共查询到20条相似文献,搜索用时 171 毫秒
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微电子封装业的迅速发展对封装设备中的运动定位平台的运行速度以及加速度的要求越来越高,研制新型高加速精密定位机构成为十分迫切的任务。针对这种需求,提出一种新型2-DOF平面并联定位机构,它由直线电机直接驱动含有平行四边形支链的并联杆机构来实现末端平台平面内的平动。采用Largrange方程建立了动力学模型,然后基于奇异值理论得到了机构的速度与加速度极值表达式,分析了平台在关节速度限制下的速度特性,以及在关节力矩限制下平台的加速能力。分析结果表明此定位平台运动最大速度最差可达0.8m/s;最大加速度最差可达12g,最好情况下可达14g。实验验证此定位平台具有高加速度的运动特性,可达上述速度与加速度指标。 相似文献
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为了解决传统压电陶瓷驱动器固有的高精度与大行程的矛盾,提出了利用非共振式压电电机的两种不同运动模式来实现精密定位平台的定位高精度与工作大行程的方案。设计了一种新型菱形压电电机,分析其工作原理,给出了定子结构及夹持预紧结构的设计方案。菱形压电电机的实验结果表明,其步进作动模式下定位分辨率为1.0μm,连续运动模式下最大空载速度为0.932mm/s。在此基础上,利用3台菱形压电电机同步驱动并联精密定位平台,实验结果表明,并联平台平动定位分辨率为1.0μm,转动定位分辨率分别为8.6,11和10μrad。实验重复进行10次,动平台定位分辨率的波动率均低于5%,表明了该并联平台具有良好的同步性与重复性。另一方面,利用菱形压电电机的连续运动模式可实现大行程空间定位,其平动工作行程为3.54 mm,转动工作行程分别为3.92°,4.16°和4.05°。借助于菱形压电电机的不同工作模式实现了并联平台的精密定位和大行程工作空间两个关键指标,为进一步研究精密定位平台的动态性能、控制规律提供了理论价值和实践基础。 相似文献
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文章比较了超声波电机常用控制方法的优缺点,简述了超声波电机步进控制原理,研究了超声波电机步进闭环控制法在精密定位中的应用。采取16位绝对值编码器与电机、控制器构成闭环系统,消除开环累计误差,使电机的定位精度保持在了编码器分辨率之内,定位重复度R2=0.9992。 相似文献
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一种宏微双重驱动精密定位机构的建模与控制 总被引:28,自引:18,他引:10
提出一种宏微双重驱动精密定位机构,采用高性能直线电机直接驱动宏动平台,实现系统大行程微米级精度定位;安装在宏动平台上的压电陶瓷驱动微动平台,实现纳米级的分辨率和定位精度,以高频响动态补偿系统的定位误差;采用精密光栅尺反馈微动平台输出端的位置信号,实现定位机构的全闭环反馈控制。在分别建立宏动、微动、宏微机构模型的基础上,提出复合型宏动控制和模糊自校正PID微动控制的宏微控制策略。实验研究表明:系统的动态和稳态性能良好,该定位机构的最大工作行程100 mm,稳定时间小于40 ms,重复定位精度10 nm。 相似文献
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由于超声电机压电材料、摩擦材料、接触界面的非线性,速度平稳性和位置控制精度不高,这在一定程度上制约了它在高端精密装备中的应用。本文介绍了一种实现超声电机速度、位置高精度控制的方法。从连续运动与步进运动两个维度分析了超声电机的速度调控机理,阐明了速度波动的误差来源,建立了以幅值、频率为输入量,融合稳态环节与动态环节的速度模型。为了准确预测步进位移量,建立并辨识了启动-关断两段式二阶速度模型;接着采用双环复合控制算法实现了高平稳性速度控制,并通过驱动参数优化实现了电机的高分辨率位置控制。最后,运用分段逼近策略实现了高精度定位。实验结果表明,在速度控制方面,采用双环复合方法控制的速度平稳性为0.44%,相比单速度环的控制效果提升了一倍;在位置控制方面,超声电机的开环位置分辨率达到了0.375μrad,定位精度达到了1.7μrad。本文提出的控制方法综合了不同参数及不同环路的调控特点,有效提高了超声电机的速度与位置控制精度,为超声电机在精密装备中的拓展应用奠定了基础。 相似文献
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Resolvers are normally employed for rotor positioning in motors for electric vehicles,but resolvers are expensive and vulnerable to vibrations.Hall sensors have the advantages of low cost and high reliability,but the positioning accuracy is low.Motors with Hall sensors are typically controlled by six-step commutation algorithm,which brings high torque ripple.This paper studies the high-performance driving and braking control of the in-wheel permanent magnetic synchronous motor(PMSM) based on low-resolution Hall sensors.Field oriented control(FOC) based on Hall-effect sensors is developed to reduce the torque ripple.The positioning accuracy of the Hall sensors is improved by interpolation between two consecutive Hall signals using the estimated motor speed.The position error from the misalignment of the Hall sensors is compensated by the precise calibration of Hall transition timing.The braking control algorithms based on six-step commutation and FOC are studied.Two variants of the six-step commutation braking control,namely,half-bridge commutation and full-bridge commutation,are discussed and compared,which shows that the full-bridge commutation could better explore the potential of the back electro-motive forces(EMF),thus can deliver higher efficiency and smaller current ripple.The FOC braking is analyzed with the phasor diagrams.At a given motor speed,the motor turns from the