Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications

This paper discusses the design, fabrication, and testing of sensitive broadband lithium niobate (LiNbO/sub 3/) single-element ultrasonic transducers in the 20-80 MHz frequency range. Transducers of varying dimensions were built for an f# range of 2.0-3.1. The desired focal depths were achieved by either casting an acoustic lens on the transducer face or press-focusing the piezoelectric into a spherical curvature. For designs that required electrical impedance matching, a low impedance transmission line coaxial cable was used. All transducers were tested in a pulse-echo arrangement, whereby the center frequency, bandwidth, insertion loss, and focal depth were measured. Several transducers were fabricated with center frequencies in the 20-80 MHz range with the measured -6 dB bandwidths and two-way insertion loss values ranging from 57 to 74% and 9.6 to 21.3 dB, respectively. Both transducer focusing techniques proved successful in producing highly sensitive, high-frequency, single-element, ultrasonic-imaging transducers. In vivo and in vitro ultrasonic backscatter microscope (UBM) images of human eyes were obtained with the 50 MHz transducers. The high sensitivity of these devices could possibly allow for an increase in depth of penetration, higher image signal-to-noise ratio (SNR), and improved image contrast at high frequencies when compared to previously reported results.     

Fabrication and performance of high-frequency composite transducers with triangular-pillar geometry

A single-element, 40-MHz, 3-mm diameter transducer was fabricated with a geometric focus at 9 mm. The transducer was based on a piezo-composite substrate with triangular-shaped composite pillars. The 2-way bandwidth of 50% and impedance magnitude were in agreement with that predicted using finite-element modeling. A one-way radiation pattern was collected using a needle hydrophone. The one-way -3 dB beamwidth at the geometric focus was measured to be 120 mum and the -3 dB depth of field was 2.5 mm. This is in good agreement with the theoretical predictions of 112.5 mum and 2.4 mm. The triangular-pillar composite transducer was then compared with a transducer with square composite pillars with similar volume fraction of active ceramic. A 9.5 dB reduction in the amplitude of the secondary resonance was found for the triangular-pillar composite as well as a 30% gain in the 2-way pulse bandwidth. A 256-element 30-MHz linear array was fabricated as a preliminary investigation into the use of the triangular pillar as the substrate in a high-frequency linear array transducer. In vivo images were generated with both the single-element and linear-array transducers.     

Fabrication and evaluation of a single-element Bi(0.5)Na(0.5)TiO(3)-based ultrasonic transducer

This paper discusses the fabrication and characterization of a single-element ultrasonic transducer with a lead-free piezoelectric active element. A piezoelectric ceramic with composition of 0.88Bi(0.5)Na(0.5)TiO(3)-0.08Bi(0.5)K(0.5)TiO(3)- 0.04Bi(0.5)Li(0.5)TiO(3) was chosen as the active element of the transducer. This composition exhibited a thickness coupling coefficient (kt) of 0.45, a dielectric constant of 440 (at 1 kHz), and a longitudinal piezoelectric coefficient (d(33)) of 84 pC?N(-1). To make the transducer, the ceramic was sandwiched between an epoxy-tungsten backing layer and a silver epoxy matching layer. An epoxy lens was also incorporated into the transducer?s design to focus the ultrasound beam. The focused transducer with a center frequency of about 23 MHz demonstrated a -6-dB bandwidth of 55% and an insertion loss of -32 dB; the -20-dB pulsed length was measured to be 150 ns. A phantom made of copper wires (30 μm in diameter) was utilized to investigate the imaging capability of the transducer. The results indicated that the fabricated transducer, with a lateral resolution of 260 μm and a relatively high depolarization temperature, could be considered as a candidate for replacement of lead-based ultrasonic transducers.     

A miniaturized catheter 2-D array for real-time, 3-D intracardiac echocardiography

The design, fabrication, and characterization of a 112 channel, 5 MHz, two-dimensional (2-D) array transducer constructed on a six layer flexible polyimide interconnect circuit is described. The transducer was mounted in a 7 Fr (2.33 mm outside diameter) catheter for use in real-time intracardiac volumetric imaging. Two transducers were constructed: one with a single silver epoxy matching layer and the other without a matching layer. The center frequency and -6 dB fractional bandwidth of the transducer with a matching layer were 4.9 MHz and 31%, respectively. The 50 omega pitch-catch insertion loss was 80 dB, and the typical interelement crosstalk was -30 dB. The final element yield was greater than 97% for both transducers. The transducers were used to acquire real-time, 3-D images in an in vivo sheep model. We present in vivo images of cardiac anatomy obtained from within the coronary sinus, including the left and right atria, aorta, coronary arteries, and pulmonary veins. We also present images showing the manipulation of a separate electrophysiological catheter into the coronary sinus.     

