P-type conductivity in doped and codoped ZnO thin films synthesized by RF magnetron sputtering

N-doped and Al–N codoped ZnO thin films with different volume ratios of N₂ reactive gas were deposited on plane glass substrates using the radio frequency magnetron sputtering method. The phase transition temperature and absorption edge of the ZnO powder were studied by differential scanning calorimetry at different heating rates and with Fourier transform infrared spectroscopy, respectively. The target used for the sputtering was synthesized using a palletize machine. It was sintered at 450 °C for 5 h. The X-ray diffraction results confirm that the thin films have wurtzite hexagonal structures with a very small distortion. The results indicate that the ZnO thin films have obviously enhanced transmittance of up to 80% on an average in the visible region. The Al–N codoped ZnO thin films exhibited the best p-type conductivity with a resistivity of 0.825 Ω-cm, a hole concentration of 6.55 × 10¹⁹ cm^?3, and a Hall mobility of 1.25 cm²/Vs. The p-type conductivity was observed after doping and codoping of the ZnO thin film.     

Effect of annealing time on the structural,optical and electrical characteristics of DC sputtered ITO thin films

Using an Indium tin oxide (ITO) ceramic target (In₂O₃:SnO₂, 90:10 wt%), ITO thin films were deposited by conventional direct current magnetron sputtering technique onto glass substrates at room temperature. The obtained ITO films were annealed at 400 °C for different annealing times (1, 2, 5, 7, and 9 h). The effect of annealing time on their structural, optical and electrical properties was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microcopy (AFM), ultra violet–visible (UV–Vis) spectrometer, and temperature dependence Hall measurements. XRD data of obtained ITO films reveal that the films were polycrystalline with cubic structure and exhibit (222), (400) and (440) crystallographic planes of In₂O₃. AFM and Scanning Electron Microscopy SEM have been used to probe the surface roughness and the morphology of the films. The refractive index (n), thickness and porosity (%) of the films were evaluated from transmittance spectra obtained in the range 350–700 nm by UV–Vis. The optical band gap of ITO film was found to be varying from 3.35 to 3.47 eV with the annealing time. The annealing time dependence of resistivity, carrier concentration, carrier mobility, sheet resistance, and figure of merit values of the films at room temperature were discussed. The carrier concentration of the films increased from 1.21 × 10²⁰ to 1.90 × 10²⁰ cm^?3, the Hall mobility increased from 11.38 to 18 cm² V^?1 s^?1 and electrical resistivity decreased from 3.97 × 10^?3 to 2.13 × 10^?3 Ω cm with the increase of annealing time from 1 to 9 h. Additionally, the temperature dependence of the carrier concentration, and carrier mobility for the as-deposited and 400 °C annealed ITO films for 2 and 9 h were analysed in the temperature range of 80–350 K.     

Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target

Indium tin oxide (ITO) thin films were deposited on quartz substrates by radio frequency (RF) sputtering with different RF power (100–250 W) using the powder target at room temperature. The effect of sputtering power on their structural, electrical and optical properties was systematically investigated. The intensity of (400) orientation clearly increases with the sputtering power increases, although the films have (222) preferred orientation. Increasing sputtering power is benefit for lower resistivity and transmittance. The films were annealed at different temperature (500–800 °C), then we explored the relationship between their electro-optical and structural properties and temperature. It has been observed that the annealed films tend to have (400) orientation and then show the lower resistivity and transmittance. The ITO thin film prepared by RF sputtering using powder target at 700 °C annealing temperature and 200 W sputtering power has the resistivity of 2.08 × 10^?4 Ω cm and the transmittance of 83.2 %, which specializes for the transparent conductive layers.     

Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures

Undoped ZnO thin films were successfully deposited on Si substrates by RF magnetron sputtering with different substrate temperatures. The dependence was systematically investigated the structural, morphology, chemical state and optical properties of ZnO thin films. Crystal quality, growth orientation and optical properties of ZnO thin films were improved at proper substrate temperature (450 °C) whereas were deteriorated at higher temperature (600 °C). X-ray photoelectron spectroscopy showed that proper substrate temperature promoted the formation of Zn–O bonding, resulting in an improvement of film quality, while higher temperature decreased the formation of the Zn–O bonding and increased the oxygen vacancy due to formation of an amorphous SiO₂ layer at the interface of ZnO and Si, resulting in a degradation of film quality. Moreover, the amorphous SiO₂ layer is formed by oxygen related to the Zn–O bonding, mainly. Therefore, the experimental results indicate that the substrate temperature plays an important role in the deposition of ZnO film on Si substrate and needs to be carefully selected to suppress a formation of an amorphous SiO₂ layer.     

