Pair-groove-substrate GaAs/AlGaAs multiquantum-well lasers with a self-aligned stripe geometry

GaAs/AlGaAs multiquantum-well (MQW) lasers with a self-aligned structure incorporating a waveguide and current confinement were fabricated on a substrate with a pair of etched grooves using two-step epitaxial growth. First, a current-blocking layer was grown selectively on the substrate by low-pressure organometallic vapour-phase epitaxy (OMVPE), and then the GaAs/AlGaAs MQW laser structure was constructed on the substrate with the OMVPE layer by molecular-beam epitaxy. The mesa-shaped part of the active layer above the current-confinement region provides a lateral refractive-index optical waveguide. The lasers show well controlled transverse-mode oscillations with low threshold currents.     

980 nm渐变双波导激光二极管及其光电性能研究

为了提高980 nm激光二极管的光电性能,设计了Al组分内波导正向和外波导反向线性渐变的新型非对称双波导激光二极管。采用一维漂移扩散模型为理论基础,对新结构和传统结构进行了仿真模拟,并对比分析了两者的光电性能。光场分布表明,新结构通过改变波导折射率分布,减少了高阶模式数量,改善了基模的单模特性。能带排列表明,新型非对称双波导结构显著提高了电子和空穴泄漏的势垒,阻挡了载流子泄漏,增强了有源区的载流子限制能力,从而降低了有源区载流子浓度,提高了器件的内量子效率。与传统波导结构对比分析表明,新型非对称双波导结构激光二极管的阈值电流下降了27.65%,工作电压降低了15.24%。在注入电流为5 A时,输出功率达到5.36 W,电光转换效率达到78.06%。设计的新型波导结构提高了980 nm激光二极管的光电性能,对研发高性能激光二极管具有重要的理论指导意义。     

Experimental investigations of the effect of the mode-hopping on the noise properties of InGaAsP Fabry-Perot multiple-quantum-well laser diodes

Detail studies of the optical and electrical low-frequency noise spectra and their correlation factor of graded-index separate-confinement-heterostructure, multiple-quantum-well (MQW) strained-layer Fabry-Perot (FP) InGaAsP/InP laser diodes have been carried out. It is shown that at defined DC currents and temperatures the intensive Lorentzian-type optical and electrical noise peaks (mode-hopping effect) of the FP lasers may be caused by different effects, since the correlation factor between the noises may be positive, negative, or close to zero, i.e., the diode terminal voltage (or resistance) and light output power can fluctuate in phase, in opposite phases or independently. It is determined that the shift of noise peak due to variation of temperature has an activated character. The activation energy is equal to nearly half the bandgap energy of the barrier layer or region, adjacent to the active region of the laser. It was also shown that coating the FP laser diode mirrors by a thin dielectric layer causes a substantial suppression of the mode-hopping effects, with only a small change of the light output power: i.e., the noise peaks are strongly related to the charge carrier and photon confinement in the active region and neighboring to the active regions.     

1.3 μm multiquantum well decoupled confinement heterostructure(MQW-DCH) laser diodes

A 1.3-μm multi-quantum-well decoupled confinement heterostructure (MQW-DCH) laser diode has been developed. This structure introduces internal barriers between the active quantum wells and the optical waveguide. It is thus possible to have, at the same time, deep quantum wells to prevent carrier leakage and a strong optical waveguide with a high confinement factor. The barrier parameters have been optimized using numerical modeling tools, and the DCH laser diode has been built using chemical beam epitaxy. The broad-area transparency current density is 140 A-cm^-2, the internal efficiency is 0.83, the waveguide loss is 5 cm^-1. and T₀ = 62 K. Ridge waveguide laser diodes have a room temperature threshold of 8 mA and an efficiency of 0.32 mW/mA     

Ridge laser with spot-size converter in a single epitaxial step forhigh coupling efficiency to single-mode fibers

We report on a 1.55-μm InGaAsP MQW laser diode with an integrated spot-size converter fabricated in a single epitaxial step using conventional photolithography. The laser structure uses a conventional ridge guide for the active layers and a second larger ridge for the passive waveguide. Low-beam divergence of typically 9°×9° results in about 3-dB coupling losses, with a cleaved optical fiber     

高功率高可靠性9XX nm激光二极管

为了提高半导体激光二极管的输出功率和可靠性,通过在有源区两侧势垒层和波导层之间引入高禁带宽度的GaAsP,抑制有源区载流子的泄漏,极大地改善了器件的性能。研究结果表明:在10~40℃温度范围内器件特征温度从原来的150 K提高至197.37 K(-75.76℃),峰值波长随温度的漂移系数为0.207 nm/℃;条宽200μm、腔长2000μm的9XX nm激光二极管可靠性工作的最大输出功率高达14.4 W;器件在注入电流为7 A时取得71.8%的最大电光转换效率,斜率效率为1.21 W/A。器件在恒定电流下的加速老化测试显示激光二极管可靠性工作寿命达2000 h以上。     

