Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering |
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| Zhang Huafu, Lei Chengxin, Liu Hanfa, Yuan Changkun. Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering[J]. Journal of Semiconductors, 2009, 30(4): 043004. doi: 10.1088/1674-4926/30/4/043004 Zhang H F, Lei C X, Liu H F, Yuan C K. Thickness dependence of the properties of transparent conducting ZnO:Zr films deposited on flexible substrates by RF magnetron sputtering[J]. J. Semicond., 2009, 30(4): 043004. doi: 10.1088/1674-4926/30/4/043004.Export: BibTex EndNote |
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| Authors: | Zhang Huafu Lei Chengxin Liu Hanfa Yuan Changkun |
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| Affiliation: | School of Physics and Optic-Electronic Information, Shandong University of Technology, Zibo 255049, China;School of Physics and Optic-Electronic Information, Shandong University of Technology, Zibo 255049, China;School of Physics and Optic-Electronic Information, Shandong University of Technology, Zibo 255049, China;School of Physics and Optic-Electronic Information, Shandong University of Technology, Zibo 255049, China |
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| Abstract: | Transparent conducting zirconium-doped zinc oxide(ZnO:Zr)thin films with high transparency,low resistivity and good adhesion were successfully prepared on water-cooled flexible substrates(polyethylene glycol terephthalate,PET)by RF magnetron sputtering.The structural,electrical and optical prooerties of the films were studied for different thicknesses in detail.X-ray diffraction(XRD)and scanning electron microscopy(SEM)revealed that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrate．The lowest resistivity achieved is 1.55×10-3 Ω·cm for a thickness of 189 nm with a Hall mobility of 17.6cm2/(V·s)and a carrier concentration of 2.15×1020cm-3.All the films present a high transmittance of above 90％in the wavelength range of the visible spectrum. |
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| Keywords: | zirconium-doped zinc oxide thin films flexible substrates magnetron sputtering transparent conduct ing films |
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