| 基于激光干涉法的曲率半径精密检测系统 |
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| 引用本文： | 代雷,隋永新,吴迪. 基于激光干涉法的曲率半径精密检测系统[J]. 红外与激光工程, 2013, 42(8): 2221-2225 |
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| 作者姓名： | 代雷 隋永新 吴迪 |
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| 作者单位： | 1.中国科学院长春光学精密机械与物理研究所 应用光学国家重点实验室,吉林 长春 130033; |
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| 摘 要： | 为了满足光学元件曲率半径精密检测的需求，设计了应用激光干涉方法的曲率半径精密检测系统，实现了对口径100~300 mm，曲率半径500~2 000 mm光学元件曲率半径的高精度，非接触式测量。并分析了影响曲率半径测量结果的各项不确定度，进行不确定度合成。最终完成曲率半径精密检测系统的装调，进行验证实验，曲率半径测量结果相对不确定度约710-6，满足了1010-10的设计要求。
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| 关 键 词： | 曲率半径测量 激光干涉 不确定度 干涉检验 |
| 收稿时间： | 2012-12-13 |
Precision of measuring system of radius of curvature using laser interference method |
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| Dai Lei , Sui Yongxin , Wu Di. Precision of measuring system of radius of curvature using laser interference method[J]. Infrared and Laser Engineering, 2013, 42(8): 2221-2225 |
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| Authors: | Dai Lei Sui Yongxin Wu Di |
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| Affiliation: | 1.State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Air and Space Intelligence Faculty,Air Force Aviation University,Changchun 130022,China |
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| Abstract: | In order to meet the demand of precision measurement of radius of curvature, precision ROC measurement system was designed based on laser interferometry. High precision, non-contact ROC measurement of optic elements was achieved, whose diameter was 100-300 mm and ROC 500-200 mm. The factors of ROC measurement results was analyzed and combination of standard uncertainty was caculated. Installation and adjustment of the system and verification experiments was finished. The relative uncertainty of ROC experiment results is above 710-6, it can meet the design demand of 1010-10. |
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| Keywords: | radius of curvature laser interference uncertainty interferometry |
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