| 脉冲激光扫描淀积类金刚石薄膜 |
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| 引用本文： | 王秋良 王又青. 脉冲激光扫描淀积类金刚石薄膜[J]. 激光技术, 1998, 22(2): 77-79 |
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| 作者姓名： | 王秋良 王又青 |
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| 作者单位： | 1.华中理工大学激光技术国家重点实验室, 武汉, 430074 |
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| 摘 要： | 采用能量密度为1.178×109W/cm2的XeCl准分子激光直接辐照高纯度的石墨靶,并同时采用辅助放电,在1×10-5Torr的真空环境中,于温度为80℃的Si(100)的基片上淀积出类金刚石薄膜,Raman光谱显示在1330cm-1处出现较强的散射峰值;对薄膜红外光谱进行测试,其光谱在2900cm-1处有吸收峰,表明所淀积的类金刚石薄膜含有C-H键,其H元素与C元素的比为45%.薄膜的电阻率为1.89×106Ω/cm,通过光吸收测得的该薄膜的能隙为1.55eV.
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| 关 键 词： | 脉冲激光 类金刚石薄膜 Raman光谱 |
| 收稿时间： | 1996-10-08 |
| 修稿时间： | 1997-08-06 |
Pulsed laser scanning deposition of diamondlike thin films |
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| Wang Qiuliang,Wang Youqin,An Chengwu. Pulsed laser scanning deposition of diamondlike thin films[J]. Laser Technology, 1998, 22(2): 77-79 |
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| Authors: | Wang Qiuliang Wang Youqin An Chengwu |
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| Abstract: | The diamondlike thin films were prepared by irradiation on high pure graphite with a high energy density(1.178×109W/cm2) laser (XeCl 308nm) in 1×105Torr vacuum.The Raman spectra shows the thin film has the properties of diamond,the scatter peak is 1330cm-1.The IR spectra shows the thin film contained C-H bound,and the ratio of H to C is about 45%.The resistivity and optical energy gap of the thin film are 1.89×106Ω/cm and 1.55eV,respectively. |
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| Keywords: | pulsed laser deposition diamondlike thin film Raman spectra |
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