| Affiliation: | 1. National Center for Electron Microscopy in Beijing, School of Materials Science and Engineering, The State Key Laboratory of New Ceramics and Fine Processing, Key Laboratory of Advanced Materials (MOE), Tsinghua University, Beijing, P. R. China;2. Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, China;3. Center for Nano and Micro Mechanics, Tsinghua University, Beijing, China;4. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA;5. Institute of Microelectronics, Tsinghua University, Beijing, China;6. Key Laboratory for Micro‐Nano Physics and Technology of Hunan Province, Hunan University, Changsha, Hunan, China |
