Bandgap variation in grain size controlled nanostructured CdO thin films deposited by pulsed-laser method

Cadmium oxide (CdO) thin films were prepared by pulsed laser deposition technique. Their structure, surface morphology, optical and electrical properties have been investigated. With a decrease in the laser energy density, the average grain size of the CdO film can be adjusted from 108 to 25 nm. High-resolution TEM observation showed that more crystalline defects like lattice distortion, dislocation and amorphous structure existed in the small grained (25 nm) CdO film, and X-ray photoelectron spectroscopy analysis confirmed that the film had more oxygen vacancies. The electrical and optical properties of the films significantly depended on the grain size. With the grain size decreasing to 25 nm, the optical band gap energy of the CdO film increased obviously from 2.82 to 3.33 eV. This change in the nature of material from semimetal to a wide band gap semiconductor, combining with its higher optical transmission (92 %) in visible light region, higher carrier concentration (1.25 × 10²¹ cm^?3) and lower electrical resistivity (2.8 × 10^?4 cm^?3), makes the nano-grained CdO film very useful in optoelectronic applications.     

Effect of film thickness on properties of aluminum doped zinc oxide thin films deposition on polymer substrate

A series of aluminum doped zinc oxide thin films with different thickness (25–150 nm) were deposited on indium tin oxide coated polyethylene terephthalate substrates by radio frequency magnetron sputtering method at room temperature. The structural, optical and electrical properties of the films were investigated by X-ray Diffractometer, UV–Vis spectrometer and Hall Effect Measurement System. All the obtained films were polycrystalline with a hexagonal structure and a preferred orientation along [002] direction with the c-axis perpendicular to the substrate surface. The optical energy band gap (E_g) values of the films were found to be in the range from 3.36 to 3.26 eV, and their average optical transmissions were about 75 % in the visible region. The films had excellent electrical properties with the resistivities in the range from 2.78 × 10^?5 to 2.03 × 10^?4 Ω cm, carrier densities more than 3.35 × 10²¹ cm^?3 and Hall mobilities between 5.77 and 11.13 cm²/V s.     

Structural,optical and electrical properties of SnO<Subscript>2</Subscript>:F thin films deposited by spray pyrolysis for application in thin film solar cells

Fluorine doped tin oxide (FTO) thin films with adequate properties to be used as transparent electrical contact for PV solar cells were synthesised using the spray pyrolysis technique, which provides a low cost operation. The deposition temperature and the fluorine doping have been optimized for achieving a minimum resistivity and maximum optical transmittance. No post-deposition annealing treatments were carried out. The X-ray diffraction study showed that all the FTO films were polycrystalline with a tetragonal crystal structure and preferentially oriented along the (200) direction. The grain size ameliorates with the increase in substrate temperature. The samples deposited with the substrate temperature at 440 °C and fluorine content of 20 wt % exhibited the lowest electrical resistivity (1.8 × 10^?4 Ω cm), as measured by four-point probe. Room-temperature Hall measurements revealed that the 20 wt% films are degenerate and exhibit n-type electrical conductivity with carrier concentration of ~4.6 × 10²⁰ cm^?3, sheet resistance of 6.6 Ω/□ and a mobility of ~25 cm² V^?1 s^?1. In addition, the optimized growth conditions resulted in thin films (~500 nm thickness) with average visible transmittance of 89 % and optical band-gap of 3.90 eV. The electrical and optical characteristics of the deposited films revealed their excellent quality as a TCO material.     

Structural, optical, and electrical properties of indium-doped cadmium oxide films prepared by pulsed filtered cathodic arc deposition

Indium-doped cadmium oxide (CdO:In) films were prepared on glass and sapphire substrates by pulsed filtered cathodic arc deposition (PFCAD). The effects of substrate temperature, oxygen pressure, and an MgO template layer on film properties were systematically studied. The MgO template layers significantly influence the microstructure and the electrical properties of CdO:In films, but show different effects on glass and sapphire substrates. Under optimized conditions on glass substrates, CdO:In films with thickness of about 125 nm showed low resistivity of 5.9 × 10^?5 Ωcm, mobility of 112 cm²/Vs, and transmittance over 80 % (including the glass substrate) from 500 to 1500 nm. The optical bandgap of the films was found to be in the range of 2.7 to 3.2 eV using both the Tauc relation and the derivative of transmittance. The observed widening of the optical bandgap with increasing carrier concentration can be described well only by considering bandgap renormalization effects along with the Burstein–Moss shift for a nonparabolic conduction band.     

