类富勒烯碳基薄膜与Al_2O_3对偶球的摩擦学性能研究

以甲烷(CH4)为前躯体,采用等离子体增强化学气相沉积(PECVD)技术,在单晶硅n-100基底表面制备类富勒烯纳米结构类金刚石薄膜(FL-C∶H)。采用高分辨透射电镜(HRTEM)、拉曼光谱仪(LABRAM)和多功能X射线光电子能谱仪(XPS)对薄膜的结构进行表征;利用原位纳米力学测试系统、摩擦磨损试验机、三维轮廓仪和奥林巴斯STM6光学显微镜分析比较薄膜在不同摩擦时间阶段的摩擦行为及磨痕处硬度变化情况。实验结果表明,所制备的类金刚石薄膜具有类富勒烯纳米结构特征,在摩擦过程中并未发生石墨化,而是sp2键合结构减少,使得磨痕处的硬度随着摩擦时间的增加而增大。     

含氢类富勒烯碳薄膜不同载荷下的磨损寿命研究

碳基薄膜在不同载荷工况下磨损寿命变化是影响其动态服役的关键,通常情况下,含氢碳薄膜的寿命随载荷增加而降低,但是含氢类富勒烯碳薄膜作为一类特殊结构的薄膜,其寿命随载荷的变化规律尚不清楚.本文采用直流电源激发等离子体辅助化学气相沉积的方法在硅片表面制备了含氢类富勒烯碳薄膜,研究了薄膜的磨损寿命随载荷的变化关系.采用球-盘往...     

化学共沉积Ni-P-(IF-WS2)复合镀层的制备及其摩擦磨损性能

用化学共沉积技术制备了Ni-P-(IF-WS2)复合镀层,利用销-盘式磨损试验机在干摩擦、滑动速度0.0623 m/s、接触载荷20～160 N条件下评价了Ni-P-(IF-WS2)复合镀层的摩擦磨损性能.研究结果表明Ni-P-(IFWS2)复合镀层比Ni-P镀层具有更高的耐磨性能和更低的摩擦系数.分析了无机类富勒烯纳米材料改善镀层摩擦学性能的机理.     

磁控溅射TiC／a—C薄膜的结构和摩擦学性能研究

采用磁控溅射法制备不同碳含量的碳化钛薄膜.采用SEM、XRD及HR-TEM等手段分析了TiC/a-C薄膜的微观组织结构,采用摩擦磨损仪和台阶仪研究了薄膜的摩擦学性能.研究结果表明,碳含量在40%～74%时,随碳含量的增加,薄膜结构由疏松变得致密,(111)择优取向逐渐转变为无明显择优取向生长.当碳含量为60%时,薄膜结构为TiC晶粒镶嵌在非晶碳基体中的纳米复合结构,此时薄膜的机械性能及耐磨性最佳.磨损机制主要为粘着磨损和磨粒磨损,通过调节薄膜中非晶碳的含量及晶粒大小并增加薄膜的硬度可改善其摩擦学性能.     

PECVD法制备类金刚石薄膜的结构和摩擦学性能研究

采用射频一直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积了类金刚石薄膜。用激光拉曼光谱仪和原子力显微镜对薄膜的结构和表面形貌进行了表征，并用纳米压痕仪测定了薄膜的硬度。用UMT微摩擦磨损试验机考察了薄膜在不同的滑行速度下薄膜的摩擦学性能。结果表明：所沉积的薄膜具有典型类金刚石薄膜的结构特征，薄膜表面光滑致密，硬度较高；薄膜与氧化铝陶瓷球对磨显示出良好的摩擦学性能，随着滑行速度的增加，薄膜的摩擦系数单调降低，但磨损寿命先增加后降低。     

掺氮类金刚石薄膜的制备与性能研究

利用空心阴极放电在玻璃基底表面沉积掺氮类金刚石(DLc)薄膜.拉曼光谱(Raman)分析表明,所制备的碳膜具有典型的类金刚石结构.扫描电镜(SEM)和原子力显微镜(AFM)分析了薄膜表面形貌和粗糙度;利用摩擦磨损仪测量膜的摩擦磨损性能.结果表明,氮的掺入使得薄膜中颗粒致密平整,改变了薄膜的表面微观形貌,进而改善了薄膜的摩擦磨损性能.     

