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| 退火条件对磁控溅射MgO-Ag3Sb-Sb2O4柔性薄膜热电性能的影响 | |
| 引用本文： | 刘丹,赵亚欣,郭锐,刘艳涛,张志东,张增星,薛晨阳. 退火条件对磁控溅射MgO-Ag3Sb-Sb2O4柔性薄膜热电性能的影响[J]. 无机材料学报, 2022, 37(12): 1302-1310. DOI: 10.15541/jim20220107 |
| 作者姓名： | 刘丹 赵亚欣 郭锐 刘艳涛 张志东 张增星 薛晨阳 |
| 作者单位： | 1.中北大学 仪器科学与动态测试教育部重点实验室, 太原030051 2.西安理工大学 电子工程系, 西安710048 |
| 基金项目： | 国家自然科学基金青年项目(62001428);国家重点研发计划(2019YFB2004800);山西省高等学校科技创新项目(2020L0309) |
| 摘 要： | MgAgSb是一种具有潜力且元素储量相对丰富的室温热电材料, 有望用于构建高性能可穿戴温差电池。本研究尝试在聚酰亚胺(PI)基底上磁控溅射制备MgAgSb薄膜, 并系统研究退火条件对其热电性能的影响。结果表明样品未形成纯相的MgAgSb柔性热电薄膜, 而是形成了由Ag3Sb、MgO及Sb2O4多相组成的柔性薄膜, 其中Ag3Sb起主要热电功能。不同气氛退火可以显著提升MgO-Ag3Sb-Sb2O4 (Mg-Ag-Sb)柔性薄膜的热电性能, 其中真空处理性能最佳。在真空条件下, 随着退火温度升高, 柔性薄膜的热电性能呈现先增加后减少的趋势, 当退火温度为573 K时热电性能最佳, 室温附近功率因子达到74.16 μW∙m-1∙K-2。并且, 薄膜表现出较好的柔性, 弯曲900次后, 电导率仅变化了14%。本研究为MgAgSb柔性热电薄膜的制备及可穿戴应用提供了参考。 |
| 关 键 词： | MgAgSb 退火处理 热电性能 柔性薄膜 |
| 收稿时间： | 2022-03-02 |
| 修稿时间： | 2022-04-17 |
Effect of Annealing Conditions on Thermoelectric Properties of Magnetron Sputtered MgO-Ag3Sb-Sb2O4 Flexible Films |
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| LIU Dan,ZHAO Yaxin,GUO Rui,LIU Yantao,ZHANG Zhidong,ZHANG Zengxing,XUE Chenyang. Effect of Annealing Conditions on Thermoelectric Properties of Magnetron Sputtered MgO-Ag3Sb-Sb2O4 Flexible Films[J]. Journal of Inorganic Materials, 2022, 37(12): 1302-1310. DOI: 10.15541/jim20220107 | |
| Authors: | LIU Dan ZHAO Yaxin GUO Rui LIU Yantao ZHANG Zhidong ZHANG Zengxing XUE Chenyang |
| Affiliation: | 1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China 2. Department of Electronic Engineering, Xi’an University of Technology, Xi’an 710048, China |
| Abstract: | MgAgSb is a promising room temperature thermoelectric material with relatively abundant element reserves for the construction of high-performance wearable thermoelectric batteries. In this study, Mg-Ag-Sb thin films were prepared on polyimide (PI) substrates by using magnetron sputtering, and the effects of annealing conditions on their thermoelectric properties were systematically investigated. The results showed that the MgAgSb flexible thermoelectric film composed of MgO, Ag3Sb and Sb2O4 multiphases instead of pure phase, in which Ag3Sb played main role of thermoelectric function. Different annealing atmospheres significantly improved the thermoelectric properties of MgO-Ag3Sb-Sb2O4 (Mg-Ag-Sb) flexible thin films, among which the vacuum treatment appeared the best performance. Under vacuum conditions, the thermoelectric properties firstly increased and then decreased with the annealing temperature increasing, and the best thermoelectric property was achieved when the annealing temperature was 573 K, with a power factor of 74.16 μW∙m-1∙K-2 near room temperature. Moreover, the film exhibited good flexibility, and the conductivity changed by only 14% after 900 bending times. This study provides a reference for the preparation of MgAgSb flexible thermoelectric films and their wearable applications. |
| Keywords: | MgAgSb annealing treatment thermoelectric property flexible film |
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