Study of high mobility carriers in Ni-doped CdO films

Cadmium oxide (CdO) doped with different amounts of nickel ion thin films have been prepared on silicon and glass substrates by vacuum evaporation technique. The effects of nickel doping on the structural, electrical, optical and optoelectronic properties of the host CdO films were systematically studied. The sample elemental composition was determined by the X-ray fluorescence spectroscopy method. The X-ray diffraction method was used to study the crystalline structure of the samples. It shows that some of Ni $^{3+}$ ions occupy mainly locations when in interstitial positions and Cd^2?+?-ion vacancies of CdO lattice. The bandgap of Ni-doped CdO suffers narrowing till 10–12% compared to undoped CdO. Such bandgap narrowing was studied within the framework of the available models. The electrical behaviours show that all the prepared Ni-doped CdO films are degenerate semiconductors. However, the nickel doping influences all the optoelectrical properties of CdO. Their d.c. conductivity, carrier concentration and mobility increased compared to undoped CdO film. The largest mobility of 112·6 cm²/V·s was measured for 1–2% Ni-doped CdO film. From optoelectronics point of view, Ni-doped CdO can be used in infrared-transparent-conducting-oxide (NIR–TCO) applications.     

Effect of annealing time on the structural,optical and electrical characteristics of DC sputtered ITO thin films

Using an Indium tin oxide (ITO) ceramic target (In₂O₃:SnO₂, 90:10 wt%), ITO thin films were deposited by conventional direct current magnetron sputtering technique onto glass substrates at room temperature. The obtained ITO films were annealed at 400 °C for different annealing times (1, 2, 5, 7, and 9 h). The effect of annealing time on their structural, optical and electrical properties was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microcopy (AFM), ultra violet–visible (UV–Vis) spectrometer, and temperature dependence Hall measurements. XRD data of obtained ITO films reveal that the films were polycrystalline with cubic structure and exhibit (222), (400) and (440) crystallographic planes of In₂O₃. AFM and Scanning Electron Microscopy SEM have been used to probe the surface roughness and the morphology of the films. The refractive index (n), thickness and porosity (%) of the films were evaluated from transmittance spectra obtained in the range 350–700 nm by UV–Vis. The optical band gap of ITO film was found to be varying from 3.35 to 3.47 eV with the annealing time. The annealing time dependence of resistivity, carrier concentration, carrier mobility, sheet resistance, and figure of merit values of the films at room temperature were discussed. The carrier concentration of the films increased from 1.21 × 10²⁰ to 1.90 × 10²⁰ cm^?3, the Hall mobility increased from 11.38 to 18 cm² V^?1 s^?1 and electrical resistivity decreased from 3.97 × 10^?3 to 2.13 × 10^?3 Ω cm with the increase of annealing time from 1 to 9 h. Additionally, the temperature dependence of the carrier concentration, and carrier mobility for the as-deposited and 400 °C annealed ITO films for 2 and 9 h were analysed in the temperature range of 80–350 K.     

Nanocrystalline copper selenide thin films by chemical spray pyrolysis

Thin films of copper selenide were deposited onto amorphous glass substrates at various substrate temperatures by computerized spray pyrolysis technique. The as deposited copper selenide thin films were used to study a wide range of characteristics including structural, surface morphological, optical and electrical, Hall Effect and thermo-electrical properties. X-ray diffraction study reveals that the films are polycrystalline in nature with hexagonal (mineral klockmannite) crystal structure irrespective of the substrate temperature. The crystalline size is found to be in the range of 23–28 nm. The SEM study reveals that the grains are uniform with uneven spherically shaped and spread over the entire surface of the substrates. EDAX analysis confirmed the nearly stoichiometric deposition of the film at 350 °C. The direct band gap values are found to be in the range 2.29–2.36 eV depending on the substrate temperature. The Hall Effect study reveals that the films exhibit p-type conductivity. The values of carrier concentration and mobility for the film are found to be 5.02 × 10¹⁷ cm^?3 and 5.19 × 10^?3 cm² V^?1 s^?1; respectively for film deposited at 350 °C.     

