nanosecond laser |
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| Affiliation: | 1.School of Electro-mechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;2.Guangzhou Key Laboratory of Nontraditional Machining and Equipment,Guangzhou 510006,China |
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| Abstract: | Laser induced ejection mechanism of micron thick copper film was studied using nanosecond Nd:YAG laser pulses. By carrying out the experiments with different energy of laser pulses 10-500 J, three different ejection regimes were revealed:no ejection, stable ejection and sputtering. In the stable ejection regime, the forward and backward ejection were found to be simultaneously induced by a single laser shot. This phenomenon opened a way to the fabrication of microstructures on both the receiving and the donor substrate. The temperature field and the phase transition in the copper film were analyzed using the finite element method, which revealed that the laser-induced ejection was mainly caused by the hydrodynamics behavior of the molten and the evaporated material. The laser energy thresholds for stable ejection were characterized based on the thermodynamics calculations. The laser induced hydrodynamics behavior (bubble dynamics) was well described by the Rayleigh-Plesset equation, and which was solved numerically in the paper. It was discovered that rapid bubble expansion and collapse were the main causes of the forward and backward ejections, respectively. Based on the experimental and numerical findings, the controlling schemes of the laser pulse parameters for the stable ejections were introduced. |
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