室温工作双敏感膜HSGFET型O3传感器的研究

本文研究室温下工作,具有双敏感膜,检测ppb范围内O₃浓度的复合悬浮栅FET(Hybrid Suspended Gate Field Effect Transistor即HSGFET)型臭氧传感器.文中给出了四种固态HSGFET型臭氧传感器的实验结果,发现具有 结构的传感器对O₃有很好的响应特性;实验结果与由开尔芬(Kelvin)探针得到的结果进行了比较.     

基于FET结构的Pt-LaF3混合膜溶解氧传感器

研制了一种基于FET结构的Pt-LaF3混合膜全固态溶解氧传感器.对Pt-LaF3敏感膜的敏感机制以及传感器的器件结构和响应特性进行了分析,并实际测试了器件特性,给出了在不同工作点和不同温度条件下器件的输出电压对溶解氧浓度变化的响应曲线.     

基于FET结构的Pt-LaF_3混合膜溶解氧传感器

研制了一种基于 FET结构的 Pt- L a F3混合膜全固态溶解氧传感器 .对 Pt- L a F3敏感膜的敏感机制以及传感器的器件结构和响应特性进行了分析 ,并实际测试了器件特性 ,给出了在不同工作点和不同温度条件下器件的输出电压对溶解氧浓度变化的响应曲线     

高频CO2激光脉冲写入长周期光纤光栅的方法

在国际上首次提出了高频CO₂激光脉冲写入长周期光纤光栅的方法.该方法与低频CO₂激光脉冲写入法或紫外光等其它写入法相比具有许多独特的优点——效率高、成本低,重复曝光容易、激光加热区域的周期性变化通过扫描振镜的偏振来实现而光纤固定不动,因此特别适合于研制具有特殊用途的新型LPFG.详细分析了单侧CO₂激光入射导致LPFG横截面折射率分布不均匀的形成机理并提出了降低LPFG双折射的方法.     

基于微椭球空气腔的光纤压力传感器的设计

设计了一种新型的在线光纤法布里-珀罗(F-P)压力传感器.该传感器的F-P腔为微椭球空气腔,由光纤熔接机以特定的熔接参数熔接单模光纤和实芯光子晶体光纤而成.该传感器基于F-P干涉原理测量压力,全石英结构,制作工艺简单,温度串扰小.分析了封闭的椭球形空气F-P腔中短轴直径(腔长)与长轴半径(敏感膜有效半径)的关系;利用高斯光束传输理论分析了空气F-P腔形状与腔内损耗的关系.分析了SiO2敏感膜受压后中心挠度与膜厚、有效半径的关系.建立了SiO2膜的压力敏感特性模型,在施加均布载荷条件下对模型的挠度形变特性进行了数值解析和有限元仿真.仿真了传感器F-P干涉条纹波谷波长与压力的关系,为设计制作光纤微压传感器提供了理论依据.     

基于电活性高分子声表面波CO气体传感器研究

为克服现有CO气体传感器精度低,工作温度高,成本高的缺点,对基于聚苯胺敏感膜的多层结构声表面波气体传感器进行了试验与理论研究,并推导了声表面波气体传感器的敏感作用公式.传感器采用声表面波双通道带延迟线的谐振器结构,将电活性高分子CO气体敏感材料(掺杂有In2O3的聚苯胺)覆盖在一条延迟线路上形成敏感膜(0.5～1.2μm).将此声表面波CO气体传感器放在CO气体中在-40～+85℃范围内进行测试实验,实验结果显示,该声表面波CO传感器的敏感性好,敏感速度和恢复速度快,精度高.     

自平衡电桥激励的压力传感器零点输出信号的电漂移特性

本文详细的分析了自平衡电桥激励的压力传感器的输出信号U与桥电压V_e、供电电压V cc及流体压力P之间的关系,并指出,不仅对桥电压而且对总激励电压都存在零点电漂移.在U~V_cc、P的三维空间表达了三者之间典型关系曲线.在U₀|_Vcc0=0的等势面(V_cc0)上显示出高的压力灵敏度,而在U₀/U_cc=0的等势面(≈ 1 2 V_cc0)上,压力灵敏度则低的多.建议零点输出的电漂移应作为压力传感器的一个特性指标.     

Design of a Silicon Beam Resonator for a Novel Gas Sensor

研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.     

基于硅悬臂梁谐振器的新型气体传感器

研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.     

一种新型气敏传感器的研究

本文以一种新型有机半导体材料——三明治型稀土金属元素镨双酞菁配合物(Pr ₂) 为气敏材料,利用Langmuir-Blodgett(LB)超薄膜技术,将Pr ₂以1:3的配比与十八烷醇(OA)的混合LB多层膜(Pr ₂/OA)拉制在自行设计的场效应晶体管上,形成了一种新型的以LB膜取代通常的MOSFET中栅金属的化学场效应管器件.将该器件放入NO₂气体中,随着气体浓度和LB膜层数的变化,器件的漏电流I_DS将产生0.05×10^-6A~1.5×10^-6A的变化,探测灵敏度可达到5ppmNO₂,这种气敏传感器的气敏特性受到FET的电流放大作用和LB膜有序性的影响.     

