$S$ - and $C$ -Band Ultra-Compact Phase Shifters Based on All-Pass Networks

Ultra-compact phase shifters are presented. The proposed phase-shifting circuits utilize the lumped element all-pass networks. The transition frequency of the all-pass network, which determines the size of the circuit, is set to be much higher than the operating frequency. This results in a significantly small chip size of the phase shifter. To verify this methodology, 5-bit phase shifters have been fabricated in the $S$ - and $C$ -band. The $S$ -band phase shifter, with a chip size of 1.87 mm $,times,$0.87 mm (1.63 mm $^{2}$), has achieved an insertion loss of ${hbox{6.1 dB}} pm {hbox{0.6 dB}}$ and rms phase-shift error of less than 2.8$^{circ}$ in 10% bandwidth. The $C$ -band phase shifter, with a chip size of 1.72 mm $,times,$0.81 mm (1.37 mm $^{2}$), has demonstrated an insertion loss of 5.7 dB $pm$ 0.8 dB and rms phase-shift error of less than 2.3 $^{circ}$ in 10% bandwidth.      

2 MHz AO $Q$ -switched ${rm TEM}_{00}$ Grazing Incidence Laser With 3 at.% Neodymium Doped Nd:YVO$_{4}$

We present a detailed experimental and theoretical study of the ultrahigh repetition rate AO $Q$ -switched ${rm TEM}_{00}$ grazing incidence laser. Up to 2.1 MHz $Q$-switching with ${rm TEM}_{00}$ output of 8.6 W and 2.2 MHz $Q$ -switching with multimode output of 10 W were achieved by using an acousto-optics $Q$ -switched grazing-incidence laser with optimum grazing-incidence angle and cavity configuration. The crystal was 3 at.% neodymium doped Nd:YVO$_{4}$ slab. The pulse duration at 2 MHz repetition rate was about 31 ns. The instabilities of pulse energy at 2 MHz repetition rate were less than ${pm}6.7hbox{%}$ with ${rm TEM}_{00}$ operation and ${pm}3.3hbox{%}$ with multimode operation respectively. The modeling of high repetition rate $Q$-switched operation is presented based on the rate equation, and with the solution of the modeling, higher pump power, smaller section area of laser mode, and larger stimulated emission cross section of the gain medium are beneficial to the $Q$-switched operation with ultrahigh repetition rate, which is in consistent with the experimental results.      

A 0.13 $mu$ m CMOS Quad-Band GSM/GPRS/EDGE RF Transceiver Using a Low-Noise Fractional-N Frequency Synthesizer and Direct-Conversion Architecture

This paper presents a single-chip CMOS quad-band (850/900/1800/1900 MHz) RF transceiver for GSM/GPRS/EDGE applications which adopts a direct-conversion receiver, a direct-conversion transmitter and a fractional-N frequency synthesizer with a built-in DCXO. In the GSM mode, the transmitter delivers 4 dBm of output power with 1$^{circ}$ RMS phase error and the measured phase noise is ${-}$164.5 dBc/Hz at 20 MHz offset from a 914.8$~$MHz carrier. In the EDGE mode, the TX RMS EVM is 2.4% with a 0.5 $~$dB gain step for the overall 36 dB dynamic range. The RX NF and IIP3 are 2.7 dB/ ${-}$12 dBm for the low bands (850/900 MHz) and 3 dB/${-}$ 11 dBm for the high bands (1800/1900 MHz). This transceiver is implemented in 0.13 $mu$m CMOS technology and occupies 10.5 mm$^{2}$ . The device consumes 118 mA and 84 mA in TX and RX modes from 2.8 V, respectively and is housed in a 5$,times,$ 5 mm$^{2}$ 40-pin QFN package.      

Integrated Al O :Er Zero-Loss Optical Amplifier and Power Splitter With 40-nm Bandwidth

A combined planar lossless optical amplifier and 1 $,times,$2 power splitter device has been realized in Al$_2$ O$_3$:Er$^{3+}$ on silicon. Net internal gain was measured over a wavelength range of 40 nm across the complete telecom $C$ -band (1525–1565 nm). Calculations predict net gain in a combined amplifier and 1$,times,$ 4 power splitter device over the same wavelength range for a total injected pump power as low as 30 mW.      