An infrared spectroscopic study of vacuum-evaporated SiO-CeO2 thin films

Infrared spectra of vacuum-evaporated SiO-CeO₂ thin films are reported for a series of thin films of varying compositions. They show a systematic shift of the SiO “O stretch” frequency from a value of 1040 cm^?1 in the pure (100 mol %) SiO film to 950 cm^?1 in the 16 mol % SiO84 mol % CeO₂ film, as well as a gradual diminishing of the band at 876 cm^?1 with increasing CeO₂ concentration. After introducing the general perspective for the analysis of the infrared spectra of amorphous solids, and tetrahedrally bonded compounds in particular, it is proposed that the first two features of the spectra result from a chemical association between nonbridging oxygen atoms of the SiO network and cerium atoms. This entails the interpretation of the band at 876 cm^?1 as being due to the stretching vibrations of the non-bridging oxygen atoms. The effect of annealing on the spectra is also presented and explained in terms of creation of new Si-O-Si linkages.     

Electrical,optical and magnetoresistive behavior of nanostructured ZnO:Cu thin films deposited by sputtering

Copper doped ZnO (ZnO:Cu) nanostructured films with magnetoresistive behavior were produced by growing ZnO/Cu/ZnO arrays at room temperature (RT) by the sputtering technique on corning glass substrates. The arrays were made with two electrical insulating ZnO films of 50 and 105 nm, and a Cu film of 5 nm, both materials were deposited at RT by the RF- and DC-sputtering technique, respectively. The processing method involves two stages that proceed in the course of the growth process, the main one is originated by the non-equilibrium regime of the sputtering technique, and the second is the diffusion-redistribution of the intermediate Cu film towards the neighborhood ZnO layers aided by the nanocrystalline films character. The influence of applying an additional annealing stage to the arrays in N₂ atmosphere at 250 and 350 °C by periods of 30 min were studied. The resistivity of the ZnO:Cu films can be varied from 0.0034 to 2.83 Ω-cm, corresponding to electron concentrations of 1.12?×?10²¹ and 7.85?×?10¹⁷ cm^?3 with carrier mobility of 1.6 and 2.8 cm²/V s. Measured changes on the magnetoresistance behavior of the films at RT were of ?R?~?3% for annealed samples with electron concentration of 1.12?×?10²¹ cm^?3. The X-ray diffraction measurements show that the films are comprised of nanocrystallites with dimensions between 13 and 20 nm in size with preferred (002) orientation. The transmittance of the films in the visible region was of 83% with an optical band gap of ~?3.3 eV for the low-resistivity samples.     

Structural,electrical, optical properties and reliability of ultra-thin tin doped indium oxide films for touch panels

Ultra-thin ITO films with thickness of 4–56 nm were deposited on glass by dc magnetron sputtering using 5 wt% SnO₂ doped ITO target. The effect of film thickness on the structural, electrical, optical properties and reliability was investigated for its application to touch panels. The 4 nm thick ITO film shows amorphous structure and other films present polycrystalline structure and the (222) preferred orientation. The ultra-thin ITO films show smooth surface with low Ra surface roughness smaller than 1 nm. The sheet resistance and visible transmittance of the ITO films decrease with the increase in film thickness. The 4 nm thick ITO film shows the highest resistivity (3.08 × 10^?3 Ω cm) with low carrier density and Hall mobility, and other films have excellent conductivity (<4.0 × 10^?4 Ω cm). The ITO films show high transmittance (>85 %) in visible light range and do not generate interference ripples between film and substrate interface. The ITO films with thickness of 18–56 nm show stable reliability under high temperature, high temperature & high humidity and alkaline environmental conditions. The only electrical degradation corresponds to the increase of sheet resistance in the ITO films with thickness of 4–12 nm.     

