TiO_(2-x)N_x薄膜托槽的摩擦性能研究

通过射频磁控溅射法,在不锈钢金属托槽表面制备了不同厚度的TiO2-xNx薄膜。薄膜的晶体结构,表面形貌和表面粗糙度分别通过X射线衍射、扫描电子显微镜和2206型表面粗糙度测量仪分析。通过14FW往复摩擦磨损测试仪考察薄膜托槽体外摩擦性能。结果显示,所制备的纳米TiO2-xNx薄膜为锐钛矿型,结构均匀致密。不同厚度的TiO2-xNx薄膜托槽的动、静摩擦系数不论干燥或湿润条件下均小于对照组。在同一湿性环境下,随薄膜厚度增加TiO2-x Nx薄膜托槽摩擦系数呈递减趋势。TiO2-xNx薄膜托槽表现出了良好的低摩擦性能。     

金属托槽表面TiO2-xNx薄膜的生物摩擦磨损性能研究

考察金属托槽表面掺氮TiO2-xNx薄膜的生物摩擦磨损性能。采用射频磁控溅射法在不锈钢金属托槽原材料表面制备掺氮TiO2-xNx薄膜,通过扫描电子显微镜(SEM)和X射线衍射(XRD)技术分析薄膜微观结构,利用UMT-2MT型摩擦磨损试验机考察薄膜的体外生物摩擦磨损性能。结果表明所制备的掺氮TiO2-xNx薄膜为锐钛矿结构,纳米量级,薄膜均匀致密;在干摩擦及人工唾液和Hank’s溶液的润滑条件下,掺氮TiO2-xNx薄膜均表现出良好的抗磨损低摩擦性能。     

掺氮TiO_(2-x)N_x薄膜托槽的细胞相容性研究

采用射频磁控溅射法在普通MBT直丝弓金属托槽表面制备了锐钛矿相掺氮TiO2-xNx薄膜,通过MTT比色法、细胞形态学观察、扫描电镜及荧光染色法评价薄膜托槽的细胞学性能。结果表明,掺氮TiO2-xNx薄膜托槽的细胞毒性为0级,与对照组相比,薄膜托槽组细胞的相对增殖率差异无统计学意义(P0.05);扫描电镜图像显示细胞在薄膜托槽表面贴壁生长良好;荧光显微镜观察显示粘附在材料表面的细胞其细胞核呈亮黄绿色荧光,细胞质呈绿色荧光,细胞生长良好。由此证明掺氮TiO2-xNx薄膜托槽具有良好的细胞相容性。     

纳米TiO2薄膜表面形貌与光致双亲性能的研究

采用溶胶-凝胶法,利用旋涂技术在玻璃表面制备了纳米TiO2薄膜.用X射线衍射仪(XRD)分析薄膜组成结构;用原子力显微镜(AFM)对薄膜表面形貌、粗糙度进行表征;以去离子水和苯作为水和油模型,研究了TiO2薄膜光致双亲的机理和表面薄膜粗糙度与双亲性的关系.结果表明:在550℃时,晶体生长得较完整,薄膜中的TiO2以锐钛矿形式存在,TiO2粒子的平均直径为26.2nm;双亲性跟表面粗糙度有关,粗糙度越大薄膜的双亲性能越好.     

ITO/TiO2-xNx/NiO复合电极制备及其光电化学性能

以三乙胺为氮源,钛酸丁酯为钛源,采用溶胶-凝胶法制备氮掺杂TiO2,并用旋涂法制备ITO导电玻璃为基材的氮掺杂TiO2薄膜,经300℃、400℃、500℃处理制得ITO/TiO2-xNx薄膜。采用XRD、XPS、SEM和UV-Vis吸收光谱等对样品进行表征,并进行光电化学性能测定,结果表明500℃处理制得的ITO/TiO2-xNx薄膜具有最佳的光电催化性能。进一步采用化学沉积法在ITO/TiO2-xNx薄膜表面上沉积多孔NiO薄膜,制得ITO/TiO2-xNx/NiO复合薄膜,研究表明该复合薄膜具有很好的光电致色特性及储放电性能,可应用于光电致变色和光电能量储存领域。     

SiO_2预涂层对TiO_2多层膜结构与亲水性能的影响

采取溶胶-凝胶法制备了TiO2与SiO2的前驱溶液。并利用SiO2薄膜固有的多孔特性,在普通载玻片上以SiO2为模板成功制得了具有较大粗糙度以及多孔特性的多层TiO2薄膜,其表面粗糙度亦达到14.7nm;利用热重-差热分析仪(TGA-DSC)对TiO2溶胶进行分析;采用X射线衍射仪(XRD)、扫描探针显微镜(CSPM)和扫描电镜(SEM)对薄膜的结构与形貌进行了表征。并考察了不同层数TiO2薄膜性能的差异,实验结果表明,未预涂SiO2的TiO2膜表面光滑平整,而预涂了SiO2的TiO2表面呈现出均匀的微孔结构。前者在避光6h后完全失去超亲水性;而预涂1层SiO2的TiO2薄膜在经过30h避光处理后,接触角依然小于10°,其中两层TiO2薄膜接触角仅为6.7°,润湿性得到了很好的保持。     

基片温度对TiO2薄膜表面形貌和性能的影响

利用射频磁控溅射设备在玻璃基片上制备TiO2薄膜,采用AFM、UV-Vis分光光度、接触角测定仪等测试手段,研究基片温度对薄膜表面形貌、粗糙度和表面性能的影响.结果表明,随着基片温度增加,薄膜表面粗糙度增大,薄膜中颗粒由无定形态逐渐向定向排列的晶态转变,而薄膜结构、表面形貌和粗糙度的变化明显影响薄膜表面性能.最后,探讨了薄膜的生长机理.     

