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Differences in the nanoscale electrical properties of GaN films grown on sapphire and ZnO substrates by molecular beam epitaxy
Authors:Sy‐Hann Chen  Chiung‐Wu Su  Li‐Hsin Chang  Tzung‐Han Tsai
Affiliation:Department of Electrophysics, National Chiayi University, Chiayi, Taiwan
Abstract:Gallium nitride (GaN) films were grown on sapphire and zinc oxide (ZnO) single crystal substrates using plasma‐assisted molecular beam epitaxy. As ZnO for GaN have a better lattice match, the coverage ratio of the GaN (002) plane on the ZnO substrate was significantly higher by about 45%. According to conducting atomic force microscopy and scanning surface potential microscopy measurements, the surface of GaN films grown on the ZnO substrate had two excellent physical characteristics: (a) an 18% reduction of the high contact current region, and (b) a highly uniform work function distribution. Therefore, for future applications in GaN‐based light‐emitting diodes, the use of ZnO as a substrate will prolong the luminescence lifetime and enhance the luminescent monochromaticity.
Keywords:conducting atomic force microscopy  gallium nitride  scanning surface potential microscopy  zinc oxide
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