Performance Improvement of N-Type $hbox{TiO}_{x}$ Active-Channel TFTs Grown by Low-Temperature Plasma-Enhanced ALD

We report on performance improvement of $n$-type oxide–semiconductor thin-film transistors (TFTs) based on $hbox{TiO}_{x}$ active channels grown at 250 $^{circ}hbox{C}$ by plasma-enhanced atomic layer deposition. TFTs with as-grown $hbox{TiO}_{x}$ films exhibited the saturation mobility $(mu_{rm sat})$ as high as 3.2 $hbox{cm}^{2}/hbox{V}cdothbox{s}$ but suffered from the low on–off ratio $(I_{rm ON}/I_{rm OFF})$ of $hbox{2.0} times hbox{10}^{2}$. $hbox{N}_{2}hbox{O}$ plasma treatment was then attempted to improve $I_{rm ON}/I_{rm OFF}$. Upon treatment, the $hbox{TiO}_{x}$ TFTs exhibited $I_{rm ON}/I_{rm OFF}$ of $hbox{4.7} times hbox{10}^{5}$ and $mu_{rm sat}$ of 1.64 $hbox{cm}^{2}/hbox{V}cdothbox{s}$, showing a much improved performance balance and, thus, demonstrating their potentials for a wide variety of applications such as backplane technology in active-matrix displays and radio-frequency identification tags.      

Fabrication of a Blue $Mtimes N$ Pixel Organic Light-Emitting Diode Video Display Incorporating a Thermally Stable Emitter

A 7$times$ 11 pixel blue OLED display was fabricated using a patterned indium–tin–oxide (ITO) substrate. The fabrication process for an $M times N$ pixel organic light-emitting diode (OLED) video display including an electrical insulating layer and a physical pixel separator layer is presented. An efficient and thermally stable blue fluorescent organic material, ${hbox{6}},{hbox{6}}^{prime}$ -bis((2-$p$ -biphenyl)-4-phenylquinoline) (B2PPQ), was used in combination with an evaporated hole-transport small molecule with a high ionization potential.      

$N times N$ Cyclic-Frequency Router With Improved Performance Based on Arrayed-Waveguide Grating

We have developed an $N times N$ cyclic-frequency router with improved performance by employing two types of modified configuration; a uniform-loss and cyclic-frequency (ULCF) arrayed-waveguide grating (AWG) and an interconnected multiple AWG. We have demonstrated a compact 50-GHz-spacing 64 $,times,$64 ULCF-AWG router with low and uniform insertion losses of 5.4–6.8 dB and frequency deviations from the grid of less than $pm {8}~{rm GHz}$. We have also demonstrated a 100-GHz-spacing 8$,times,$8 interconnected multiple-AWG router with a practical configuration, very low and uniform insertion losses of 2.3–3.4 dB, and frequency deviations from the grid of less than $pm {6}~{rm GHz}$. We discuss the suitable or realizable scale $N$ of the two types of routers by comparison with a conventional AWG router in terms of optical and dimensional performance and productivity.      

Low-Threshold Strained Quantum-Well GaSb-Based Lasers Emitting in the 2.5- to 2.7-$mu$ m Wavelength Range

GaInAsSb–GaSb strained quantum-well (QW) ridge waveguide diode lasers emitting in the wavelength range from 2.51 to 2.72 $ mu{hbox {m}}$ have been grown by molecular beam epitaxy. The devices show ultralow threshold current densities of 44 $hbox{A}/{hbox {cm}}^{2}$ (${L}rightarrow infty $) for a single QW device at 2.51 $ mu{hbox {m}}$, which is the lowest reported value in continuous-wave operation near room temperature (15 $^{circ}hbox{C}$) at this wavelength. The devices have an internal loss of 3 ${hbox {cm}}^{-1}$ and a characteristic temperature of 42 K. By using broader QWs, wavelengths up to 2.72 $mu{hbox {m}}$ could be achieved.      

