| CO2激光多程平移法制备高质量梯形PMMA微通道 |
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| 引用本文： | 吴天昊,柯常军,姜永恒,孔心怡,钟艳红. CO2激光多程平移法制备高质量梯形PMMA微通道[J]. 红外与激光工程, 2019, 48(3): 306003-0306003(5). DOI: 10.3788/IRLA201948.0306003 |
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| 作者姓名： | 吴天昊 柯常军 姜永恒 孔心怡 钟艳红 |
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| 作者单位： | 1.中国科学院电子学研究所,北京 100190; |
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| 基金项目： | 国家自然科学基金（61475157） |
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| 摘 要： | 由于非金属材料对长波红外激光有较强的吸收，CO2激光常被用于制备PMMA微通道。激光光强呈高斯分布，导致常规激光静态多程刻蚀法制备的微通道截面为三角形，无法满足微流体芯片中的实际应用需求。提出了一种激光多程平移刻蚀法，以首次刻蚀形成的热影响区（HAZ）为界限多程横向重叠平移刻蚀，可以快速制备出理想梯形截面的高质量微通道。通过与CO2激光静态多程刻蚀法在横截面、热影响区、表面粗糙度等方面的对比，结果表明，CO2激光多程平移刻蚀法制备的PMMA微通道热影响区更小、表面更光滑、横截面更实用。
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| 关 键 词： | 微通道 CO2激光 梯形通道 PMMA |
| 收稿时间： | 2018-10-10 |
Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method |
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| Affiliation: | 1.Institute of Electronics,Chinsese Academy of Sciences,Beijing 100190,China;2.University of Chinese Academy of Sciences,Beijing 100490,China;3.Department of Physics,Jilin University,Changchun 435100,China |
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| Abstract: | As non-metallic materials have strong absorption of long-wave infrared laser, the CO2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity, the cross-section of the micro-channels prepared by the conventional method is triangular. This can't meet the practical application requirements in the microfluidic chip. In this paper, a CO2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multi-pass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness. |
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