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BF2^+注入多晶硅栅的SIMS分析 总被引:1,自引:0,他引:1
文本采用SIMS技术,分析了BF2^+注入多晶硅栅退火前后F原子在多晶硅和SiO2中的迁移特性,结果表明,80keV,2×10^15和5×10^15cm^-2BF2^+注入多晶硅栅经过900℃,min退火后,部分F原子已扩散到SiO2中,F在多晶硅和SiO2中的迁移行为呈现不规则的特性,这归因于损伤缺陷和键缺陷对F原子的富集作用。 相似文献
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激光制备多层薄膜及铁电性能的研究 总被引:3,自引:2,他引:1
利用脉冲准分子激光淀积(PLD)方法,在Si基片上制备了BIT/Si〔100〕、PZT/BIT/Si〔100〕和BIT/PZT/BIT/Si〔100〕铁电薄膜。用XRD分析了多层铁电薄膜的晶相结构;用Sawyer-Tower电路研究了这些单层和多层铁电薄膜的铁电性能。结果表明,单层BIT的矫顽场Ec为4kV/cm,剩余极化强度为3.4μC/cm2;PZT/BIT的矫顽场Ec为82kV/cm,剩余极化强度Pr为36μC/cm2;BIT/PZT/BIT夹层铁电薄膜的矫顽场Ec为57kV/cm,剩余极化强度Pr为29μC/cm2。最后讨论了薄膜的铁电性能与多层结构的关系 相似文献
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研究了Si^+和Si^+/As^+注入到Horizontal Bridgman(HB)和Liquid Encapsulated Czochralski(LEC)方法制备的半绝缘GaAs衬底电激活效率与均匀性。结果发现:在相同条件下(注入与退火),不同生长方法的半绝缘GaAs衬底电激活不同,通常电激活HB〉LEC,HB SI--GaAs(Cr)(100)A面〉(100)B面,Si^+/As^+双离子 相似文献
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采用PECVD技术在P型硅衬底上制备了a-SiOx:H/a-SiOy:H多层薄膜,利用AES和TEM技术研究了这种薄膜微结构的退火行为,结果表明:a-SiOxL:H/a-SiOy:H多层薄膜经退火处理形成nc-Si/SiO2多层量子点复合膜,膜层具有清晰完整的结构界面,纳米硅嵌埋颗粒呈多晶结构,颗粒大小随退火温度升高而增大小随退火温度升高而增大,在一定的实验条件下,样品在650℃下退火可形成尺寸大 相似文献
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本文用椭圆偏振光谱法研究了低温(77K)、中等能量(147keV)、剂量分别为3×1013及4×1013ions/cm2的BF2+分子离子注人Si的损伤及退火效应.根据样品椭圆偏振参数与C-Si的比较确定退火后晶格恢复的程度.结果表明,椭偏测量是研究分子离子注入Si的有用工具;BF注入硅样品的退火转变温度在500℃以下;并获得在某些实验条件下的最佳退火温度和最佳退火时间。 相似文献
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针对Si-SiO2过渡区对于离子注入较为敏感的特点,用1.2MeV,剂量1×1010cm-2的Fe+和H+先后注入SiO2-Si样品,并用XPS技术重点分析了Si-SiO2界面附近硅的化学结构、组分的变化。结果表明,在界面附近,除了Si4+,Si0价态,还存在明显的Si2+价态。这和注入H+产生的高温退火以及Si—Si键或Si—H键的形成有关。 相似文献
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本文对30kev Si^+和分子离子SiF^+注入半绝缘GaAs的行为进行了研究对比。注入Si^2+样品的Si原子纵向分布与相同条件下用SICT模拟程序理论计算出的分布相一致。经灯光900℃10″RTA,电激活率可达60%,电化学C-V测得的载流子纵向分布与注入态SIMS结果相同,可以获得近0.2μm的GaAs有源层。而注入分子离子SiF^+样品,虽注入层较浅,但灯光退火后,电激活率很低。因此,用 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers
A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it. 相似文献
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A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working. 相似文献
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It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory. 相似文献
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《中国通信》2014,(7)
正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks 相似文献