$hbox{TiN/ZrO}_{2}$/Ti/Al Metal–Insulator–Metal Capacitors With Subnanometer CET Using ALD-Deposited $hbox{ZrO}_{2}$ for DRAM Applications

We provide the first report of the structural and electrical properties of $hbox{TiN/ZrO}_{2}$/Ti/Al metal–insulator–metal capacitor structures, where the $hbox{ZrO}_{2}$ thin film (7–8 nm) is deposited by ALD using the new zirconium precursor ZrD-04, also known as Bis(methylcyclopentadienyl) methoxymethyl. Measured capacitance–voltage ($C$– $V$) and current–voltage ( $I$–$V$) characteristics are reported for premetallization rapid thermal annealing (RTP) in $hbox{N}_{2}$ for 60 s at 400 $^{circ}hbox{C}$, 500 $^{circ}hbox{C}$, or 600 $^{ circ}hbox{C}$. For the RTP at 400 $^{circ}hbox{C}$ , we find very low leakage current densities on the order of nanoamperes per square centimeter at a gate voltage of 1 V and low capacitance equivalent thickness values of $sim$ 0.9 nm at a gate voltage of 0 V. The dielectric constant of $ hbox{ZrO}_{2}$ is 31 $pm$ 2 after RTP treatment at 400 $^{circ}hbox{C}$.      

Compact $S$ -/$Ka$-Band CMOS Quadrature Hybrids With High Phase Balance Based on Multilayer Transformer Over-Coupling Technique

This paper presents compact CMOS quadrature hybrids by using the transformer over-coupling technique to eliminate significant phase error in the presence of low-$Q$ CMOS components. The technique includes the inductive and capacitive couplings, where the former is realized by employing a tightly inductive-coupled transformer and the latter by an additional capacitor across the transformer winding. Their phase balance effects are investigated and the design methodology is presented. The measurement results show that the designed 24-GHz CMOS quadrature hybrid has excellent phase balance within ${pm}{hbox{0.6}}^{circ}$ and amplitude balance less than ${pm} {hbox{0.3}}$ dB over a 16% fractional bandwidth with extremely compact size of 0.05 mm$^{2}$. For the 2.4-GHz hybrid monolithic microwave integrated circuit, it has measured phase balance of ${pm}{hbox{0.8}}^{circ}$ and amplitude balance of ${pm} {hbox{0.3}}$ dB over a 10% fractional bandwidth with a chip area of 0.1 mm$^{2}$ .      

Experimental Demonstration of Deeply-Etched SiO$_{2}$ Ridge Optical Waveguides and Devices

Deeply-etched ${hbox{SiO}}_{2}$ optical ridge waveguides are fabricated and characterized. A detailed discussion of the fabrication process (especially for the deep etching process) is presented. The measured propagation losses for the fabricated waveguides with different core widths range from $0.33sim {hbox {0.81}}~{hbox {dB}}/{hbox {mm}}$. The loss is mainly caused by the scattering due to the sidewall roughness. The losses in bending sections are also characterized, which show the possibility of realizing a small bending radius (several tens of microns). 1 $,times {rm N}$ ( ${rm N}=2$, 4, 8) multimode interference couplers based on the deeply-etched ${hbox{SiO}}_{2}$ ridge waveguide are also fabricated and show fairly good performances.      

Zn$_{1 - x}$Mg$_{x}$ O Homojunction-Based Ultraviolet Photodetector

Zn$_{1 - {x}}$ Mg$_{x}$ O p-n photodiodes were fabricated on (0001) sapphire substrates using a pulsed laser deposition technique with different Mg contents. Ti–Au and Ni–Au metals deposited using vacuum evaporation were used as n-type and p-type contacts, respectively. The X-ray diffraction analysis showed the Zn$_{1 - {x}}$Mg$_{x}$O double layers have a single phase hexagonal wurtzite structure. The optical bandgap of Zn$_{1 - {x}}$Mg$_{x}$O films has been tuned from 3.27 to 4.26 eV by increasing the Mg content ${x} =0.0$ to ${x}=0.34$. Correspondingly, the cutoff wavelength of the resultant detectors varies from 380 to 284 nm. Zn$_{1 - {x}}$Mg$_{x}$O p-n photodiodes with different Mg contents exhibit very good performance, with a very low dark current (${≪}$ 20 pA) at the bias voltage of 10 V. The ultraviolet to visible rejection ratio is more than three orders of magnitude.      