Characterization of the spatial resolution of different high-frequency imaging systems using a novel anechoic-sphere phantom

The spatial resolution of high-frequency ultrasound (HFU, >20 MHz) imaging systems is usually determined using wires perpendicular to the beam. Recently, two tissue-mimicking phantoms (TMPs) were developed to estimate three-dimensional (3-D) resolution. Each TMP consists of nine 1-cm-wide slabs of tissue-mimicking material containing randomly distributed anechoic spheres. All anechoic spheres in one slab have the same dimensions, and their diameter is increased from 0.1 mm in the first slab to 1.09 mm in the last. The scattering background for one set of slabs was fabricated using 3.5-μm glass beads; the second set used 6.4-μm glass beads. The ability of a HFU system to detect these spheres against a speckle background provides a realistic estimation of its 3-D spatial resolution. In the present study, these TMPs were used with HFU systems using single-element transducers, linear arrays, and annular arrays. The TMPs were immersed in water and each slab was scanned using two commercial imaging systems and a custom HFU system based on a 5-element annular array. The annular array had a nominal center frequency of 40 MHz, a focal length of 12 mm, and a total aperture of 6 mm. A synthetic-focusing algorithm was used to form images with an increased depth-of-field. The penetration depth was increased by using a linear-chirp signal spanning 15 to 65 MHz over 4 μs. Results obtained with the custom system were compared with those of the commercial systems (40-MHz probes) in terms of sphere detection, i.e., 3-D spatial resolution, and contrast-to-noise ratio (CNR). Resulting B-mode images indicated that only the linear-array transducer failed to clearly resolve the 0.2-mm spheres, which showed that the 3-D spatial resolution of the single-element and annular-array transducers was superior to that of the linear array. The single-element transducer could only detect these spheres over a narrow 1.5 mm depth-of-field, whereas the annular array was able to detect them to depths of at least 7 mm. For any size of the anechoic spheres, the annular array excited by a chirp-coded signal provided images of the highest contrast, with a maximum CNR of 1.8 at the focus, compared with 1.3 when using impulse excitation and 1.6 with the single-element transducer and linear array. This imaging configuration also provided CNRs above 1.2 over a wide depth range of 8 mm, whereas CNRs would quickly drop below 1 outside the focal zone of the other configurations.     

Bandwidth and resolution enhancement through pulse compression

A novel pulse compression technique is developed that improves the axial resolution of an ultrasonic imaging system and provides a boost in the echo signal-to-noise ratio (eSNR). The new technique, called the resolution enhancement compression (REC) technique, was validated with simulations and experimental measurements. Image quality was examined in terms of three metrics: the eSNR, the bandwidth, and the axial resolution through the modulation transfer function (MTF). Simulations were conducted with a weakly-focused, single-element ultrasound source with a center frequency of 2.25 MHz. Experimental measurements were carried out with a single-element transducer (f/3) with a center frequency of 2.25 MHz from a planar reflector and wire targets. In simulations, axial resolution of the ultrasonic imaging system was almost doubled using the REC technique (0.29 mm) versus conventional pulsing techniques (0.60 mm). The -3 dB pulse/echo bandwidth was more than doubled from 48% to 97%, and maximum range sidelobes were -40 dB. Experimental measurements revealed an improvement in axial resolution using the REC technique (0.31 mm) versus conventional pulsing (0.44 mm). The -3 dB pulse/echo bandwidth was doubled from 56% to 113%, and maximum range sidelobes were observed at -45 dB. In addition, a significant gain in eSNR (9 to 16.2 dB) was achieved.     