AlInAs氧化物限制1.3μm低阈值边发射激光器

研究制作了一种利用AlInAs氧化物作为限制的1.3μm边发射AlGaInAs多量子阱激光器.有源层上方和下方的AlInAs波导层被氧化作为电流限制层.这种结构提供了良好的侧向电流限制和光场限制.当电流通道为5μm宽时,获得了12.9mA的阈值电流和0.47W/A的斜率效率.与具有相同宽度的脊条的脊波导结构的激光器相比,这种AlInAs氧化物限制的激光器的阈值电流降低了31.7%,斜率效率稍微有所提高.低阈值和高效率的特性表明,氧化AlInAs波导层能够提供良好的侧向电流限制.这种AlInAs氧化物限制的激光器垂直方向的远场半高全宽角为36.1°,而水平方向的是21.6°,表明AlInAs氧化物对侧向光场也有很强的限制能力.     

Broad area phase-locked superlattice barrier quantum well laser diode

The lateral coherence of an extremely broad-area laser diode is examined. The device was fabricated using molecular-beam epitaxy (MBE). For a 350- mu m-wide mesa laser, a single-lobed phase-locked narrow beam was obtained owing to the use of a high-uniformity quantum well graded-index waveguide separate confinement heterostructure (GRIN-SCH) with a short-period (AlGaAs)(GaAs) superlattice MBE-fabricated barrier layer.<>     

Monolithic integration of a quantum-well laser and an opticalamplifier using an asymmetric twin-waveguide structure

We demonstrate the monolithic integration of a 1.55 μm wavelength InGaAsP-InP multiple-quantum-well (MQW) laser and a traveling-wave optical amplifier using an asymmetric, vertical twin-waveguide structure. The laser and amplifier share the same strained InGaAsP MQW active layer grown by gas-source molecular beam epitaxy, while the underlying passive waveguide layer is used for on-chip optical interconnections between the active devices. The asymmetric twin-waveguide structure uses the difference in modal gains to discriminate between the even and odd modes     

非对称异质波导半导体激光器结构

提出了一种非对称异质波导半导体激光器外延结构,即通过优化选择材料体系和结构厚度,对器件外延层的P侧限制结构和N侧限制结构分别设计,从而降低器件的电压损耗,使其满足高输出功率以及高的电光转换效率的要求.从载流子的输运和限制等微观机制出发,对器件的主要输出特性进行了理论分析和数值模拟,并以此为根据设计和制作了一种1060 nm In Ga As/Ga As单量子阱非对称异质波导结构半导体激光器,并对器件的主要输出特性进行了测试.实验结果表明,非对称异质结构是降低器件的电压降、增大限制结构对注入载流子的限制,提高半导体激光器电光转换效率的有效措施.     

1.3μm波段单横模大功率输出量子点激光器

为了制备大功率、单横模输出的量子点激光器,对有源多模干涉波导结构进行了研究。通过优化器件结构设计,采用1×1型有源多模干涉波导结构,以均匀多层InAs/InGaAs/GaAs量子点材料作为有源区,制备了1.3μm波段的有源多模干涉结构量子点激光器。连续电流注入条件下的测试结果表明,与传统的均匀波导结构器件相比,有源多模干涉结构器件具有更低的串联电阻和更好的散热性能;在连续电流为0.5A的小注入情况下,器件的输出功率可达114mW、中心波长为1332nm。结果表明,有源多模干涉结构器件是制备大功率、单横模输出光发射器件的一种有效的器件结构。     

A comparative study of temperature sensitivity of InGaAsP andAlGaAs MQW lasers using numerical simulations

We used numerical simulation to compare the temperature sensitivity of an InGaAsP MQW laser emitting at 1.55 μm and an AlGaAs MQW laser at 0.82 μm. By artificially changing the InGaAsP laser gradually into a structure similar to the AlGaAs laser, we gained quantitative insight into how each material or structural parameter causes the relatively low T₀ of the InGaAsP MQW laser. Using a typical MQW structure we demonstrated the relative importance of parameters involving Auger recombination, current leakage over the quantum barrier, optical confinement and band offset. We found that if these parameters were made the same as the AlGaAs laser, the T₀ of the InGaAsP laser was even better than that of the AlGaAs laser. Our numerical simulation confirmed that the Auger recombination is the main cause of low T₀ in MQW InGaAsP lasers. We also discovered that thermal current leakage over the barrier and Auger recombinations are correlated with each other and both factors must be improved to increase the T₀ of InGaAsP lasers to that of AlGaAs lasers     