Low indium content In–Zn–O system towards transparent conductive films: structure,properties and comparison with AZO and GZO

In this work, low content indium doped zinc oxide (IZO) thin films were deposited on glass substrates by RF magnetron sputtering using IZO ceramic targets with the In₂O₃ doping content of 2, 6, and 10 wt%, respectively. The influences of In₂O₃ doping content and substrate temperature on the structure and morphology, electrical and optical properties, and environmental stability of IZO thin films were investigated. It was found that the 6 wt% doped IZO thin film deposited at 150?°C exhibited the best crystal quality and the lowest resistivity of 9.87?×?10^?4 Ω cm. The corresponding Hall mobility and carrier densities were 9.20 cm² V^?1 s^?1 and 6.90?×?10²⁰ cm^?3, respectively. Compared with 2 wt% Al₂O₃ doped ZnO and 5 wt% Ga₂O₃ doped ZnO thin films, IZO thin film with the In₂O₃ doping content of 6 wt% featured the lowest surface roughness of 1.3 nm. It also showed the smallest degradation with the sheet resistance increased only about 4.4% at a temperature of 121?°C, a relative humidity of 97% for 30 h. IZO thin film with 6 wt% In₂O₃ doping also showed the smallest deterioration with the sheet resistance increased only about 2.8 times after heating at 500?°C for 30 min in air. The results suggested that low indium content doped ZnO thin films might meet practical requirement in environmental stability needed optoelectronic devices.     

Effects of annealing on thermoelectric properties of Sb2Te3 thin films prepared by radio frequency magnetron sputtering

Antimony telluride (Sb₂Te₃) thin films were deposited on silicon substrates at room temperature (300 K) by radio frequency magnetron sputtering method. The effects of annealing in N₂ atmosphere on their thermoelectric properties were investigated. The microstructure and composition of these films were characterized using scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction, respectively. The electrical transport properties of the thin films, in terms of electrical conductivity and Seebeck coefficient were determined at room temperature. The carrier concentration and mobility were calculated from the Hall coefficient measurement. Both of the Seebeck coefficient and Hall coefficient measurement showed that the prepared Sb₂Te₃ thin films were p-type semiconductor materials. By optimizing the annealing temperature, the power factor achieved a maximum value of 18.02 μW cm^?1 K^?2 when the annealing temperature was increased to 523 K for 6 h with a maximum electrical conductivity (1.17 × 10³ S/cm) and moderate Seebeck coefficient (123.9 μV/K).     

Structural, electrical and optical properties of Si doped ZnO films grown by atomic layer deposition

Si doped ZnO (SZO) films with various Si concentrations were deposited by atomic layer deposition at 300 °C using triethyzinc, tris(dimethylamino)silane and H₂O₂ as the precursors. The influences of Si doping concentration on structural, electrical and optical properties of ZnO films have been investigated. All the films exhibited a highly preferential c-axis orientation. A minimum resistivity of 9.2 × 10^?4 Ω cm, with a carrier concentration of 4.3 × 10²⁰ cm^?3 and a Hall mobility of 15.8 cm²/Vs, was obtained for SZO film prepared with the Si concentration of 2.1 at%. The increase of conductivity with Si doping was attributed to the presence of Si in +3 valence state acting as donor in ZnO and the increases of oxygen vacancies with Si concentration as proven by XPS measurements. The optical bandgap of SZO films initially increased from 3.25 to 3.55 eV with increasing of Si concentration to 2.1 at%, then decreased with further increase of Si concentration. The blue shift of band gap of SZO films with increasing carrier concentration can be explained by the Burstein-Moss (B-M) effects.     