Characterization of high-frequency, single-element focused transducers with wire target and hydrophone

In this paper, a wire-target technique was used for lateral beam profile measurements for a single-element, focused transducers in the very high-frequency range (35-60 MHz). Two wire targets made from 9-cm long tungsten wires with diameters of 8 microm and 20 microm were used as the pulse-echo targets to measure the lateral beam profiles at the focal plane of two single-element, focused transducers, a spherically focused 40 MHz transducer and a lens-focused in-house lithium niobate (LiNbO3) 60 MHz transducer. For comparison, measurements on the same transducers were performed by three small-aperture hydrophones with geometrical diameters varying from 37 microm to 150 microm. Tomographic reconstruction of the acoustic field from the spherically focused transducer also was conducted. Results obtained with the wire-target technique are comparable to those obtained with small-aperture hydrophones in characterizing lateral radiation patterns of a single-element, focused transducer in the high-frequency range (35-60 MHz). However, the wire-target method may overestimate pulse length because of the additional attenuation caused by the return path. Compared to small-aperture hydrophones, the wire-target technique is simpler and more cost effective. Its major advantage, however, is in the frequency range above 100 MHz in which commercial hydrophones are not yet available.     

Real-time 3-D ultrasound guidance of interventional devices

We have previously developed 2-D array transducers for many real-time volumetric imaging applications. These applications include transducers operating up to 7 MHz for transthoracic imaging, up to 15 MHz for intracardiac echocardiography (ICE), 5 MHz for transesophageal echocardiography (TEE) and intracranial imaging, and 7 MHz for laparoscopic ultrasound imaging (LUS). Now we have developed a new generation of miniature ring-array transducers integrated into the catheter deployment kits of interventional devices to enable real-time 3-D ultrasound scanning for improved guidance of minimally invasive procedures. We have constructed 3 new ring transducers. The first consists of 54 elements operating at 5 MHz. Typical measured transducer element bandwidth was 25%, and the 50 Ohm round trip insertion loss was -65 dB. Average nearest neighbor cross talk was -23.8 dB. The second is a prototype 108-element transducer operating at 5 MHz. The third is a prototype 108-element ring array with a transducer center frequency of 8.9 MHz and a -6 dB bandwidth of 25%. All transducers were integrated with an 8.5 French catheter sheath of a Cook Medical, Inc. vena cava filter deployment device.     

High-frequency transducers based on integrated piezoelectric thick films for medical imaging

A screen-printed PZT thick film with a final thickness of about 40 microm was deposited on a porous PZT substrate to obtain an integrated structure for ultrasonic transducer applications. This process makes it possible to decrease the number of steps in the fabrication of high-frequency, single-element transducers. The porous PZT substrates allow high acoustic impedance and attenuation to be obtained, satisfying transducer backing requirements for medical imaging. The piezoelectric thick films deliver high electromechanical performance, comparable to that of standard bulk ceramics (thickness coupling factor over 45%). Based on these structures, high-frequency transducers with a center frequency of about 25 MHz were produced and characterized. As a result, good sensitivity and axial resolution were obtained in comparison with similar transducers integrating a lead titanate (PT) disk as active material. The two transducers were integrated into a high-frequency imaging system, and comparative skin images are shown.     

Pre-focused lead titanate > 25 MHz single-element transducers from hollow spheres

Miniature lead titanate (PT) hollow spheres with diameters in the 1 to 10 mm range and wall thicknesses of 20 to 120 μm have been fabricated. Shell sections were used as components of pre-focused transducers. Spheres are produced using a new sacrificial core technique that produces hundreds of spheres with a more uniform wall thickness than those produced by earlier methods. Shells produced from these spheres were found to have a wall thickness variation of about 10%. Despite this variation, bulk properties were estimated from capacitance and impedance data. Shells tested in this work had dielectric constants (1 kHz) near 280 with loss factor of <2% and d₃₃ values of 68 pC/N. Thickness coupling coefficients averaged 0.51 with mechanical quality factors of <15. A transducer fabricated from these sections of spheres had a round-trip insertion loss of -20.1 dB at the center frequency of 39.8 MHz and a 6 dB bandwidth of 33%     

High-frequency ultrasonic transducer fabricated with lead-free piezoelectric single crystal

High-frequency (25 MHz) ultrasonic transducers with Na(0.5)Bi(0.5)TiO(3)-BaTiO(3) (NBT-BT) lead-free piezoelectric single crystal as the active elements are fabricated and characterized. The impedance measurement reveals that the poled [001]-oriented NBT-BT single crystal exhibits a high thickness electromechanical coefficient k(t) of 0.52 and a low clamped dielectric constant of 80. The -6-dB bandwidth of the transducer is 46.16% and the insertion loss at the center frequency is -31.89 dB. The good performance of the transducer indicates that the NBT-BT single crystal would be a promising lead-free material for ultrasonic transducer applications.     

