共查询到16条相似文献,搜索用时 218 毫秒
1.
马志兵 《真空科学与技术学报》2013,33(2)
介绍了一种基于扩散硅传感器的低真空测量仪表YZ-111型压阻真空计.仪表由传感器单元、信号调理单元、A/D采集单元、中央处理单元、按键和显示单元等组成.该仪器采用进口扩散硅压阻式传感器.信号被调理后由高精度数字采集系统采集、分析,直接输出数字信号.配以温度补偿技术,保证它的高精度.通过用高精度真空计校准,并与之比较,其测量结果达到预期. 相似文献
2.
本文介绍了传感器信号处理器MAX1457的主要功能及其用于对硅压阻式加速度计进行温度补偿的系统组成、补偿方法等。并通过实际补偿结果表明.利用MAX1457对硅压阻式加速度计进行热零点漂移补偿和热灵敏度漂移补偿.有效提高了压阻式加速度计的温度稳定性。 相似文献
3.
小型耐高温压差传感器主要用于高温状态下测量发动机活塞两腔压力差。采用SOS(硅-蓝宝石)材料制作硅压阻式压力敏感芯片,两只压力敏感元件,分别测量高压端和低压端的压力输出,再利用精密的信号处理电路,将微弱的电信号进行放大处理,实现标准的模拟信号输出。 相似文献
4.
提出了一种新的航空升降速度标准信号自动产生方法.从控制方面,采用硅压阻模拟、石英数字双传感器,分别作为过程控制传感器和基准压力传感器,保证系统升降速度的准确度.采用双闭环控制方案,模拟闭环采用电路设计实现,数字闭环通过计算机、数字传感器和软件实现.控制执行部件采用一对比例电磁阀门.控制电路设计采用了模拟电路PID和数字PID控制结合的串级控制方案,对实现升降速度和压力信号变化的微分电路进行了设计.实验证明,该装置升降速度的输出准确度优于0.2%F.S,控制范围为0~200 m/s. 相似文献
5.
6.
7.
8.
测高g值的加速度硅微传感器采用单晶硅材料制成,直接输出信号小,存在严重的温度误差。采用MAX1457专用传感器信息处理器,它可以补偿传感器的温度误差和非线性误差。本文分析了MAX1457的工作原理,设计了获得补偿参数的系统,最后采用高速的CMOS逻辑或门对8个阵列传感器信号进行选择。 相似文献
9.
为实现体内压力(如:血压、颅内压等)的实时监测,采用微机电系统(MEMS)技术制造出植入式微压力传感器.由于它是电容式传感器,在信号读取系统中,首先通过集成电路CAV414将电容信号转换为电压信号.通过理论计算和实际试验测试,微压力传感器初始电容值为15 pF.CAV414检测范围是10 pF~2 nF,检测精度为电容初始值的5%,因此在该系统中可检测到的电容最小变化量为0.75 pF,其输出电压范围为0~5 V,该电压信号可以直接作为模拟/数字转换器(ADC)的输入信号.选用ADC0809实现模拟信号向数字信号的转换.ADC0809为一款8通道8位模数转换器,通过FPGA实现对ADC0809的驱动控制.ADC0809的8位输出信号直接作为数字信号的输入,在本文试验中数字信号处理通过FPGA编程实现. 相似文献
10.
11.
12.
Ferrari V. Marioli D. Taroni A. 《IEEE transactions on instrumentation and measurement》2000,49(3):585-590
A signal conditioning circuit based on a relaxation oscillator is proposed for use with resistive bridge sensors. The circuit provides a rectangular-wave output whose frequency is related to the bridge unbalance, and duty-cycle is a function of the overall sensor bridge resistance, hence of the sensor operating temperature. In this way, two measurement values are simultaneously and independently carried on the same output signal. The circuit makes use of a constant current bridge excitation which enables the connection of remote sensors without accuracy degradation, and moreover, for silicon piezoresistive sensors, provides a first-order temperature compensation. A frequency-doubling output stage significantly reduces the nonlinearity due to switching delay times, at the parity of output center frequency and span. Experimental results are reported on the characterization of both the circuit alone and interfaced to a silicon pressure sensor 相似文献
13.
Wolffenbuttel R.F. Schekkerman A.R. 《IEEE transactions on instrumentation and measurement》1994,43(6):906-911
An integrated instrumentation amplifier combined with a bandpass filter has been fabricated in a bipolar process for the phase readout of piezoresistive sensors. Changes in the resistance can be measured directly using an ac-operated bridge configuration. A special technique has been employed to convert these changes into a phase angle relative to the excitation signal. The instrumentation amplifier should have a very high Common-Mode Rejection Ratio (CMRR) at a relatively high bridge operating frequency (100 kHz) in order to actually exploit the advantages of this readout method. The filter should have a well-determined phase behavior to prevent a change in the frequency from affecting the output phase angle. Special emphasis has been placed on the compatibility between micromachining technologies in silicon and bipolar processing, so that a fully integrated smart silicon micromechanical sensor can be made 相似文献
14.
Toward a miniature wireless integrated multisensor microsystem for industrial and biomedical applications 总被引:3,自引:0,他引:3
Tong Boon Tang Johannessen E.A. Lei Wang Astaras A. Ahmadian M. Murray A.F. Cooper J.M. Beaumont S.P. Flynn B.W. Cumming D.R.S. 《IEEE sensors journal》2002,2(6):628-635
This paper presents our work toward the integration of a multisensor microsystem with wireless communication, using system-on-chip (SoC) methodology. Four different forms of microelectronic sensors have been fabricated on two separate 5/spl times/5 mm/sup 2/ silicon chips measuring pH, conductivity, dissolved oxygen concentration, and temperature. The sensors are integrated with a sensor fusion chip comprising analog circuitry for sensor operation and signal amplification prior to digital decoding and transmission. The microsystem prototype will be packaged in a miniature capsule, which measures 16 mm /spl times/55 mm including batteries and dissipates 6.3 mW for a minimal life cycle of 12 h. 相似文献
15.
A fully integrated temperature compensation technique for piezoresistive pressure sensors is presented. The technique is suitable for batch fabricated sensors operable over a temperature range of -40°C-130°C and a pressure range of 0-310 kPa. The implementing hardware for the technique is developed and verified through PSpice and VHDL simulations. The technique is very effective for pressure values below 240 kPa and provides reasonable results for higher pressures. The technique is structurally simple and uses standard IC fabrication technologies 相似文献