Highly transparent and conducting In doped CdO synthesized by sol-gel solution processing

Cadmium oxide (CdO) is a much-studied wide gap semiconductor with an inherent high mobility of?>?100 cm²/Vs, high electron concentration of?>?10²¹ cm^?3 and a wide optical transparency window of?>?1800 nm. These unique properties make CdO a potential transparent conductor for full spectrum photovoltaics. However, in order to achieve optimum material properties for optoelectronic applications, CdO was grown by vacuum-based physical or chemical vapor deposition methods. In this work, we explored the application of a low-cost sol-gel spin coating method to achieve highly conducting and transparent CdO thin films doped with 0–10% In (CdO:In). We find that while as-grown CdO:In films are nanocrystalline/amorphous with a high resistivity of?~?1 Ω-cm, polycrystalline and highly conducting films can be obtained after optimized annealing at?≥?400 °C. However, the electron concentration n saturates at?~?5?×?10²⁰ cm^?3 for In concentration?>?5% (or N_In?~?1.9?×?10²¹ cm^?3). This low activation of In may be attributed to the high density of native defects and/or impurities incorporated in the sol-gel process. With 5% In doping, we obtained a low resistivity of ρ?~?2.5?×?10^–4 Ω-cm and a high mobility μ?~?50 cm²/Vs. These values of σ and µ are better than those reported for other TCOs synthesized by solution processes and comparable to conventional commercial TCOs grown by physical vapor deposition methods. Benefiting from their high mobility, these sol-gel CdO:In films are optically transparent over a wide spectral range up to λ?>?1800 nm, making them promising as transparent conductors for optoelectronic devices utilizing the infrared photons.

     

Characterization of ITO/CdO/glass thin films evaporated by electron beam technique

Abstract

A thin buffer layer of cadmium oxide (CdO) was used to enhance the optical and electrical properties of indium tin oxide (ITO) films prepared by an electron-beam evaporation technique. The effects of the thickness and heat treatment of the CdO layer on the structural, optical and electrical properties of ITO films were carried out. It was found that the CdO layer with a thickness of 25 nm results in an optimum transmittance of 70% in the visible region and an optimum resistivity of 5.1×10^?3 Ω cm at room temperature. The effect of heat treatment on the CdO buffer layer with a thickness of 25 nm was considered to improve the optoelectronic properties of the formed ITO films. With increasing annealing temperature, the crystallinity of ITO films seemed to improve, enhancing some physical properties, such as film transmittance and conductivity. ITO films deposited onto a CdO buffer layer heated at 450 °C showed a maximum transmittance of 91% in the visible and near-infrared regions of the spectrum associated with the highest optical energy gap of 3.61 eV and electrical resistivity of 4.45×10^?4 Ω cm at room temperature. Other optical parameters, such as refractive index, extinction coefficient, dielectric constant, dispersion energy, single effective oscillator energy, packing density and free carrier concentration, were also studied.     

Electrical,optical and magnetoresistive behavior of nanostructured ZnO:Cu thin films deposited by sputtering

Copper doped ZnO (ZnO:Cu) nanostructured films with magnetoresistive behavior were produced by growing ZnO/Cu/ZnO arrays at room temperature (RT) by the sputtering technique on corning glass substrates. The arrays were made with two electrical insulating ZnO films of 50 and 105 nm, and a Cu film of 5 nm, both materials were deposited at RT by the RF- and DC-sputtering technique, respectively. The processing method involves two stages that proceed in the course of the growth process, the main one is originated by the non-equilibrium regime of the sputtering technique, and the second is the diffusion-redistribution of the intermediate Cu film towards the neighborhood ZnO layers aided by the nanocrystalline films character. The influence of applying an additional annealing stage to the arrays in N₂ atmosphere at 250 and 350 °C by periods of 30 min were studied. The resistivity of the ZnO:Cu films can be varied from 0.0034 to 2.83 Ω-cm, corresponding to electron concentrations of 1.12?×?10²¹ and 7.85?×?10¹⁷ cm^?3 with carrier mobility of 1.6 and 2.8 cm²/V s. Measured changes on the magnetoresistance behavior of the films at RT were of ?R?~?3% for annealed samples with electron concentration of 1.12?×?10²¹ cm^?3. The X-ray diffraction measurements show that the films are comprised of nanocrystallites with dimensions between 13 and 20 nm in size with preferred (002) orientation. The transmittance of the films in the visible region was of 83% with an optical band gap of ~?3.3 eV for the low-resistivity samples.     

