Affiliation: | 1. Department of Mechanical Engineering, Solid Mechanics, Technical University of Denmark, Kongens Lyngby, Denmark;2. Department of Electrical Engineering, Centre for Acoustic‐Mechanical Micro Systems, Technical University of Denmark, Kongens Lyngby, Denmark;3. School of Engineering and Applied Sciences, Wyss Institute for Biologically Inspired Engineering, Harvard University, Cambridge, MA, USA |