基于面内复合模态的直线超声电机振子有限元分析

提出了一种新型的矩形压电复合板直线超声电机,它除了具有直线超声电机的共同特点之外,还具有自身的薄、小、轻、驱动力大等突出特点,可直接用于计算机硬盘磁头驱动等外设装置。该矩形压电复合板直线超声电机利用矩形压电复合振子平面内的两种弯、弯振动模态合成。在一定预紧力作用下,矩形板的两侧边将产生驱动力使动子移动。本文通过ANSYS有限元分析软件对矩形压电复合振子进行了详尽的模态分析,分析讨论了结构参数及弹性体材料对于矩形压电复合层板模态的影响,为利用面内复合模态的矩形压电复合板直线超声电机的设计奠定了基础。     

Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator

Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hysteresis which can produce up to 14% uncertainty in the reproduced topography. In this work, a charge drive is used to linearize the vertical piezoelectric actuator which reduces the error from 14% to 0.65%.     

硅基PZT压电功能结构研究

PZT压电薄（厚）膜是制备MEMS传感元件和执行元件重要的功能材料,对近年PZT薄（厚）膜在MEMS领域的研究现状进行了分析,提出了一种新型的双杯PZT/Si膜片式功能结构;采用有限元方法对双杯PZT/Si膜片进行了结构优化,得到PZT和上、下硅杯的结构优化值为DPZT: D1:D2 =0.75:1.1:1;一阶模态谐振频率为13.2KHz;以氧化、双面光刻、各向异性刻蚀,以及PZT厚膜丝网印刷等工艺技术制作了双杯硅基PZT压电厚膜膜片,该膜片具有压电驱动功能。双杯PZT/Si膜片式功能结构的MEMS技术兼容性好,对芯片内其它元件或电路的影响小,适合作为MEMS片内执行元件的驱动机构。     

Mapping piezoelectric-field distribution in gallium nitride with scanning second-harmonic generation microscopy

Taking advantage of the electric field-enhanced second-harmonic generation effect in bulk gallium nitride (GaN) and indium gallium nitride (InGaN) quantum wells, we demonstrated the piezoelectric field distribution mapping in bulk GaN and InGaN multiple-quantum-well (MQW) samples using scanning second-harmonic generation (SHG) microscopy. Scanning SHG microscopy and the accompanying third-harmonic generation (THG) microscopy of the bulk GaN sample were demonstrated using a femtosecond Cr:forsterite laser at a wavelength of 1230 nm. Taking advantage of the off-resonant electric field-enhanced SHG effect and the bandtail state-resonance THG effect, the second- and third-harmonic generation microscopic images obtained revealed the piezoelectric field and bandtail state distributions in a GaN sample. Combined with 720 nm wavelength excited two-photon fluorescence microscopy in the same sample, the increased defect density around the defect area was found to suppress bandedge photoluminescence, to increase yellow luminescence, to increase bandtail state density, and to decrease residue piezoelectric field intensity. Scanning SHG microscopy of the InGaN MQW sample was resonant excited with 800 nm femtosecond pulses from a Ti:sapphire laser in order to suppress SHG contribution from the bulk GaN substrate. Taking advantage of the strong piezoelectric field inside the InGaN quantum well, the wavelength resonant effect, and the electric field-enhanced SHG effect of InGaN quantum wells, resonant scanning SHG microscopy revealed the piezoelectric field distribution inside the wells. Combined with accompanying three-photon fluorescence microscopy from the bulk GaN substrate underneath the quantum wells, the direct correspondence between the piezoelectric field strength inside the quantum well and the substrate quality can be obtained. According to our study, the GaN substrate area with bright bandedge luminescence corresponds to the area with strong SHG signals indicating a higher stained-induced piezoelectric field. These scanning harmonic generation microscopies exhibit superior images of the piezoelectric field and defect state distributions in GaN and InGaN MQWs not available before. Combining with scanning multiphoton fluorescence microscopy, these techniques open new ways for the physical property study of this important material system and can provide interesting details that are not readily available by other microscopic techniques.     

Note: Electrical and thermal characterization of a ferroelectric thin film with an electro-thermal nanoprobe

The localized temperature-dependent piezoelectric response of ferroelectric barium strontium titanate (BST) thin films is studied using an electro-thermal (ET) nanoprobe. The ET probe provides independent electrical and thermal excitation to a nanometer-scale volume of the specimen and is capable of detecting the phase transition temperature of the BST thin films. The piezoresponse measured by the ET probe follows the temperature dependence of the piezoelectric constant, whereas with bulk heating the response follows the temperature dependence of the spontaneous polarization. The observed differences stem from the localized inhomogeneous electro-thermal field distribution at the specimen.     