Reaction of NiO film on flexible substrates with buffer solutions and application to flexible arrayed lactate biosensor

In this study, we proposed a flexible arrayed lactate biosensor based on pH-sensitive nickel oxide (NiO) films, and also investigated the adhesion between NiO film and different flexible substrates under reactions with different solutions. L-lactate dehydrogenase (LDH) and nicotinamide adenine dinucleotide (NAD⁺) were co-immobilized on pH-sensitive NiO film by using a crosslinking reagent, 3-glycidoxypropyltrimethoxysilane (GPTS). It was found that GPTS concentration would affect the sensing characteristics for the lactate biosensor. The lactate biosensor with 1:2 volume ratio of GPTS-toluene mixture had the best average sensitivity and linearity. In the range of lactate concentration from 0.2 mM to 3 mM, arrayed flexible lactate biosensor based on the NiO/PET structure had 38.218 mV/mM of average sensitivity. In addition, the average sensitivity of the sensor based on the NiO/Pt/PET structure was 32.483 mV/mM.     

Chemiresistive Gas Sensing by Few-Layered Graphene

A chemiresistive gas sensor based on few-layered graphene (FLG) has been fabricated and evaluated for carbon dioxide (CO₂) and liquid petroleum gas (LPG) sensing. The electrochemical exfoliation method was used to synthesize FLG. The resulting sample of FLG was characterized by x-ray diffraction, Raman spectroscopy, atomic force microscopy, and transmission electron microscopy with selected-area diffraction. Ultraviolet–visible and fluorescence spectroscopy were employed to study the optical properties. Thermal behavior was analyzed through thermogravimetric–differential thermal analysis. The sensing response of the chemiresistor is defined as the ratio of resistance in gas to air at the stabilized resistance in air. The FLG chemiresistor exhibited good sensing response (3.83 for CO₂, 0.92 for LPG), response time (11 s for CO₂, 5 s for LPG), recovery time (14 s for CO₂, 18 s for LPG), and resolution limit (3 ppm for CO₂, 4 ppm for LPG), and excellent stability at room temperature. The gas sensing mechanism is discussed on the basis of marginal difference in Raman intensity and also by using defect chemistry through fluorescence measurements.     

CO2 detection with CNx thin films deposited on porous silicon

In recent years, porous silicon (PSi) has attracted a great deal of attention for sensing applications. However, the high reactivity of PSi surfaces causes serious problems of stability. In this work, we developed new thin films that can serve as stabilizer of PSi for CO₂ gas sensors development. PSi surface was coated with carbon nitride (CN_x) film which is one of the most important interfering to stabilize the PSi layer. CN_x film was deposited by pulsed laser ablation. The effect of CO₂ gas on the sensor response was investigated for different polarization voltages. The electrical properties of (Al/CN_x/PSi/Si) structure were modified in the presence of the gas. The device shows a high sensitivity against CO₂ gas. Furthermore, the current variation of the sensor as a function of time has been investigated. The results show that the Al/CN_x/PSi/Si structure becomes stable after the first two weeks.     

High Performance Three‐Dimensional Chemical Sensor Platform Using Reduced Graphene Oxide Formed on High Aspect‐Ratio Micro‐Pillars

The sensing performance of chemical sensors can be achieved not only by modification or hybridization of sensing materials but also through new design in device geometry. The performance of a chemical sensing device can be enhenced from a simple three‐dimensional (3D) chemiresistor‐based gas sensor platform with an increased surface area by forming networked, self‐assembled reduced graphene oxide (R‐GO) nanosheets on 3D SU8 micro‐pillar arrays. The 3D R‐GO sensor is highly responsive to low concentration of ammonia (NH₃) and nitrogen dioxide (NO₂) diluted in dry air at room temperature. Compared to the two‐dimensional planar R‐GO sensor structure, as the result of the increase in sensing area and interaction cross‐section of R‐GO on the same device area, the 3D R‐GO gas sensors show improved sensing performance with faster response (about 2%/s exposure), higher sensitivity, and even a possibly lower limit of detection towards NH₃ at room temperature.     

封闭循环TEA CO2激光器用催化剂的实验研究

在不同的催化剂和不同温度的条件下,用磁氧分析仪监测了封离型TEA C0₂激光器中O₂含量随时间或脉冲次数的变化。对实验现象进行了分析。对几种催化剂的特性给出了详细的比较。     

Room temperature ferromagnetic ordering of NiO films through exchange coupling

NiO films were deposited by sputtering with a relatively high oxygen partial pressure, followed by subsequent annealing in air. The as-deposited film is amorphous. The amorphous film gradually turns to crystalline structure with the increase in annealing temperature. The film annealed at 673 K shows strong ferromagnetism at room temperature, whereas, there is no room-temperature ferromagnetic ordering for the as-deposited amorphous NiO film or the film after annealed at 873 K. The ferromagnetism is due to the finite size effect and the high Curie temperature above room temperature is associated with the interaction between ferromagnetic NiO crystalline nanoclusters and antiferromagnetic amorphous matrix.     

