基于厚膜混合集成电路的激光调阻工艺研究

激光调阻具有高精度、高效率等特点,是目前厚膜混合集成电路最为常用的电阻修调方法。为了实现厚膜混合集成电路中精度电阻的制作,文章对激光调阻工艺进行了系统研究,内容包括探针卡焊接组装、调阻程序编制以及工艺试验研究。通过进行试验验证,选用L型调阻路径,调阻精度已达到±0.5%,满足设计要求。     

Laser-trimming adjustment of waveguide birefringence in optical FDMcomponents

Laser trimming of amorphous-silicon stress-applying films deposited on silica-based single-mode waveguides is demonstrated for controlling waveguide birefringence. Successful applications to polarization-insensitive operation of an optical ring resonator and a Mach-Zehnder interferometer are presented. A phase difference of less than π/100 between TE and TM modes has been attained. It is noted that this laser trimming method can also be applicable to other material devices such as LiNbO₃ and yttrium-aluminum-garnet (YAG), where waveguide birefringence control is a crucial factor in achieving the practical performance of the device     

高速高精度D／A转换电路的激光动态修调

本文介绍了激光修调原理、动态修调实现的方法，并以修调ＳＤＡ１２１０（１２位Ｄ／Ａ转换电路）为例，说明Ｄ／Ａ转换电路动态修调程序设计的方法、技巧以及应注意的问题。     

激光修整埋入无源元件的最佳设计

当设计具有埋入无源元件的PCB时,必须仔细考虑影响修整生产率和准确性的因素,而采用激光修整是最佳的。     

Fundamental limitations on the laser trimming of active networks

The speed limitations imposed on the laser trimming of active networks by trim-induced transients are discussed. It is predicted that for a majority of cases these transients rather than the measurement system will become the major speed limitation of the trimming process.     

厚膜微调技术及发展趋势

介绍了厚膜电阻常用的喷砂微调和脉冲电压微调、激光微调三种微调技术及其发展趋势，重点介绍了激光微调机理、调阻方式以及微调图形分类。与喷砂和脉冲电压微调技术相比，激光微调具有精度高、速度快、效率高的特点，因而具有广阔的发展前景。     

垂直腔面发射激光器在无线激光通信中的应用研究

在光纤通信中广泛应用的垂直腔面发射激光器,以其单模特性好、阈值电流低、调制速率高等特点备受人们青睐,而在无线激光通信中的应用鲜有报导。本文从垂直腔面发射激光器的结构特点出发,分析了它的技术优势及技术发展趋势,探讨了垂直腔面发射激光器可在无线激光通信中获得应用的原因。采用VCSEL垂直腔面发射激光器作为激光光源并与光纤通信中已经成熟的EDFA、波分复用等技术的结合,将提高无线激光通信系统的性能,降低系统成本。     

基材晶体取向对激光定向凝固单晶显微组织的影响

利用Rene95合金在DD3单晶基材的 (0 0 1)面、(10 0 )面和与 (0 0 1)面夹角分别为 4 5°和 2 2 .5°的晶面上进行激光多层涂覆 ,研究了基材晶体取向对单晶显微组织的影响规律。研究表明 ,当实验在基材的择优晶面 { 0 0 1}上进行 ,涂层的组织为定向凝固柱状晶 ,晶体取向与基材的晶体取向相一致 ,一次间距约为 10 μm ,二次臂退化。当实验在基材的非择优晶面 (与(0 0 1)面的夹角θ分别为 4 5°和 2 2 .5°的晶面 )上进行 ,涂层的晶体取向仍然与基材的晶体取向一致 ,但枝晶二次臂出现 ,θ为4 5°角的晶面与 2 2 .5°角的晶面相比 ,枝晶二次臂的发展不平衡性加大。     

转镜式激光照排机中的锁相电路

激光照排机是一种光机电相结合的产品 ,是计算机—激光编辑排版系统中的关键输出设备 ,由它输出的胶片的质量直接影响着印刷质量的好坏。而激光照排机中的锁相电路又是激光照排机电路部分的关键 ,成功锁相是实现照排机各项同步的基础。本文对转镜式激光照排机中的一种锁相电路进行讨论     

Quantitative Analysis of Resistance Variations in Nickel-Phosphorus (NiP) Resistors

Embedded resistors can be fabricated by plating resistive Nickel-Phosphorus (NiP) alloy to form resistors on circuit boards. As-deposited NiP alloy resistors typically have poor resistance tolerances and require tuning by costly laser trimming to meet specifications. The cost of the resistors can be reduced if the tolerances can be reduced without laser trimming. In this study, a group of parameters affecting patterning accuracies, plating and sheet resistivities were varied to evaluate their effects on the resistance tolerances of electroless-plated NiP resistors. The effect of the substrate on sheet resistivity variations was also characterized. Design guidelines to obtain NiP resistors with low tolerance without laser trimming arc discussed.     