Si3N4球/DLC膜摩擦副在真空环境下的摩擦学行为研究

采用非平衡磁控溅射技术在高速钢基体上制备了类金刚石(DLC)膜。采用球盘式摩擦磨损试验机考察了DLC膜在大气和真空环境干摩擦条件下的摩擦学性能,并比较分析了GCr15钢球和Si3N4球不同摩擦配副对DLC膜的摩擦学性能。采用光学显微镜及扫描电镜观察了摩擦副的磨损表面形貌。研究结果表明:由于转移膜的形成Si3N4球/DLC膜摩擦副在大气下具有良好的摩擦学性能;而在真空条件下摩擦副易发生明显的粘着磨损,使摩擦系数、磨斑增加,磨损表面上存在着较多的片状磨屑和微米级颗粒。     

纳米ZrO_2和聚醚醚酮填充聚四氟乙烯的摩擦学性能基于环-块摩擦模型的演变过程

用不同体积分数的纳米ZrO_2和聚醚醚酮(PEEK)颗粒填充改性聚四氟乙烯(PTFE)复合材料。使用环-块摩擦磨损试验机测试PTFE复合材料在滑动速度为2 m/s、载荷为200 N的试验条件下的摩擦学性能。获取不同阶段摩擦学性能的数据,计算出在整个试验过程中样品的瞬时磨损率。利用扫描电镜观察不同试验阶段对偶钢环表面形貌的变化图像并进行分析。利用仿真模拟软件(ABAQUS)对摩擦过程中PTFE复合材料的接触应力变化进行分析。结果表明,纳米ZrO_2和PEEK颗粒可以协同改善PTFE复合材料的摩擦学性能。特别是添加8%的纳米ZrO_2和20%的PEEK能使PTFE复合材料同时获得最佳的耐磨性(1.29×10~(-6) mm~3/Nm)和较低的摩擦系数。在摩擦试验的后期PTFE复合材料的瞬时磨损率突然急剧上升。根据瞬时磨损率、磨损表面、转移膜形貌和磨屑形态特征的变化规律,将整个磨损过程分为3个阶段(低磨损阶段、过渡磨损阶段和严重磨损阶段)。     

镁合金微弧氧化膜上不同功率磁控溅射制得复合膜的摩擦学性能研究

为进一步改善镁合金微弧氧化膜的摩擦学性能,在该微弧氧化膜上,采用磁控溅射技术,在不同功率下沉积碳膜,制备碳含量不同的微弧氧化/磁控溅射复合膜。利用拉曼光谱仪检测膜层中碳结构,采用扫描电镜(SEM)和能谱(EDS)考察膜层摩擦磨损前后微观形貌、元素组成、分布及含量;应用球-盘摩擦试验机研究膜层摩擦学性能。结果表明：利用磁控溅射技术在镁合金微弧氧化膜表面沉积的碳膜,部分地封闭了微弧氧化膜微孔,减小了微孔孔径和微孔数量,降低了膜层表面粗糙度。复合膜在摩擦磨损过程中,摩擦系数较小,磨痕较窄且浅,磨损率较低,呈现出较优异的摩擦学性能。功率对微弧氧化/磁控溅射复合膜具有明显的影响,高溅射功率下制备的复合膜,由于拥有更光滑的表面,更多地具有自润滑特性的碳,摩擦系数更小,磨痕更窄且浅,磨损率更低,摩擦学性能更为优异,尤其是在高载荷下,可对基体提供更显著的保护。     

多层纳米TiO2薄膜的摩擦学性能研究

采用溶胶-凝胶法在普通载玻片上制备了1-4层纳米TiO2薄膜,使用AFM、SEM及UMT-2MT摩擦试验机等考察了薄膜的表面形貌、磨痕形貌及不同条件下的摩擦学性能.实验结果表明,所制备的薄膜平整、致密并具有良好的减摩抗磨性能.与TiO2/GCr15钢球相比TiO2/Si3N4陶瓷球摩擦副的摩擦学性能更稳定;薄膜的耐磨性能并不随膜层数的增加而增大,2层薄膜具有最佳的摩擦学性能;薄膜的摩擦失效机理主要为严重塑性变形、磨粒磨损和局部脆性断裂.     