Development of RF magnetron sputtering method to fabricate PZT thin film actuator

PZT piezoelectric very thin films suitable for a microactuator have been deposited onto Invar alloy substrate using a high-temperature RF magnetron sputtering technique. PZT thin films must be deposited onto conductive substrate for a monomorph or a bimorph actuator. The chemical composition and the crystalline structure of these films were measured by ESCA and XRD, respectively. The chemical composition of PZT deposited stoichiometrically was almost the same as commercially-produced bulk PZT. Crystal planes (1 1 0) and (1 1 1) of PZT perovskite structure were observed in XRD analysis. When the substrate was heated to above 600 °C, SEM revealed only a very small number of pinholes on the surface. A thin (500 nm) film actuator has been characterized by measuring the piezoelectric property using a Laser Doppler Vibrograph. It was confirmed that the piezoelectric property has a linear relationship with the grain size, which also increased with the substrate temperature. The piezoelectric property of deposited PZT thin films showed a good agreement with a quoted value of bulk PZT, when the substrates were heated to 600 °C.     

Ansys在PZT压电薄膜微传感器压电分析中的应用

研究的PZT压电薄膜微传感器采用的弹性敏感元件为微悬臂梁结构,在压电原理和材料力学理论的基础上,采用简化的等效微器件结构建立了数学分析模型,将有限元方法发展应用于压电材料的结构分析中,并运用有限元软件Ansys7.0对PZT压电薄膜微悬臂梁结构的传感性能和线性度进行了模拟,同时分析了微悬臂梁结构的几何参数对输出电压的影响,这些分析结果和解析预测是一致的。     

Fast scanning mode and its realization in a scanning acoustic microscope

The scanning speed of the two-dimensional stage dominates the efficiency of mechanical scanning measurement systems. This paper focused on a detailed scanning time analysis of conventional raster and spiral scan modes and then proposed two fast alternative scanning modes. Performed on a self-developed scanning acoustic microscope (SAM), the measured images obtained by using the conventional scan mode and fast scan modes are compared. The total scanning time is reduced by 29% of the two proposed fast scan modes. It will offer a better solution for high speed scanning without sacrificing the system stability, and will not introduce additional difficulties to the configuration of scanning measurement systems. They can be easily applied to the mechanical scanning measuring systems with different driving actuators such as piezoelectric, linear motor, dc motor, and so on. The proposed fast raster and square spiral scan modes are realized in SAM, but not specially designed for it. Therefore, they have universal adaptability and can be applied to other scanning measurement systems with two-dimensional mechanical scanning stages, such as atomic force microscope or scanning tunneling microscope.     

单振子双腔体无阀压电泵结构设计与机理分析

提出了一种单振子双腔体无阀压电泵,应用小挠度弹性弯曲理论导出了圆形复合压电振子的弹性曲面微分方程,分析了采用一个压电振子形成两个工作腔体压电泵的结构和工作机理,并与单振子单腔体压电泵对比分析了该结构与输出流量的关系。设计研制了结构独特、输出性能更高的单振子双腔体无阀压电泵,通过试验表明:单振子双腔体无阀压电泵比单振子单腔体无阀压电泵输出流量有明显提高。     

双作用压电泵绝缘压电振子的研究

为了提高压电泵的工作效率,提出了对压电泵中的动力元件-压电振子进行特殊绝缘处理,使压电振子在两个方向弯曲变形时都可以形成输出工作能力,即双面作用的绝缘压电振子。阐述了由一个绝缘压电振子形成两个工作腔体的双作用压电泵结构。根据小挠度弹性弯曲理论导出了绝缘圆形复合压电振子的弹性曲面微分方程,阐述了绝缘处理方案和过程,并对其绝缘特性进行分析。对绝缘压电振子进行了实验测试,实验结果表明：双作用绝缘压电振子不仅具有绝缘特性,而且具有良好的韧性和强度;其击穿电压比未绝缘处理压电振子的击穿电压提高了20～30V。为相关产品开发和科研提供了一种新型双面作用的压电驱动元件。     