Cubic-Structured $hbox{HfO}_{2}$ With Optimized Doping of Lanthanum for Higher Dielectric Constant

It is demonstrated that $hbox{HfO}_{2}$ films can have much higher dielectric-constant values than the usual reported value of 20–24 by optimized incorporation of lanthanum element and crystallization to cubic structure. When $hbox{HfO}_{2}$ with 8% La is crystallized into cubic structure, the film exhibits the $kappa$ value of $sim$ 38 which is the highest among ever reported $hbox{HfO}_{2}$ -based high-$kappa$ dielectrics. The increased $kappa$ value of $ hbox{HfO}_{2}$ with 8% La enables the leakage current to be reduced more than one order of magnitude lower, compared to amorphous-phase $hbox{HfO}_{2}$ under the same electric field. The dependence of film thickness and annealing temperature on the cubic crystallization is also reported.      

Analysis, Design, and $X$-Band Implementation of a Self-Biased Active Feedback $G_{m}$ -Boosted Common-Gate CMOS LNA

This paper explores the use of active feedback to boost the transconductance of a common-gate (CG) low-noise amplifier and achieve simultaneous low noise and input power match. Unlike transformer coupled topologies, the CG input stage is dc-coupled to a self-biased common-source feedback amplifier (for $g_{m}$ boosting), thus eliminating the need of external bias circuitry. Noise and intermodulation analysis with and without $g_{m}$ boosting are extensively studied yielding closed-form expressions of the noise figure (NF) and third-order input-referred intercept point (IIP3) that are useful for circuit design and optimization. A 9.6-GHz differential prototype implemented in a 0.18-$mu$ m technology using only NMOS transistors, achieves a minimum NF of 4 dB, an IIP3 of ${-}$ 11.3 dBm, a return loss of ${-}$ 17 dB, and a transducer gain of 18 dB while dissipating 10 m (excluding buffer circuit) from a 1.8-V supply voltage. The active chip area is 0.11 $mu$m $^{2}$.      

Design Principles for Higher (Prime) Order Composite Directional Couplers

The theoretical construction of ideal (lossless) 3 $,times,$3, 4 $,times,$4, and 5 $,times,$5 dimensional directional couplers from 2$,times,$ 2 directional couplers is demonstrated. Such devices could be fabricated as planar waveguide circuit elements.      

Impacts of $hbox{N}_{2}$ and $hbox{NH}_{3}$ Plasma Surface Treatments on High-Performance LTPS-TFT With High-$kappa$ Gate Dielectric

Low-temperature polycrystalline-silicon thin-film transistors (LTPS-TFTs) with high- $kappa$ gate dielectrics and plasma surface treatments are demonstrated for the first time. Significant field-effect mobility $mu_{rm FE}$ improvements of $sim$86.0% and 112.5% are observed for LTPS-TFTs with $hbox{HfO}_{2}$ gate dielectric after $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments, respectively. In addition, the $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments can also reduce surface roughness scattering to enhance the field-effect mobility $mu_{rm FE}$ at high gate bias voltage $V_{G}$, resulting in 217.0% and 219.6% improvements in driving current, respectively. As a result, high-performance LTPS-TFT with low threshold voltage $V_{rm TH} sim hbox{0.33} hbox{V}$, excellent subthreshold swing S.S. $sim$0.156 V/decade, and high field-effect mobility $mu_{rm FE} sim hbox{62.02} hbox{cm}^{2}/hbox{V} cdot hbox{s}$ would be suitable for the application of system-on-panel.      