Effect of Ga doping concentrations,substrate temperatures and working pressures on the electrical and optical properties of ZnO thin films

We fabricated Ga-doped ZnO (GZO) thin films on glass substrate by RF magnetron sputtering method with different conditions of Ga₂O₃ concentration, substrate temperature and working pressure. Next we investigated the electrical, optical and structural properties of the GZO thin films. At a substrate temperature of 300 °C, a working pressure of 1 mTorr, and a Ga₂O₃ concentration of 3 wt%, the GZO thin films showed the lowest resistivity of 3.16 × 10^?4 Ω cm, a carrier concentration of 7.64 × 10²⁰ cm^?3 and a Hall mobility of 25.8 cm²/Vs. Moreover, the GZO thin films exhibited the highest (002) orientation under the same conditions and the full width at half maximum of X-ray peak was 0.34°. All GZO thin films showed the optical transmittance of more than 80 % in the visible range regardless of working conditions. The Burstein–Moss effect was observed by the change of doping concentration of Ga₂O₃. The GZO thin films were fabricated to have the good electrical and optical properties through optimizing doping concentration of Ga₂O₃, substrate temperature, working pressure. Therefore, we confirmed the possibility of application of GZO thin film as transparent conductive oxide used in flat panel display and solar cell.     

Transparentes leitfähiges TiO2:Nb – ein TCO‐Material der Zukunft?

Transparent conductive TiO₂:Nb – a TCO material of the future? Niobium doped titania is a widely unknown TCO material. We present the results of TiO₂:Nb thin films deposited by DC and pulse DC sputtering from a ceramic titania target with a content of approximately 6 wt.‐percent Nb in a pilot scale in‐line sputtering plant. With DC sputtering on Borofloat 33 substrate a 100 nm thin film show after annealing at 450 °C a resistivity of 7.2 × 10^?4 Ωcm with a low extinction coefficient of 0.02 and a transmittance in the visible range of 74.8%.     

Effect of substrate temperature on structural, morphological and optical properties of crystalline titanium dioxide films prepared by DC reactive magnetron sputtering

Titanium dioxide (TiO₂) thin films have been deposited with various substrate temperatures by dc reactive magnetron sputtering method onto glass substrate. The effects of substrate temperature on the crystallization behavior and optical properties of the films have been studied. Chemical composition of the films was investigated by X-ray photoelectron spectroscopy (XPS). X-ray diffraction (XRD) analysis of the films revealed that they have polycrystalline tetragonal structure with strong (101) texture. The surface morphological study revealed the crystalline nature of the films at higher substrate temperatures. The TiO₂ films show the main bands in the range 400–700 cm^?1, which are attributed to Ti–O stretching and Ti–O–Ti bridging. The transmittance spectra of the TiO₂ thin film measured with various substrate temperatures ranged from 75 to 90 % in the visible light region. The optical band gap values of the films are increasing from 3.44 to 4.0 eV at growth temperature from 100 to 400 °C. The structural and optical properties of the films improved with the increase in the deposition temperature.     

Mixed Nb<Subscript>2</Subscript>O<Subscript>5</Subscript>:MoO<Subscript>3</Subscript> (95:5 and 85:15) thin films and their properties for electrochromic device applications

Nb₂O₅:MoO₃ (95:5 and 85:15) thin films were deposited onto glass and fluorine doped tin oxide coated glass substrates at 100 and 300 °C by RF magnetron sputtering technique. The physical and electrochromic properties of the films were studied. XRD result reveals that deposited films were amorphous. The XPS study confirms the compositional purity and the presence of Nb⁵⁺ and Mo⁶⁺ in the deposited film. Surface morphological study shows platelet like features of deposited film. The average transmittance of the film is varied between 91 and 85 %. Photoluminescence study exhibits three characteristic emission peaks and confirms the better optical quality of deposited film. Raman spectra show the LO–TO splitting of Nb–O stretching of the deposited film. Electrochromic behavior of the deposited films characterized by cyclic voltammetry using 0.5 M LiClO₄·PC and 0.5 M H₂SO₄ electrolyte solutions show all the films are having better reversibility and reproducibility in their electrochemical analysis.     