Structural, mechanical and tribological behavior of fullerene-like carbon film

Hydrogenated carbon films containing fullerene-like structures (FL-C:H) were synthesized using magnetron sputtering of a graphite target in methane and argon atmospheres. The results indicate clearly that a substantial part of the film is made up of fragments of such fullerene-like structures mixed in a hydrogenated amorphous carbon matrix. The film exhibits excellent mechanical properties with a hardness of 27.4 GPa and almost complete elastic recovery (as high as 95%). The tribological properties of the FL-C:H film were tested and compared with a-C:H and a-C films. The results show that the lowest friction coefficient of the FL-C:H film, about 0.02, is recorded in oxygen environment. The ranges of dispersion of the friction coefficient for the FL-C:H film are merely 0.02 in different testing environments, much lower than that of a-C:H and a-C films, which indicates the friction-coefficient-insensitivity of the FL-C:H film to different atmospheres.     

Ultra-low friction and excellent elastic recovery of fullerene-like hydrogenated carbon film based on multilayer design

Multilayer fullerene-like hydrogenated carbon (FL-C:H) films were synthesized by using the chemical vapour deposition technique with a different flow rate of methane. The typical fullerene-like structure of as-prepared films was investigated by using transmission electron microscopy and Raman spectra. The prepared multilayered FL-C:H films showed a high elastic recovery (\({\sim }\)90\(\%\)), ultra-low friction coefficient (\({\sim }\)0.019) and low wear rate \(({\sim }3.0\times 10^{-9}\,\hbox {mm}^{3}\,\hbox {Nm}^{-1})\) in humid air.     

Effects of molybdenum dithiocarbamate and zinc dialkyl dithiophosphate additives on tribological behaviors of hydrogenated diamond-like carbon coatings

The tribological behaviors of hydrogenated diamond-like carbon (DLC) coatings under varied load conditions lubricated with polyalpha olefin (PAO), molybdenum dithiocarbamate (MoDTC) and zinc dialkyl dithiophosphate (ZDDP) additives were investigated in this paper. Hydrogenated DLC coatings were synthesized through the decomposition of acetylene by the ion source. The tribological performances were measured on a SRV tribometer. The morphologies and chemical structures of the DLC coatings were investigated by the scanning electron microscope (SEM), Raman spectrometer (Raman) and X-ray photoelectron spectroscope (XPS). It was shown that the low friction and high wear were achieved on the hydrogenated DLC coating under MoDTC lubrication, while low wear was found on the hydrogenated DLC coating lubricated by ZDDP. The primary reason was attributed to different tribofilms formed on the contact area and the formation of graphitic layer. Both factors working together leaded to quite different tribological behaviors.     

Super-low friction and super-elastic hydrogenated carbon films originated from a unique fullerene-like nanostructure

Hydrogenated carbon films were grown by a plasma-enhanced chemical vapor deposition (PECVD) technique using CH(4) and H(2) as feedstock at ambient temperature. The microstructure of the films was characterized by high resolution transmission electron microscopy (HRTEM). The images showed the presence of curved basal planes in fullerene-like arrangements. An apparent amorphous graphene structure with nm-sized packages of basal planes in a turbostratic feature was observed. The fabricated fullerene-like hydrogenated carbon films (FL-C:H) possess superior mechanical properties, i.e.?high hardness (19?GPa) and high elasticity (elastic recovery of 85%). More importantly, the films exhibit ultra-low friction (μ = 0.009) under ambient conditions with 20% relative humidity.     

a-C∶H膜在不同真空度下的摩擦学行为研究

采用非平衡磁控溅射技术在不锈钢及Sip(111)基体上制备了含氢无定形碳(a-C∶H)薄膜,沉积的薄膜表面光滑,硬度高,内应力小,膜/基结合力好。利用球-盘摩擦实验机对薄膜在不同真空度(1.0×105、5.0×10-2、1.0×10-2、5.0×10-3 Pa)下的摩擦学行为进行了研究,结果表明,随着真空度的升高,薄膜的摩擦系数逐渐减小,磨损率逐渐增大。在5.0×10-3 Pa时,a-C∶H膜的摩擦学行为发生突变,此时薄膜的摩擦系数为0.005,而耐磨寿命很短。高真空中,薄膜寿命的突变可能与薄膜脱氢而结构发生变化有关。     