A 5-GHz CMOS Type-II PLL With Low $K_{rm VCO}$ and Extended Fine-Tuning Range

A 5-GHz dual-path integer-$N$ Type-II phase-locked loop (PLL) uses an LC voltage-controlled oscillator and softly switched varactors in an overlapped digitally controlled integral path to allow a large fine-tuning range of approximately 160 MHz while realizing a low susceptibility to noise and spurs by using a low $K_{rm VCO}$ of 3.2 MHz/V. The reference spur level is less than $-$70 dBc with a 1-MHz reference frequency and a total loop-filter capacitance of 26 pF. The measured phase noise is $-$75 and $-$115 dBc/Hz at 10-kHz and 1-MHz offsets, respectively, using a loop bandwidth of approximately 30 kHz. This 0.25-${hbox{mm}}^{2}$ PLL is fabricated in a 90-nm digital CMOS process and consumes 11 mW from a 1.2-V supply.      

A Two-Port Single-Mode Fiber–Silicon Wire Waveguide Coupler Module Using Spot-Size Converters

In this paper, the performance of a two-port single-mode fiber–silicon wire waveguide coupler module which utilizes an identical spot-size converter (SSC) at the input and output ports is reported. Each of the silicon (Si)-based SSCs comprised cascaded horizontal linear and vertical nonlinear up-tapers measured 300 and 200 $mu$ m in length, respectively, in a common silicon-on-insulator (SOI) substrate. The structural parameters of the tapers were designed for compactness and relaxed tolerance to fabrication errors. The total length of the two-port coupler module was 1000 $mu$ m plus the variable length of the wire waveguide connecting the two SSCs. The mode-field diameter (MFD) of the Si-wire waveguide, 0.32$,times,$0.46 $mu$m $^{2}$, was transformed to the diameter of 2.8$,times,$ 8.0 $mu$ m$^{2}$ at the wavelength of 1.55 $mu$ m (corresponding to an area expansion of about 150 times) and vice versa by the SSCs with a net transmission loss of 4.1 dB/port. The field-mismatch loss between the SSC and the single-mode fiber with the MFD of 5.2 $mu$m was 2.1 dB/port.      

1580-V–40-$hbox{m}Omegacdot hbox{cm}^{2}$ Double-RESURF MOSFETs on 4H-SiC $(hbox{000}bar{hbox{1}})$

Double-reduced-surface-field (RESURF) MOSFETs with $hbox{N}_{2}hbox{O}$ -grown oxides have been fabricated on the 4H-SiC $(hbox{000} bar{hbox{1}})$ face. The double-RESURF structure is effective in reducing the drift resistance, as well as in increasing the breakdown voltage. In addition, by utilizing the 4H-SiC $(hbox{000}bar{hbox{1}})$ face, the channel mobility can be increased to over 30 $hbox{cm}^{2}/hbox{V}cdothbox{s}$, and hence, the channel resistance is decreased. As a result, the fabricated MOSFETs on 4H-SiC $( hbox{000}bar{hbox{1}})$ have demonstrated a high breakdown voltage $(V_{B})$ of 1580 V and a low on-resistance $(R_{rm ON})$ of 40 $hbox{m}Omega cdothbox{cm}^{2}$. The figure-of-merit $(V_{B}^{2}/R_{rm ON})$ of the fabricated device has reached 62 $hbox{MW/cm}^{2}$, which is the highest value among any lateral MOSFETs and is more than ten times higher than the “Si limit.”      

A 24 GHz Amplitude Monopulse Comparator in 0.13 $mu$m CMOS

This letter presents the design and implementation of a wideband 24 GHz amplitude monopulse comparator in 0.13 $mu$m CMOS technology. The circuit results in 9.6 dB gain in the sum channel at 24 GHz with a 3-dB bandwidth of 23.0–25.2 GHz, and a sum/difference ratio of $> 25$ dB at 20–26 GHz. The measured input P1 dB is ${-}14.4$ dBm at 24 GHz. The chip is only 0.55$,times,$ 0.50 mm$^{2}$ (without pads) and consumes 44 mA from a 1.5 V supply, including the input active baluns and the differential to single-ended output stages (28 mA without the input and output stages). To our knowledge, this is the first demonstration of a high performance mm-wave CMOS monopulse comparator RFIC.