PZT压电薄膜微传感器的优化设计

通过经验设计出压电薄膜微传感器的基本结构，研究了压电薄膜微传感器的工作原理，选定了优化参数和优化目标；然后利用有限元软件ANSYS7.0进行优化设计，对压电薄膜微传感器的结构尺寸对其线性度和灵敏度的影响进行分析；结合微电子工艺的要求，选定了一个比较合理的结构尺寸，模拟了它的线性度和灵敏度。     

压电结构的有限元分析方法

提出了一种新的压电结构有限元分析方法，即压电薄板立体单元法。利用哈密顿原理推导出压电结构的变分方程，建立了智能结构的有限元动力方程。并以具有压电薄层的层合板为例进行了研究，证明了本文所用方法简单、正确     

Simple electronics for inertial and Pan-type piezoelectric positioners used in scanning probe microscopes

We describe a new type of circuit designed for driving piezoelectric positioners that rely on the stick-slip phenomenon. The circuit can be used for inertial positioners that have only one piezoelectric element (or multiple elements that are moved simultaneously) or for designs using a sequential movement of independent piezoelectric elements. A relay switches the piezoelectric elements between a high voltage source and ground, thus creating a fast voltage step followed by a slow ramp produced by the exponential discharging of the piezoelectric elements through a series resistor. A timing cascade is generated by having each relay power the next relay in the sequence. This design is simple and inexpensive. While it was developed for scanning probe microscopes, it may be useful for any piezoelectric motor based on a fast jump followed by a slow relaxation.     

主动驱动/被动箝位型压电精密步进驱动器研究

提出一种基于直线动子主动驱动和定子被动箝位的新型的压电精密步进驱动器。该驱动器以仿生运动的原理，以压电陶瓷叠堆为动力源，采用双薄壁柔性铰链微变形结构，提高了该驱动器箝位的稳定性和步进旋转的稳定性。通过理论分析和实验研究，深入的揭示了该驱动器的运动特性。     

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 microm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 microm pitch Au grating.     

Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope

Simple feedforward ideas are shown to lead to a nearly tenfold increase in the effective bandwidth of a closed-loop piezoelectric positioning stage used in scanning probe microscopy. If the desired control signal is known in advance, the feedforward filter can be acausal: the information about the future can be used to make the output of the stage have almost no phase lag with respect to the input. This keeps in register the images assembled from right and left scans. We discuss the design constraints imposed by the need for the feedforward filter to work robustly under a variety of circumstances. Because the feedforward needs only to modify the input signal, it can be added to any piezoelectric stage, whether closed or open loop.     

Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system

We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr(0.52)Ti(0.48)O(3) (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pC∕N, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 C∕m(2).     

Influence of the geometry and connection of electrodes on electromechanical characteristics of frequency-tuned disk piezoelectric elements

Amplitude-frequency and electromechanical characteristics of PZT-19 ceramic thin disk piezoelectric elements covered nonuniformly with electrodes are studied. It is shown that, in the case of in-phase connection of ring electrodes to one of the surfaces of a piezoelectric element, which enters the nonuniform stressed-strained state, mechanical vibrations can be excited at several resonance frequencies for which electromechanical-coupling coefficient k _d reaches 67% of that attained for the piezoelectric element covered completely with electrodes.     

Piezoelectric electro-active paper (EAPap) speaker

Film type piezoelectric speaker using cellulose electroactive paper (EAPap) in audible range was studied by acoustic characterization. The speaker was fabricated by depositing thin metal electrodes on both sides of EAPap. The local piezoelectric behavior of thin EAPap surface was visualized at 6 kHz and 221 Hz. The performance of EAPap film speaker as a function of size was evaluated in the audible frequency range, resulting in enhancement of speaker performance in low frequency range. From the measurement of geometric effect of EAPap speaker on audible performance, the circular type speaker shows better performance than rectangular one. Therefore we suggest that the piezoelectric EAPap has a potential for acoustic applications.     

共聚焦激光扫描荧光显微镜扫描系统研制

为适应三维光学微细加工及三维光学信息存储研究的需要,研制了共聚焦激光扫描荧光显微镜的工作台式扫描系统,扫描范围138μm×138μm.工作台采用压电陶瓷驱动器( PZT actuator)驱动的方式来获得高分辨率的位移,采用带柔性铰链的杠杆放大装置来获得较大的位移范围.描述了工作台的工作原理,并对其静态和动态性能进行了测试,实验表明这一扫描系统能很好的应用于共聚焦激光扫描荧光显微镜系统.