Growth of CZTS thin films by sulfurization of sputtered single-layered Cu–Zn–Sn metallic precursors from an alloy target

Cu₂ZnSnS₄ (CZTS) thin films were prepared by sulfurizing single-layered metallic Cu–Zn–Sn precursors which were deposited by DC magnetron sputtering using a Cu–Zn–Sn ternary alloy target. The composition, microstructure and properties of the CZTS thin films prepared under different sputtering pressure and DC power were investigated. The results showed that the sputtering rate of Cu atom increases as the sputtering pressure and DC power increased. The microstructure of CZTS thin films can be optimized by sputtering pressure and DC power. The CZTS thin film prepared under 1 Pa and 30 W showed a pure Kesterite phase and a dense micro-structure. The direct optical band gap of this CZTS thin film was calculated as 1.49 eV with a high optical absorption coefficient over 10⁴ cm^?1. The Hall measurement showed the film is a p-type semiconductor with a resistivity of 1.06 Ω cm, a carrier concentration of 7.904 × 10¹⁷ cm^?3 and a mobility of 7.47 cm² Vs^?1.     

Quality enhancement of AZO thin films at various thicknesses by introducing ITO buffer layer

Due to the simultaneously superior optical transmittance and low electrical resistivity, transparent conductive electrodes play a significant role in semiconductor electronics. To enhance the electrical properties of these films, one approach is thickness increment which degrades the optical properties. However, a preferred way to optimize both electrical and optical properties of these layers is to introduce a buffer layer. In this work, the effects of buffer layer and film thickness on the structural, electrical, optical and morphological properties of AZO thin films are investigated. Al-doped zinc oxide (AZO) is prepared at various thicknesses of 100 to 300 nm on the bare and 100 nm-thick indium tin oxide (ITO) coated glass substrates by radio frequency sputtering. Results demonstrate that by introducing ITO as a buffer layer, the average values of sheet resistance and strain within the film are decreased (about 76 and 3.3 times lower than films deposited on bare glasses), respectively. Furthermore, the average transmittance of ITO/AZO bilayer is improved nearly 10% regarding single AZO thin film. This indicates that bilayer thin films show better physical properties rather than conventional monolayer thin films. As the AZO film thickness increases, the interplanar spacing, d₍₀₀₂₎, strain within the film and compressive stress of the film in the hexagonal lattice, decreases indicating the higher yield of AZO crystal. Moreover, with the growth in film thickness, carrier concentration and optical band gap (E_g) of AZO film are increased from 4.62?×?10¹⁹ to 8.21?×?10¹⁹ cm^?3 and from 3.55 to 3.62 eV, respectively due to the Burstein-Moss (BM) effect. The refractive index of AZO thin film is obtained in the range of 2.24–2.26. With the presence of ITO buffer layer, the AZO thin film exhibits a resistivity as low as 6?×?10^?4 Ω cm, a sheet resistance of 15 Ω/sq and a high figure of merit (FOM) of 1.19?×?10⁴ (Ω cm)^?1 at a film thickness of 300 nm. As a result, the quality of AZO thin films deposited on ITO buffer layer is found to be superior regarding those grown on a bare glass substrate. This study has been performed over these two substrates because of their significant usage in the organic light emitting diodes and photovoltaic applications as an enhanced carrier injecting electrodes.     

Microstructural and optoelectronic properties of rf magnetron sputtered ZnO:(Ga,Ti) semiconductor thin films

Applying radio-frequency (rf) magnetron sputtering technique, Ga–Ti co-doped ZnO [ZnO:(Ga,Ti)] transparent conductive oxide films were deposited onto glass substrates. The films were characterized by X-ray diffraction, four-point probe and UV–visible spectrophotometer. The influence of sputtering pressure on microstructure and optoelectronic properties of the films was investigated. The results show that all the films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the (002) direction. The ZnO:(Ga,Ti) films deposited at sputtering pressure of 0.4 Pa exhibit the maximum grain size of 86.6 nm, the highest transmittance of 85.9 %, the lowest resistivity of 1.67 × 10^?3 Ω cm, and the highest figure of merit of 1.38 × 10^?2 Ω^?1. The optical constants such as refractive index, extinction coefficient, dielectric constant and dissipation factor were determined using the method of whole optical spectrum fitting. Meanwhile, the dispersion behaviour of the films was studied by the single electronic oscillator model. The oscillator parameters and optical energy gaps were achieved. The results demonstrate that the microstructure and optoelectronic properties of the films are closely related to the sputtering pressure.     