碳纤维增强聚醚醚酮复合材料滑动磨擦转移膜的性能

通过摩擦实验及X射线光电子能谱分析（ESCA）研究了碳纤维增强聚醚醚酮滑动时形成的转移膜的摩擦性能,结果表明,与纯聚醚醚酮和聚醚醚酮＋聚四氟乙烯相比,碳纤维增强聚醚醚酮材料形成的转移膜薄,连续性均匀性好,因此其磨擦学性能好转移膜的成分沿其垂直于膜面的方向变化,表明此膜中存在着石墨和聚四氯乙稀的优先转移提出滑动磨擦转移膜的形成的粘着转移机制     

采用MCECR等离子体溅射方法制备硬碳膜

采用封闭式电子回旋共振(MCECR)等离子体溅射的方法在硅(100)基片上沉积了高质量的硬碳纳米微晶薄膜,膜层厚度约40 nm,采用氩等离子体溅射碳靶.薄膜的键结构采用X射线光电子能谱仪(XPS)分析,纳米结构采用高分辨率透射电子显微镜(HRTEM)分析.本文研究了基片偏压对薄膜的纳米结构、摩擦特性(摩擦系数及磨损率)以及薄膜的纳米硬度的影响.摩擦特性采用POD摩擦磨损仪测试,纳米硬度采用纳米压入仪测试.     

非平衡磁控溅射类金刚石碳膜的性能

用非平衡磁控溅射的方法在室温下制备了光滑、均匀、致密的类金刚石(DLC)薄膜,分析和研究了DLC膜的形貌、结构和摩擦特性.结果表明,靶工作电流对DLC膜的沉积有重要的影响.随着工作电流的增大,薄膜的沉积速率增大,薄膜中sp3键的含量增加.薄膜的摩擦系数随着工作电流的增加略有增大,在摩擦的初始阶段,摩擦系数较高,随着摩擦循环次数的增加,摩擦系数逐渐减小,并逐渐趋于稳定.     

Analysis of plastic deformation in diamond like carbon films-steel substrate system with tribological tests

The influence of plastic deformation of the substrate on the tribological properties of diamond like carbon (DLC) films was investigated in DLC films-steel substrate system. The tribological properties of DLC films deposited on different hardness steel were evaluated by a ball on disk rotating-type friction tester at room temperature under different environments. In dry nitrogen, DLC films on soft steel exhibited excellent tribological properties, especially obvious under high load (such as 20 N and 50 N). However, DLC films on hard steel were worn out quickly at load of 20 N. Plastic deformation was observed on soft steel after tribological tests. The width and depth of plastic deformation track increased with increase of the experimental load. Super low friction and no measurable wear were kept in good condition even large plastic deformation under high load conditions in DLC films-soft steel system. In open air, DLC films on soft steel exhibited high coefficient of friction and DLC films on ball were worn out quickly. Plastic deformation was not observed on soft steel because the contact area increased and the thick hardened layer on contact surface were formed by DLC films and debris particles together on the steel substrate. The wear track on steel became deep and wide with increase of loads and DLC films were worn out. The experimental results showed that super low friction and high wear resistance of DLC films on soft steel can be attributed to the good adhesion and plastic deformation. Plastic deformation played an active role in the tribological properties of DLC films on soft steel in the present work.     

Tribologisches Verhalten von harten und superharten Kohlenstoffschichten

Tribological behavior of superhard amorphous carbon films The tribological behaviour of amorphous carbon films is determined by monomolecular covering layers strongly attached to the surface. They cause the very low friction in normal humid air, their absence in dry air or vacuum leads to high friction. Any lubricants usually do not improve the tribological behaviour in comparison to air. However for non‐hydrogenated ta‐C films by attachment of specially adapted lubricants an additionally marked reduction of friction is possible.