Tapered thickness MQW waveguide BH MQW lasers

We propose and demonstrate a novel 1.3 μm InGaAsP/InGaAsP multiple-quantum-well (MQW) BH Fabry-Perot laser diode monolithically integrated with a MQW tapered thickness waveguide. A selective area growth (SAG) technique is used to fabricate the tapered thickness waveguide with low absorption loss and to integrate it with the MQW gain region with a high coupling efficiency. We achieve very narrow vertical and lateral far-field FWHM of 11.8° and 8.0°, with low threshold current of 19 mA and high slope efficiency of 0.25 mW/mA     

AlGaN/GaN/InGaN对称分别限制多量子阱激光器的优化设计

采用一维传递矩阵法模拟计算了AlGaN/GaN/InGaN对称分别限制多量子阱激光器(发射波长为396.6nm)的波导特性.以光限制因子、阈值电流密度和功率效率作为优化参量,获得激光器的优化结构参数为:3周期量子阱In0.02Ga0.98N/In0.15Ga0.85N(10.5nm/3.5nm)作为有源层,90nm In0.1Ga0.9N为波导层,120周期Al0.25Ga0.75N/GaN(2.5nm/2.5nm)为限制层.     

The effect of varying barrier height on the operationalcharacteristics of 1.3-μm strained-layer MQW lasers

This paper presents an empirical study of the effects that barrier layer composition has on the operational characteristics of 1.3-μm-wavelength InGaAsP-InP multiquantum-well (MQW) strained-layer ridge-waveguide lasers. A systematic empirical investigation of how this design choice affects practical device operation was undertaken by examining threshold current, efficiency, and modal gain as a function of temperature in five different laser structures. The results of these studies indicate that small barrier heights improve device performance, despite the loss of electronic confinement in the shallow conduction band quantum wells. Indeed, it appears that carrier uniformity in the MQW structure may be improved by carrier redistribution due to thermal or tunneling effects, which in turn enhances the operation of the low barrier height structures     

Effect of barrier height on the uneven carrier distribution inasymmetric multiple-quantum-well InGaAsP lasers

Four asymmetric multiple-quantum-well (AMQW) laser structures have been grown and tested. The structures demonstrate that carriers are not evenly distributed across the active region of a MQW laser. Wells at the p-side of the active region are preferentially pumped indicating there are more carriers at the p-side of the active region than at the n-side. The structures also demonstrate that decreasing the height of the barriers reduces this effect and results in a more even carrier distribution. Thus, well position and barrier height are shown to be important design parameters for AMQW and conventional MQW lasers     

200K高特征温度的1.3μm AlInGaAs应变单量子阱激光器

在20～80℃范围内连续工作条件下,非对称波导层结构的1.3μm AlInGaAs/AlInAs单量子阱激光器的特征温度为200K,这是目前国内报道的相同有源材料、相同发射波长的激光器中最高的特征温度值.因此AlInGaAs是长波长光纤激光器的理想有源区材料.研究表明非对称波导结构能降低光吸收,提高激光器的高温特性和COD阈值.     

抗中子辐射加固超辐射发光二极管的研究

我们设计并制作了一种高性能的抗中子辐射的超辐射发光二极管。高能中子辐射后产生的位移损伤造成器件有源区内少子寿命减少,从而导致器件光输出功率的降低。通过理论分析可知高输出功率的超辐射发光二极管对中子辐射的敏感度较低。本文中的超辐射发光二极管的有源区采用了具有高量子效率和小体积有源区的InGaAsP/InP多量子阱结构,外延波导层采用了线性缓变折射率分别限制结构(GRIN-SCH),并设计和优化出了特殊波导吸收区和腔面减反射膜结构。辐射实验结果显示,在中子注量为6?10₁₃～1?10₁₄n/cm₂(1MeV)下,InGaAsP/InP多量子阱结构的超辐射发光二极管与双异质结结构相比具有更好的抗中子辐射性能。     

1.55-μm InGaAsP-InP spot-size-converted (SSC) laser with simpletechnological process

In this letter, we report the realization of a 1.55-μm spot-size-converted (SSC) laser using conventional SCH-MQW active layers and conventional photolithography. The laser consists of a 300-μm-long rectangular gain section, with compensated multiple-quantum-well (MQW) structure, and a 300-μm-long tapered passive waveguide, fabricated on lower SCH layer. The device exhibits a beam divergence of 13°×18° and 3.5-dB coupling loss with a cleaved single-mode fiber (SMF). The 1-dB alignment tolerance is ±2.3 μm in the vertical direction and ±1.9 μm in the lateral direction, respectively     

InGaAsP/InP Buried‐Ridge Waveguide Laser with Improved Lateral Single‐Mode Property

A novel InGaAsP/InP buried‐ridg waveguide laser diode structure is proposed and demonstrated for use as a single‐mode laser. The lateral mode of the proposed device can be controlled by adjusting the composition and thickness of the InGaAsP layer grown over the active region. Stable single‐mode operation without kinks or beam‐steering is achieved successfully with lateral and transverse in the junction plane even for the device with the ridge width of 9 μm up to an injection current of 500 mA.