Nanocrystalline ITO-Sn2S3 transparent thin films for photoconductive sensor applications

Nanocrystalline indium tin oxide (ITO) film containing 5 wt% Sn was prepared on glass substrate by the spray pyrolysis technique at a substrate temperature of 500 °C. In order to enhance the photosensitivity of ITO, thiourea (CS(NH₂)₂ was added to the precursor to obtain the [S]/[In] proportion of 0.1, 0.2, 0.4 and 0.6. The X-ray diffraction patterns showed that beside the bixbyite structure of ITO, the characteristic peaks corresponding to Sn₂S₃ appeared in XRD profiles recorded for the films with [S]/[In] = 0.1 and 0.2. In addition, sulfur additive caused a considerable decline in crystallinity quality. The optical properties of the films were studied using transmittance measurements in the wavelength range 300–1,000 nm. As a result, ITO and ITO-Sn₂S₃ thin films were prepared with resistivity of 3.06–3.7 × 10^?4 Ω cm and a transmittance of 88–91 % at the wavelength of 550 nm. Moreover, the electrical resistances of ITO and ITO-Sn₂S₃ films as a function of time were measured in darkness and under illumination of light in the visible range. The photoresistance results revealed that the ITO-Sn₂S₃ film with [S]/[In] = 0.2 was efficiently sensitive to visible light for photoconductive sensor applications, besides being high conductive and transparent.     

Bi2MoO6 dielectric thin films fabricated by thermal oxidation of Bi/Mo thin films at ultra-low temperature

Bi/Mo multilayer thin films are deposited on Si/SiO₂/Pt substrates by direct current magnetron sputtering. The effect of annealing temperature on the microstructure, dielectric and electrical properties of the as-sputtered films is characterized systematically. X-ray diffraction data indicate that the films annealed at 450–600 °C are a mixture of diphase with the main phase Bi₂MoO₆ and secondary phase Bi₂Mo₂O₉. Results of scanning electron microscope observation show that the films annealed at 500–550 °C are dense and uniform, in particular the films annealed at 500 °C exhibit optimal dielectric and electrical properties with dielectric constant as high as 37.5, dielectric loss 1.06 %, temperature coefficient of dielectric constant ?10.86 ppm °C^?1 at 1 kHz, and leakage current density of 1.46 × 10^?7 A mm^?2 at an electric field of 18.2 kV mm^?1. With the advantages of ultralow densification temperature (500 °C) and very high sputtering deposition rate (76 nm min^?1), it is anticipated that thermal oxidation method of the sputtered Bi/Mo thin films could be a promising technique for fabrication of Bi₂MoO₆ ceramic thin film embedded-capacitors.     

Understanding of post deposition annealing and substrate temperature effects on structural and electrical properties of Gd<Subscript>2</Subscript>O<Subscript>3</Subscript> MOS capacitor

The purpose of this study is to understand the effects of substrate temperature (ST) and post deposition annealing (PDA) on the structural-electrical properties of Gd₂O₃ film and to evaluate the electrical performances of the MOS based devices formed with this dielectric. The Gd₂O₃/Si structures were annealed at 500, 600, 700, and 800 °C under N₂ ambient after the films were grown on heated p-Si substrate at various temperatures ranged from 20 to 300 °C by RF magnetron sputtering. For any given ST, the crystallization/grain size increased with increasing PDA temperature. The bump in the accumulation region or continuous decrease in the capacitance values of the inversion region of the C–V curves for 800 °C PDA was not observed. The lowest effective oxide charge density (Q _eff ) value was obtained to be ??1.13?×?10¹¹ cm^?2 from the MOS capacitor with Gd₂O₃, which is grown on heated Si at 300 °C and annealed at 800 °C. The density of the interface states (D _it ) was found to be in the range of 0.84?×?10¹¹ to 1.50?×?10¹¹ eV^?1 cm^?2. The highest dielectric constant (ε) and barrier height \(({\Phi _B})\) values were found to be 14.46 and 3.68, which are obtained for 20 °C ST and 800 °C PDA. The results show that the negative charge trapping in the oxide layer is generally more than that of the positive, but, it is reverse of this situation at the interface. The leakage current density decreased after 20 °C ST, but no significant change was observed for other ST values.     