regenerative braking mode into the plug braking mode if the braking torque exceeds a certain limit,which is proportional to the motor speed.Tests in the dynamometer show that a smooth control could be realized by FOC driving control and the highest efficiency and the smallest current ripple could be achieved by FOC braking control,compared to six-step commutation braking control.Therefore,FOC braking is selected as the braking control algorithm for electric vehicles.The proposed research ensures a good motor control performance while maintaining low cost and high reliability. 相似文献
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The purpose of this research is to achieve real time motion error correction of the rotor in a non-contact ultrasonic motor (non-contact USM). The rotor is installed in a cylindrical stator with a small gap and designed so that it has a resonant frequency of 22.2 kHz, the 8th flexural mode of vibration. The multi-layered piezoelectric actuators excite the flexural wave traveling in the circumference direction. The ultrasonic vibration produces a sound field that levitates the rotor, and the traveling wave induces a near-boundary streaming to rotate the rotor by viscous force. In this paper, we describe an experimental test of the performance of a non-contact USM. When the flexural vibration amplitude was 0.3 μm, the rotational speed was 4 rpm. The rotational speed and starting torque was proportional to the vibration amplitude. The starting performance to attain rotational speed had a time constant of 2 s for several different amplitudes hence the rotational torque is independent of the rotational speed and the resistance force on the rotor is governed by viscosity. In addition, the non-contact USM has the capability of contact-free micro positioning of the rotor by controlling the deformation of the piezoelectric actuators. The PI controller was constructed to correct the detected motion error of the rotor in the radial direction. As a consequence, a motion error of 0.8 μm for one rotor revolution was reduced to 0.1 μm. 相似文献
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To improve positioning precision of the traveling wave ultrasonic motor (USM), a flexible shaft was used, and the structure was redesigned to reduce the fluctuations of step angles and speed. The start and stop response performances of the motor were analyzed theoretically and tested by a high-resolution test rig. The step characteristics were calculated, which showed the minimum step angle is below 0.20″ under different torques. The positioning process included two modes: continuous mode and step mode. In continuous mode, the speed of the motor was controlled by PID control based on the tests of frequency-speed characteristic of the motor. In step mode, the step characteristics of the motor was tested under different load torques and applied different lengths of driving voltage to find the minimum of step angle. From the tests, the step angle increases rapidly with the periods of driving voltage and the single-step angle fluctuations of the motor with flexible shaft is much less than that of motor with normal shaft. Finally, the positioning performances of USM were tested. The results showed that the minimum positioning error of the motor with flexible shaft could achieve 0.37″ (1.79 μrad) and the time costed was below 1 s. 相似文献