Fabrication of high frequency spherically shaped ceramictransducers

Difficulty in obtaining well focused efficient ultrasound transducers has limited the development of new high frequency applications of B-mode imaging. This paper describes a method for fabricating high frequency (53 MHz) spherically focused lead zirconate titanate (PZT) transducers. A transducer is fabricated by bonding a malleable backing layer onto a thin plate of PZT and then pressing the plate into a spherically shaped well. The backing layer evenly distributes stresses across the material when it is pressed into the well. Local concentrations of stress which lead to fracture are avoided and the material can be deformed without macroscopic cracking. The characteristics of a 2 mm diameter 53 MHz PZT transducer with a 4 mm focal length are described. A lateral beam width of 68 μm and a 12 dB depth of field of 1.5 mm were obtained. The minimum two-way insertion loss of the system was -25 dB and the 6 dB bandwidth of the pulse echo response was 30%. An image of a resolution phantom and an in vivo skin image illustrate the excellent imaging characteristics of the transducer     

Single element high frequency (<50 MHz) PZT sol gel composite ultrasound transducers

A sol gel composite process has been used to produce lead zirconate titanate coatings in the thickness range of 3 to 100 mum on aluminum substrates. The complex permittivity (epsilon(33)(S )), elastic stiffness (c(33)(D)), and the piezoelectric constant (h(33)) of the coating and the complex elastic stiffness (c(33)(D)) of the substrate have been determined using impedance measurements and a commercially available software program [Piezoelectric Resonance Analysis Program PRAP 2.0, TASI Technical Software, Kingston, Ontario, Canada]. The complex components of the material parameters account for the losses within the film and the substrate. Sol gel composite films on aluminum have a dielectric constant of 220 with an imaginary component of 1% and an electromechanical coupling coefficient of up to 0.24 with an imaginary component of 3%. These films are applied to the fabrication of a high frequency transducers suitable for ultrasound biomicroscopy (UBM). By combining the sol gel composite material with existing transducer fabrication techniques, single-element focusing transducers have been produced that operate in the frequency range of 70 to 160 MHz. Devices have -6-dB bandwidths up to 52% and minimum insertion losses ranging from -47 to -58 dB. Real-time images of phantom materials and ex vivo biological samples are shown.     

Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

Backscattering measurement from a single microdroplet

Backscattering measurements for acoustically trapped lipid droplets were undertaken by employing a P[VDF-TrFE] broadband transducer of f-number = 1, with a bandwidth of 112%. The wide bandwidth allowed the transmission of the 45 MHz trapping signal and the 15 MHz sensing signal using the same transducer. Tone bursts at 45 MHz were first transmitted by the transducer to hold a single droplet at the focus (or the center of the trap) and separate it from its neighboring droplets by translating the transducer perpendicularly to the beam axis. Subsequently, 15 MHz probing pulses were sent to the trapped droplet and the backscattered RF echo signal received by the same transducer. The measured beam width at 15 MHz was measured to be 120 μ m. The integrated backscatter (IB) coefficient of an individual droplet was determined within the 6-dB bandwidth of the transmit pulse by normalizing the power spectrum of the RF signal to the reference spectrum obtained from a flat reflector. The mean IB coefficient for droplets with a 64 μ m average diameter (denoted as cluster A) was -107 dB, whereas it was -93 dB for 90-μm droplets (cluster B). The standard deviation was 0.9 dB for each cluster. The experimental values were then compared with those computed with the T-matrix method and a good agreement was found: the difference was as small as 1 dB for both clusters. These results suggest that this approach might be useful as a means for measuring ultrasonic backscattering from a single microparticle, and illustrate the potential of acoustic sensing for cell sorting.     

Focused high frequency needle transducer for ultrasonic imaging and trapping

A miniature focused needle transducer (<1?mm) was fabricated using the press-focusing technique. The measured pulse-echo waveform showed the transducer had center frequency of 57.5 MHz with 54% bandwidth and 14?dB insertion loss. To evaluate the performance of this type of transducer, invitro ultrasonic biomicroscopy imaging on the rabbit eye was obtained. Moreover, a single beam acoustic trapping experiment was performed using this transducer. Trapping of targeted particle size smaller than the ultrasonic wavelength was observed. Potential applications of these devices include minimally invasive measurements of retinal blood flow and single beam acoustic trapping of microparticles.     