Low temperature sintering and characteristics of K2O–B2O3–SiO2–Al2O3 glass/ceramic composites for LTCC applications

The K₂O–B₂O₃–SiO₂, K₂O–B₂O₃–SiO₂–2 %Al₂O₃, K₂O–B₂O₃–SiO₂–4 %Al₂O₃ glasses with different Al₂O₃ content were prepared. Different proportions (50, 55, 60, 65, 70 %) of the three glasses were respectively mixed with alumina ceramic-filler, then the mechanical and dielectric properties were investigated. The results showed K₂O–B₂O₃–SiO₂–2 %Al₂O₃ glass/alumina filler (glass:alumina = 60:40) had the excellent comprehensive properties, so further study was continued with part of alumina ceramic-filler replaced by the silica ceramic-filler on this composite. Then the X-ray diffraction analysis revealed that the alumina and silica fillers existed as the crystal phase, and the densification was seriously damaged when the silica content reached to three quarters of the fillers. With the increase of the silica-filler, the composites’ density and dielectric constant exhibited uniform decrease, but thermal expansion coefficient (TEC) uniformly increased. When the glass:alumina:silica was equal to 60:30:10, a best composite property was presented as a bulk density of 2.582 (g cm^?1), a dielectric constant of 6.1 and a dielectric loss of 2 × 10^?3 at 1 MHz, a flexural strength of 168 MPa, and a TEC of 8.62 × 10^?6 °C^?1.     

Influence of nitrogen gas flow rate on the structural, morphological and electrical properties of sputtered TiN films

In this work, nanocrystalline titanium nitride (TiN) films have been deposited by reactive DC magnetron sputtering technique on the Si/SiO₂ (100) substrates. The influence of nitrogen gas flow rate [0, 3, 5, 7 and 9 sccm (standard cubic centimeter per minute)] on the structural, morphological and electrical properties of the nanocrystalline TiN films has been studied. As-deposited TiN films have been characterized by using X-ray diffraction (XRD), XPS (X-ray photoelectron spectroscopy), FESEM (field emission scanning electron microscopy) and four point probe resistivity measurement, respectively. The XRD patterns revealed the HCP symmetry for pure Ti (N₂ = 0 sccm) with (002) preferred orientations, and the FCC symmetry for TiN (N₂ = 3, 5, 7 and 9 sccm) films having (111) preferred orientations. The lattice parameters were found to be a = 2.950 ?, c = 4.681? for the Ti (N₂ = 0 sccm) film and a = 4.250Å for the TiN films. The presence of different phases such as TiN and TiO₂ were confirmed by XPS analysis. The FESEM images showed a smooth morphology of the film with columnar grain structures. The grain size of the TiN films was found to decrease from 22 to 15 nm as the nitrogen flow rate is increased from 0 to 9 sccm. The electrical resistivity measurement showed that the resistivity of the film increased from 11 × 10^?6 to 17 × 10^?6 Ohm cm on increasing nitrogen flow rate from 3 to 9 sccm, having the lowest resistivity of 11 × 10^?6 Ohm cm for the film deposited at 3 sccm nitrogen flow.     

Preparation and photoelectric properties of Ti doped ZnO thin films annealed in vacuum

In the present paper, Ti doped ZnO films with higher conductive properties were grown on room temperature glass substrates by radio frequency magnetron sputtering and followed by annealing in vacuum. The microstructures and surface figures of the films were investigated by X-ray diffraction and scanning electronic microscopy, and its optical and electrical properties were measured using a four-point probe technique and 756-type spectrophotometer at room temperature. The results show that the preferred growth orientation of the films is (002) orientation, and after annealing in vacuum at 400 °C for 3 h, the average transmittance reduces from 90 to 80%, and resistivity reduces from 4.53 × 10^?2 to 8.78 × 10^?4 Ω cm.