| 高精度标准镜支撑结构的研究与设计 |
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| 引用本文： | 丁玲,王涛,杨洪波,贾宏光. 高精度标准镜支撑结构的研究与设计[J]. 红外与激光工程, 2014, 43(4): 1172-1175 |
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| 作者姓名： | 丁玲 王涛 杨洪波 贾宏光 |
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| 作者单位： | 1.中国科学院长春光学精密机械与物理研究所,吉林长春130033; |
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| 基金项目： | 中国科学院“三期”创新工程 |
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| 摘 要： | 为了保证高精度光学元件面形检测精度，必须对干涉仪标准镜自身的面形精度进行严格控制。在考虑标准镜自重的情况下，采用有限元方法研究了不同胶点数量及分布形式、不同的镜框支撑方式对参考面面形精度的影响。根据研究结果，针对球面标准镜面形精度要优于/40的要求，设计了口径150mm的标准镜的支撑方式，采用123点胶接、镜框底面六点的挠性支撑方式，经有限元分析得到:参考面面形的PV值为7.36nm，RMS值为1.52nm；并验证了温度变形较自重变形很小。结果表明，各项指标满足设计要求，证明了结构设计的合理性。
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| 关 键 词： | 标准镜 参考面 支撑结构 自重变形 有限元法 |
| 收稿时间： | 2013-08-21 |
Investigation and design for structure of high-precision reference mirror |
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| Affiliation: | 1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,China;2.University of Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | In order to ensure the measuring precision of high accuracy optical, the accuracy of the interferometer reference mirror must be controlled strictly. The influences of different number of adhered points and point distribution, and different support schemes on the shapes of reference mirror were investigated by means of finite element method under gravitational conditions. In order to achieve the peak to valley(PV) value of reference sphere mirror which is better than /40, a kind of support structure of 150 mm reference mirror was designed according to the results of research. The experimental results by means of finite element method indicate that the peak to valley (PV) value and root mean square (RMS) value of the reference surface are only 7.36 nm and 1.52 nm by support scheme with 123 distributed and six-points flexible support, and the thermal deformation is less than gravity deformation. These results demonstrate that all targets validate the rationality of structure and it can well satisfy the requirements. |
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