Reliability and mechanical durability tests of flexible OLED with ALD coating |
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| Authors: | Yasuhiro Jimbo Yuki Tamatsukuri Minato Ito Kohei Yokoyama Yoshiharu Hirakata Shunpei Yamazaki |
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| Affiliation: | Semiconductor Energy Laboratory Co., Ltd., Kanagawa, Japan |
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| Abstract: | To improve the reliability and mechanical durability of a flexible organic light‐emitting diode display, the entire flexible display is coated with an aluminum oxide film by atomic layer deposition (ALD). Because the step coverage of ALD is excellent, the AlOx film was deposited not only on the front and back surfaces but also on the side surfaces of the display. A high‐temperature and high‐humidity preservation test, repetitive bending tests, and a pencil hardness test were conducted on the flexible display with ALD‐AlOx coating. The display survived 500 h of a 65°C, 95% preservation test, endured a 100,000‐time repetitive bending test with a curvature radius of 4 mm, and was found to have a pencil hardness of 4H. |
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| Keywords: | flexible OLED high‐temperature test high‐humidity test passivation atomic layer deposition crystalline‐OS CAAC |
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