Forward-viewing CMUT arrays for medical imaging

This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for 1-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.     

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

Micromachining techniques, in combination with low temperature ceramic composite sol-gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUTs). The processing techniques of low temperature (710 degrees C) composite sol-gel ceramic (sol + ceramic powder) deposition and wet etching were used to deposit and structure 27-microm thick lead zirconate titanate (PZT) films on silicon substrates to produce annular array Tm-pMUTs. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT devices were shown to resonate at approximately 60 MHz in air and 50 MHz in water. From resonance measurements k(t) values ranging between 0.2 and 0.47 have been calculated and shown to depend on the level of porosity within the film. Lower values of kt were observed for films with higher levels of porosity, which was attributed to the relative decrease in the effective piezoelectric coefficient epsilon(33) with respect to stiffness and permittivity as a function of increasing porosity. This paper presents the successful micro-fabrication of a Tm-pMUT device and discusses the optimization of the poling conditions and effect of PZT microstructure on the coupling coefficient k(t). Pulse echo measurements in water, showing a -6 dB center frequency of 53 MHz and 47% -6 dB bandwidth, using a target 15 mm away from the transducer, have been included to demonstrate successful operation of the device. Full analysis of these results will be conducted in later publications.     

Binary code design for high-frequency ultrasound

This paper proposes an approach to designing binary codes suitable for high-frequency applications of coded excitation in medical ultrasound. For a high-frequency ultrasound system, transmitting well-designed binary codes with a low sampling ratio (i.e., the bit rate divided by the transducer center frequency) is a practical way to improve the signal-to-noise ratio (SNR) because the challenge of implementing arbitrary-waveform generators for transmitting nonbinary codes increases with the frequency and the switching speed of square-wave pulsers are limited. One conventional approach designs codes using a base sequence that modulates wideband sequences up to the transducer passband. Because a major portion of codes is excluded as a candidate, codes designed using this approach typically need long compression filters for restoring the axial resolution, and they do not improve the SNR efficiently. In contrast, the approach proposed here searches all the codes that match the transducer passband; hence, the resultant codes exhibit better performance. The technique was tested using a bit rate of 50 MHz and a sampling ratio of 2. For a transducer with an ideal Gaussian frequency response with a center frequency of 25 MHz and a -6 dB bandwidth of 15 MHz, the SNR for the same side-lobe extent was 1 to 6 dB higher for the codes designed using the proposed approach compared with those designed using the conventional approach. When a real transducer response with a center frequency of 26.4 MHz and a one-way -6 dB bandwidth of 20.7 MHz was considered, the codes designed using the proposed approach were superior by 0.5 to 5 dB. Therefore, our approach is better than the conventional approach for designing binary codes for high-frequency ultrasound, with the results indicating that the moderate bit rate of 50 MHz will suffice when the ultrasonic center frequency is 25 MHz.     

Design, fabrication, and evaluation of high frequency, single-element transducers incorporating different materials

The performance of high frequency, single-element transducers depends greatly on the mechanical and electrical properties of the piezoelectric materials used. This study compares the design and performance of transducers incorporating different materials. The materials investigated include 1-3 lead zirconate titanate (PZT) fiber composite, lead titanate (PbTiO₃) ceramic, poly(vinylidene fluoride) (PVDF) film, and lithium niobate (LiNbO₃) single crystal. All transducers were constructed with a 3-mm aperture size and an f-number between 2 and 3. Backing and matching materials were selected based on design goals and fabrication limitations. A simplified coaxial cable tuning method was employed to match the transducer impedance to 50 Ω for the PZT fiber composite and PbTiO₃ ceramic transducers. Transducers were tested for two-way loss and -6 dB bandwidth using the pulse/echo response from a flat quartz target. Two-way loss varied from 21 to 46 dB, and bandwidths measured were in the range from 47 to 118%. In vitro ultrasonic backscatter microscope (UBM) images of an excised human eye were obtained for each device and used to compare imaging performance. Both press-focusing and application of a lens proved to be useful beam focusing methods for high frequency. Under equal gain schemes, the LiNbO ₃ and PbTiO₃ transducers provided better image contrast than the other materials