Investigation of dual ion beam sputtered transparent conductive Ga-doped ZnO films

Ga-doped ZnO (GZO) transparent conducting films were deposited on sapphire (0001) substrates using dual ion beam sputtering deposition system. The impact of growth temperature on the structural, morphological, elemental, optical, and electrical properties was thoroughly investigated and reported. X-ray diffraction measurements explicitly confirmed that all GZO films had (002) preferred crystal orientation. The film deposited at 400 °C exhibited the narrowest full-width at half-maximum value of 0.24° for (002) crystalline plane and the lowest room temperature electrical resistivity of 4.11 × 10^?3 Ω cm. The Raman spectra demonstrated the vibrational modes at 576 and 650–670 cm^?1, associated with native oxygen vacancies and elemental Ga doping in ZnO lattice, respectively. All doped films showed an overall transmittance of above 95 % in the visible spectra. A correlation between structural, optical, elemental, and electrical properties with GZO growth temperature was established.     

Damp heat stability of AZO transparent electrode and influence of thin metal film for enhancing the stability

The electrical properties of Aluminum doped ZnO (AZO) thin films prepared by sol–gel method were investigated as a function of annealing atmosphere (vacuum, argon +5 % hydrogen and pure hydrogen) and doping concentration (1, 2, 3 and 4 wt%). An optimal annealing atmosphere (pure hydrogen) and doping concentration (2 wt%) was obtained with a minimum resistivity of 1.6 × 10^?3 Ω cm. The structural, optical and electrical stability has been investigated by a damp-heat test in an environment with 85 % relative humidity at 85 °C. The degradation of the electrical film properties was due to the decrease of carrier concentration and mobility, whereas, no significant change was observed for structural and optical properties. The thin metallic layer (Ti or Cr) was deposited on AZO by sputtering to prevent the penetration of oxygen and water into film thus increasing the electrical stability. Oxide layer of metal was formed on surface when it comes to air at room temperature which was confirmed by X-ray photoelectron spectroscopy and thus a bi-layer of metal/metal oxide layer on AZO film enhances the electrical stability.     

Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating

Abstract

The atomic-layer (AL) doping technique in epitaxy has attracted attention as a low-resistive ultrathin semiconductor film as well as a two-dimensional (2-D) carrier transport system. In this paper, we report carrier properties for B AL-doped Si films with suppressed thermal diffusion. B AL-doped Si films were formed on Si(100) by B AL formation followed by Si cap layer deposition in low-energy Ar plasma-enhanced chemical-vapor deposition without substrate heating. After fabrication of Hall-effect devices with the B AL-doped Si films on unstrained and 0.8%-tensile-strained Si(100)-on-insulator substrates (maximum process temperature 350°C), carrier properties were electrically measured at room temperature. Typically for the initial B amount of 2?×?10¹⁴ cm^?2 and 7?×?10¹⁴ cm^?2, B concentration depth profiles showed a clear decay slope as steep as 1.3 nm/decade. Dominant carrier was a hole and the maximum sheet carrier densities as high as 4?×?10¹³ cm^?2 and 2?×?10¹³ cm^?2 (electrical activity ratio of about 7% and 3.5%) were measured respectively for the unstrained and 0.8%-tensile-strained Si with Hall mobility around 10–13 cm² V^?1 s^?1. Moreover, mobility degradation was not observed even when sheet carrier density was increased by heat treatment at 500–700 °C. There is a possibility that the local carrier (ionized B atom) concentration around the B AL in Si reaches around 10²¹ cm^?3 and 2-D impurity-band formation with strong Coulomb interaction is expected. The behavior of carrier properties for heat treatment at 500–700 °C implies that thermal diffusion causes broadening of the B AL in Si and decrease of local B concentration.     

Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films

In this study, hydrogenated aluminum doped zinc oxide (HAZO) thin films were prepared by DC magnetron sputtering in different H₂/(Ar+H₂) volume ratio atmosphere. The effects of post-rapid thermal annealing (RTA) in Ar+8 % H₂ atmosphere on the structural, optical, and electrical properties of the thin films were investigated systematically. Results showed that the RTA treatment effectively improved the electrical conductivity of the HAZO thin films with small hydrogen content, due to the increase of the Hall mobility and the carrier concentration. The lowest resistivity of the HAZO thin film deposited in 8 % H₂ ratio atmosphere reached 6.3 × 10^?4 Ω cm after RTA. The improved electrical properties of the RTA-treated HAZO films were ascribed to the activation of Al dopants, the increase of oxygen vacancies and the desorption of negative charged oxygen species at the grain. These results implied that RTA process might be useful to fabricate high quality HAZO films with a low thermal budget.     