AP-CVD法制备的二氧化钛薄膜结构及亲水性研究

基于实现在线镀膜的目的,研究了以TiCl4为钛源,用AP-CVD法在玻璃基板上制备TiO2薄膜的工艺.利用扫描电子显微(SEM)技术和X射线衍射(XRD)技术,研究了不同基板反应温度下薄膜的表面形貌和晶体结构,分析了表面形貌和结构对亲水性的影响.结果表明通过改变反应温度可以控制锐钛矿和金红石的相对量,薄膜的亲水性和表面形貌、粗糙度有密切的关系.     

微等离子体氧化法TiO2、TiO2(W)薄膜的制备及性能

利用微等离子体氧化方法,在纯Ti金属表面制备TiO2、TiO2(W)薄膜,并用X射线衍射(XRD)、扫描电镜(SEM)初步研究了薄膜的组织结构和表面形貌.在不同的条件下,得到3种不同类型结构组成的薄膜单一TiO2的锐钛型结构、单一TiO2金红石结构及TiO2(W)薄膜;同时对薄膜的催化特性进行了初步的研究.     

微等离子体氧化法TiO2、TiO2(W)薄膜的制备及性能

利用微等离子体氧化方法,在纯Ti金属表面制备TiO2、TiO2(W)薄膜,并用X射线衍射(XRD)、扫描电镜(SEM)初步研究了薄膜的组织结构和表面形貌.在不同的条件下,得到3种不同类型结构组成的薄膜:单一TiO2的锐钛型结构、单一TiO2金红石结构及TiO2(W)薄膜;同时对薄膜的催化特性进行了初步的研究.     

柱状晶形貌TiO2膜厚对FTO/TiO2镀膜玻璃光催化活性影响

采用溶胶凝胶法,在FTO(SnO2:F)低辐射镀膜玻璃衬底上制备了柱状晶体结构的TiO2薄膜,获得双层结构FTO/TiO2镀膜玻璃样品.研究了TiO2薄膜厚度对FTO/TiO2镀膜玻璃样品的光催化活性、低辐射性能以及透光性能的影响.结果表明,FTO/TiO2镀膜玻璃样品光催化活性随着TiO2薄膜厚度的增加先升高后下降,在TiO2薄膜厚度为300 nm时光催化活性最佳;低辐射性能随着TiO2薄膜厚度的增加而下降,但TiO2薄膜厚度为300 nm时仍然具备一定的低辐射性能;透光性能与TiO2薄膜膜厚的关系不大,可见光透射比保持在72%左右;表面平均粗糙度约为1 nm,表面光滑,不易沾染油污灰尘.该镀膜玻璃在保证低辐射建筑节能和透光的前提下,兼具光催化自清洁功能,具有很好的应用前景.     

Controlling the crystallinity and roughness of atomic layer deposited titanium dioxide films

The surface roughness of thin films is an important parameter related to the sticking behaviour of surfaces in the manufacturing of microelectomechanical systems (MEMS). In this work, TiO2 films made by atomic layer deposition (ALD) with the TiCl4-H2O process were characterized for their growth, roughness and crystallinity as function of deposition temperature (110-300 degrees C), film thickness (up to approximately 100 nm) and substrate (thermal SiO2, RCA-cleaned Si, Al2O3). TiO2 films got rougher with increasing film thickness and to some extent with increasing deposition temperature. The substrate drastically influenced the crystallization behaviour of the film: for films of about 20 nm thickness, on thermal SiO2 and RCA-cleaned Si, anatase TiO2 crystal diameter was about 40 nm, while on Al2O3 surface the diameter was about a micrometer. The roughness could be controlled from 0.2 nm up to several nanometers, which makes the TiO2 films candidates for adhesion engineering in MEMS.     

316L不锈钢和NiTi合金微磁场表面粗糙度对血液相容性的影响

在316L不锈钢、NiTi合金的含SrFe12O19磁性粉末的TiO2薄膜表面用溶胶-凝胶法再涂覆不同层数的TiO2薄膜,以降低材料微磁场表面的微粗糙度,并用扫描电镜、粗糙度仪分析薄膜的表面粗糙度.测试了不同粗糙度的微磁场表面的动态凝血时间和溶血率,研究了微磁场表面的粗糙度对材料血液相容性的影响.结果表明,粗糙度小的微磁场表面的血液相容性比粗糙度大的微磁场表面的血液相容性好.即对于平整光滑的微磁场表面,可以利用微磁场提高材料血液相容性的同时,进一步改善材料的血液相容性.     