激光修整厚膜铂热敏电阻的研究

本文报道用Nd:YAG声光调Q激光修整厚膜铂热敏电阻的实验研究结果,分析了激光参数与电阻膜修整质量参数的关系,讨论了激光修整热敏电阻膜应注意的一些问题。     

激光微调在光通讯波导器件研制中的应用

目前激光微调在光通讯波导器件的研制方面已得到了应用。本文运用激光微调在波导器件上进行了实验,其中以波导环形器和马赫—曾德尔干涉仪为例,具体讨论了激光微调技术在控制波导双折射方面所表现出的高效,简易,实用等优点。     

激光调阻预置式变速光刻控制

全自动激光调阻机是各种薄、厚膜片式电阻的工业化专用生产设备,提高调阻性能是提升设备生产力,降低生产成本,节能增效的主要途径.因此,在原系统基础上对激光调阻中光束定向控制系统进行改进设计,以先验知识为基础,构造预置、简单变速、实时变速等光刻控制模型,得到预置式变速光刻控制方法.它能根据不同的精度、速度要求和片阻初值偏差进行优化决策,实现在激光粗调电阻时,采用快速光刻;在激光精调电阻时,采用慢速光刻.这样不仅动态改变了片阻的光刻阻值变化率,提高了调阻精度,而且缩短了粗调光刻时间,提高了调阻速度,从整体上提高了激光调阻性能.     

Laser Trimming of CuAlMo Thin-Film Resistors: Effect of Laser Processing Parameters

This paper reports the effect of varying laser trimming process parameters on the electrical performance of a novel CuAlMo thin-film resistor material. The films were prepared on Al₂O₃ substrates by direct-current (DC) magnetron sputtering, before being laser trimmed to target resistance value. The effect of varying key laser parameters of power, Q-rate, and bite size on the resistor stability and tolerance accuracy were systematically investigated. By reducing laser power and bite size and balancing this with Q-rate setting, significant improvements in resistor stability and resistor tolerance accuracies of less than ±0.5% were achieved.     

激光调阻工艺参数对调阻精度的影响分析

激光调阻的工艺参数主要包括光斑重叠率、激光功率、调Q频率和调阻速度 ,它们选择的合适与否直接影响激光调阻精度 ,如何确定激光调阻工艺参数是激光调阻控制中的重要问题。文中从理论分析和实验数据分析两个方面研究了激光调阻工艺参数对激光调阻精度的影响 ,并给出了激光调阻工艺参数之间的函数关系式和实际应用 ,为激光调阻工艺参数的选择提供了必要依据。     

激光-机械复合修整超硬磨料砂轮研究

为了解决超硬磨料砂轮修整困难的难题,采用激光-机械复合修整法,通过对青铜结合剂的去除过程进行多脉冲有限元仿真,优化激光粗修工艺的激光参数及确定激光粗修工艺过程砂轮圆跳动所能达到的范围。根据仿真结果选择了修整实验条件下激光粗修的激光参数,并对烧结成型的青铜金刚石砂轮进行了激光-机械复合修整实验。结果表明在合适的工艺参数下,激光-机械复合修整法是一种有效的修整方法。     

Laser sintering of thick-film PTC thermistor paste deposited by micro-pen direct-write technology

In this paper, laser sintering has been used to process thermal sensitive material deposited by micro-pen direct-write technology. Lines of thick-film PTC thermistor paste were deposited by micro-pen direct-write technology and irradiated by a continuous-wave laser with varied power density and scanning speed. Line widths, sheet resistivities and temperature coefficients of resistivity were measured as a function of laser power density, scanning speed, coating thickness and overlapped value. The mechanism of laser sintering thermistor paste was discussed. Laser sintering enabled finer thermistor lines to overcome the resolution limitation of micro-pen deposition without the use of any high temperature post processing. The thermistors exhibited excellent electrical performance and resistance tolerance equivalent to traditional oven-fired electronic paste.     

Ar+激光器用于电阻微调的研究

本文讨论并研究了Ar+激光器用于电阻微调的优越性。结果表明,在比常用的Nd:YAG激光功率小得多的情况下,可得到与之相当的刻线宽度和阻值稳定性。     

Material processing—An overview

Laser researchers in the early 1960's found that a ruby laser could easily melt and vaporize small amounts of metal. Many investigations have since been performed to determine the effects of high-power laser radiation on absorbing surfaces. By the late 1960's lasers had become practical production tools. In the early 1970's, advances in the power of CO2lasers led to deep penetration laser welding. This greatly increased the range of metal thickness amenable to laser processing. At present, lasers are used in a practical way for many applications in material processing. For some applications, like trimming of resistors and drilling of holes in ceramics, laser processing is the leading method. For other applications like heat treating, welding, and cutting, laser processing is an economically competitive alternative to conventional techniques. In addition, there are new research possibilities, especially for processing of semiconductors. Areas such as laser-assisted crystal regrowth and annealing of ion-implantation damage point toward new methods of generating semiconductor circuitry. This paper will review the physical phenomena which underlie laser processing applications. It will also give an overview of some of the leading uses for laser-based material processing.     

TureType字库在激光调阻机中的应用

为了获得一种用于自动激光调阻机中的激光打标系统,选用VB程序设计语言并采用API函数从TureType字库中提取字符信息,将字符信息保存为激光调阻机可读取的文件,以激光划线和激光扫描打点的方式打印空心字和实心字,并将激光打印程序指令化。结果表明使用API函数可以方便地提取字符信息和进行各种字符格式的变换,该系统已经运用到自动激光调阻机中。