In Situ Synthesis of Molybdenum Carbide Nanoparticles Incorporated into Laser-Patterned Nitrogen-Doped Carbon for Room Temperature VOC Sensing

Carbon laser-patterning (CLaP) is emerging as a new tool for the precise and selective synthesis of functional carbon-based materials for on-chip applications. The aim of this work is to demonstrate the applicability of laser-patterned nitrogen-doped carbon (LP-NC) for resistive gas-sensing applications. Films of pre-carbonized organic nanoparticles on polyethylenetherephthalate are carbonized with a CO₂-laser. Upon laser-irradiation a compositional and morphological gradient in the films is generated with a carbon content of 92% near the top surface. The specific surface areas of the LP-NC are increased by introducing sodium iodide (NaI) as a porogen. Electronic conductivity and surface area measurements corroborate the deeper penetration of the laser-energy into the film in the presence of NaI. Furthermore, impregnation of LP-NC with MoC_1−x (<10 nm) nanoparticles is achieved by addition of ammonium heptamolybdate into the precursor film. The resulting doping-sensitive nano-grain boundaries between p-type carbon and metallic MoC_1−x lead to an improvement of the volatile organic compounds sensing response of ΔR/R₀ = −3.7% or −0.8% for 1250 ppm acetone or 900 ppm toluene at room temperature, respectively, which is competitive with carbon-based sensor materials. Further advances in sensitivity and in situ functionalization are expected to make CLaP a useful method for printing selective sensor arrays.     

Hydrogen Gas Sensing Based on SnO<Subscript>2</Subscript> Nanostructure Prepared by Sol–Gel Spin Coating Method

A novel H₂ gas sensor based on a SnO₂ nanostructure was operated at room temperature (RT) (25°C). The SnO₂ nanostructure was grown on Al₂O₃ substrates by a sol–gel spin coating method. The structural characteristics, surface morphology, and gas sensing properties of the SnO₂ nanostructure were investigated. Thin film annealing at 500°C produced a high-quality SnO₂ nanostructure with a crystallite size of 33.98 nm. A metal–semiconductor–metal gas sensor was fabricated using the SnO₂ nanostructure and palladium metal. The gas sensor exhibited a sensitivity of 2570% to 1000 ppm H₂ gas at RT. The sensing measurements for H₂ gas at different temperatures (RT to 125°C) were repeatable?for 50 min. Sensor sensitivity was tested under different H₂ concentrations (150 ppm, 250 ppm, 375 ppm, 500 ppm, and 1000 ppm) at different operating temperatures. Adding glycerin to the sol solution increased the porosity of the SnO₂ nanostructure surface, which increased the adsorption/desorption of gas molecules which leads to the high sensitivity of the sensor. Therefore, this H₂ gas sensor is a suitable?portable?RT gas sensor.     

Toluene Sensing Properties of P4VP/Multi-Walled Carbon Nanotubes Multi-Layer Film Sensors

Poly4-vinylphenol (P4VP)/multi-wall carbon nanotubes (MWNTs) multi-layer sensitive films were deposited on interdigitated electrodes by airbrush technology to detect toluene vapor at room temperature. The surface and section morphologies of the multi-layer films were observed by a scanning electron microscope (SEM). It is found that the resistance of the sensor increases when it is exposed to toluene vapor and the response has a good linearity with the concentration of toluene. The results show that the P4VP/MWNTs three-layer film sensors have better sensing properties compared with the two-layer film sensors. The related sensing mechanism is studied in detail.     

Gas Sensing of NiO‐SCCNT Core–Shell Heterostructures: Optimization by Radial Modulation of the Hole‐Accumulation Layer

Hierarchical core–shell (C–S) heterostructures composed of a NiO shell deposited onto stacked‐cup carbon nanotubes (SCCNTs) are synthesized by atomic layer deposition (ALD). A film of NiO particles (0.80–21.8 nm in thickness) is uniformly deposited onto the inner and outer walls of the SCCNTs. The electrical resistance of the samples is found to increase of many orders of magnitude with the increasing of the NiO thickness. The response of NiO–SCCNT sensors toward low concentrations of acetone and ethanol at 200 °C is studied. The sensing mechanism is based on the modulation of the hole‐accumulation region in the NiO shell layer upon chemisorption of the reducing gas molecules. The electrical conduction mechanism is further studied by the incorporation of an Al₂O₃ dielectric layer at NiO and SCCNT interfaces. The investigations on NiO–Al₂O₃–SCCNT, Al₂O₃–SCCNT, and NiO–SCCNT coaxial heterostructures reveal that the sensing mechanism is strictly related to the NiO shell layer. The remarkable performance of the NiO–SCCNT sensors toward acetone and ethanol benefits from the conformal coating by ALD, large surface area of the SCCNTs, and the optimized p‐NiO shell layer thickness followed by the radial modulation of the space‐charge region.