Effect of Ga doping concentrations,substrate temperatures and working pressures on the electrical and optical properties of ZnO thin films

We fabricated Ga-doped ZnO (GZO) thin films on glass substrate by RF magnetron sputtering method with different conditions of Ga₂O₃ concentration, substrate temperature and working pressure. Next we investigated the electrical, optical and structural properties of the GZO thin films. At a substrate temperature of 300 °C, a working pressure of 1 mTorr, and a Ga₂O₃ concentration of 3 wt%, the GZO thin films showed the lowest resistivity of 3.16 × 10^?4 Ω cm, a carrier concentration of 7.64 × 10²⁰ cm^?3 and a Hall mobility of 25.8 cm²/Vs. Moreover, the GZO thin films exhibited the highest (002) orientation under the same conditions and the full width at half maximum of X-ray peak was 0.34°. All GZO thin films showed the optical transmittance of more than 80 % in the visible range regardless of working conditions. The Burstein–Moss effect was observed by the change of doping concentration of Ga₂O₃. The GZO thin films were fabricated to have the good electrical and optical properties through optimizing doping concentration of Ga₂O₃, substrate temperature, working pressure. Therefore, we confirmed the possibility of application of GZO thin film as transparent conductive oxide used in flat panel display and solar cell.     

Structural, optical and electrical measurements on boron-doped CdO thin films

Several boron-doped CdO with different boron composition thin films have been prepared on glass substrate by a vacuum evaporation technique. The effects of boron doping on the structural, electrical and optical properties of the host CdO films were systematically studied. The X-ray diffraction study shows that some of B³⁺ ions occupied locations in interstitial positions and/or Cd²⁺-ion vacancies of CdO lattice. The band gap of B-doped CdO suffers narrowing by 30–38% compare to undoped CdO. Such band gap narrowing (BGN) was studied in the framework of the available models. Furthermore, a phenomenological evaluation of the dependence of band gap on the carrier concentration in the film samples is discussed. The electrical behaviours show that all the prepared B-doped CdO films are degenerate semiconductors. However, the boron doping influences all the optoelectrical properties of CdO. Their dc-conductivity, carrier concentration and mobility increase compare to undoped CdO film. The largest mobility of 45–47 cm²/V s was measured for 6–8% boron-doped CdO film. From near infrared transparent-conducting oxide (NIR-TCO) point of view, boron is effective for CdO donor doping.     

Structural,optical and electrical properties of PbS and PbSe quantum dot thin films

PbS and PbSe were prepared by hot injection method. The powders were used for preparing the corresponding films by using thermal evaporation technique. The structural, optical and electrical properties of PbS and PbSe thin films were investigated. The structural properties of PbS and PbSe were investigated by X-ray diffraction, transmission electron microscopy and energy dispersive X-ray techniques (EDX). PbS and PbSe films were found to have cubic rock salt structure. The particles size ranged from 1.32 to 2.26 nm for PbS and 1.28–2.48 nm for PbSe. EDX results showed that PbS films have rich sulphur content, while PbSe films have rich lead content. The optical constants (absorption coefficient and the refractive index) of the films were determined in the wavelength range 200–2500 nm. The optical energy band gap of PbS and PbSe films was determined as 3.25 and 2.20 eV, respectively. The refractive index, the optical dielectric constant and the ratio of charge carriers concentration to its effective mass were determined. The electrical resistivity, charge carriers concentration and carriers mobility of PbS at room temperature were determined as 0.55 Ω cm, 1.7 × 10¹⁶ cm^?3 and 656 cm² V^?1 s^?1, respectively, and for PbSe films they were determined as 0.4 Ω cm, 9 × 10¹⁵ cm^?3 and 1735 cm² V^?1 s^?1, respectively. These electrical parameters were investigated as a function of temperature.