Adhesion and vacuum forming properties of tin-zinc thin films deposited on polyester film substrate

Sn-Zn alloy thin films were deposited on a polyester (PET) film substrate by co-evaporation and evaluated their surface, tensile and adhesion properties with a vacuum forming test and pull test.Relationship between the surface roughness and elemental composition of these thin films was evaluated. The surface roughness decreased with increase of the Sn content.The tensile property was estimated by observations of micro-cracks of the thin films due to a vacuum forming test. Sn-Zn alloy thin film, whose elemental composition is 85:15 (wt%), had high vacuum forming durability.The adhesion strength between the Sn-Zn alloy thin films and PET substrate was measured with a pull test apparatus. The pull strength decreased with increase of the Sn content.     

Characterization of Sol-gel-derived TiO2 and TiO2-SiO2 Films for Biomedical Applications

In order to improve the corrosion resistance and biocompatibility of NiTi surgical alloy, TiO2 and TiO2-SiO2 thin films were prepared by sol-gel method. The surface characteristics of the film, which include surface composition, microstructure and surface morphology, were studied by X-ray diffraction (XRD), atomic force microscopy (AFM) and X-ray photoelectron spectra (XPS), respectively. A scratching test was used to assess the interface adhesive strength between the film and substrate. The corrosion resistance of NiTi alloy coated with oxide films were studied by anodic polarization curves measurement in biological solution. Additionally, a preliminary study of the in vitro bioactivity of the films was conducted. The results indicated that TiO2 and TiO2-SiO2 (Ti/Si=4:1) films have higher electrochemical corrosion resistance and can be used as protective layers on NiTi alloy. In addition, TiO2-SiO2 composite films have better bioactivity than TiO2 film.     

微波等离子体刻蚀处理对金刚石薄膜涂层刀具附着力和切削性能的影响

用HFCVD法在硬质合金（YG6）刀具衬底上沉积金刚石薄膜,用氢微波等离子体刻蚀的方法对衬底进行表面预处理,研究了该预处理技术对WC硬质合金衬底表面成分的影响,进一步探讨了所沉积金刚石薄膜的表面形貌和附着力,并通过难加工材料实际切削试验。研究了所制备的金刚石薄膜涂层刀具的切削性能。试验结果表明,Ar-H2微波等离子体刻蚀脱碳处理是提高金刚石薄膜附着力和改善涂层刀具切削性能的有效预处理方法。     

Improvement of Optical Reactivity for Nano-TiO2 Film by Nitrogen ECR Plasma

Nitrogen ion was implanted into the nano-TiO2 film surfaces by electron cyclotron resonance （ECR） plasma modification to improve the optical reactivity in visible-light region for nano-TiO2. Diagnosing the N2 plasma by optical emission spectroscopy （OES） was applied to the process of plasma modification. X-ray photoelectron spectroscopy （XPS） was used for analysis of the binding of element after plasma modification. It is shown that the surface modification was caused by excitated N. The injecting of N2 and N＋ leads to the increase in the dissociative interstitial state N in the films. The doped N makes for TiO2-xNx appearing in the TiO2 films. TiO2-xNx forms the impurity energy state in the TiO2 energy band gap and reduces the energy band gap. This is the main reason leading to the red shift of absorption edge.     

Surface modification of implant materials and its effect on attachment and proliferation of bone cells

Osteoblast-like cell response in variation with the air plasma sprayed (APS) TiO2 coating process parameters correlated with coating properties were investigated to evaluate the durability and biocompatibility of the surface-modified implant. The Taguchi technique was used to determine the coating properties affected by plasma spraying parameters on Ti-6AI-4V alloy substrate. The coating properties were characterized by porosity and surface roughness using an image analyzer and surf analyzer, respectively. The MG-63 osteoblast like cell morphology and proliferation data on TiO2 coated substrate were measured by SEM observation and direct cell counting. It was demonstrated that surface roughness increased as spray distance decreased but gas flow rates and spray distance were major factors in the case of porosity. The osteoblast adhesion morphology and proliferation data indicated that osteoblast-like cell morphology was not influenced by process parameters, but cell proliferation was affected to some extent by surface roughness and porosity among TiO2 coated specimens. Specifically, the difference between those of substrate and coating layer was relatively more visible.     

BST/BZT/BST多层薄膜结构与性能研究

利用脉冲激光沉积法在LaNiO3/LaAlO3(001)基片上生长了Ba0.6Sr0.4TiO3(BST)和Ba(Zr0.2Ti0.8)O3(BZT)单层薄膜,以及Ba(Zr0.2Ti0.8)O3/Ba0.6Sr0.4TiO3/Ba(Zr0.2Ti0.8)O3(BZT/BST/BZT)多层薄膜.X射线衍射(XRD)分析发现,BST、BZT和LNO薄膜都具有高度的(00l)取向.原子力显微镜(AFM)显示三种样品表面光滑无裂纹,晶粒尺寸和表面粗糙度相当.电容测试表明,相对BST、BZT单层薄膜,多层薄膜具有最大的品质因数42.07.表明多层薄膜在微波应用中具有很大的潜力.