Characterization of a broadband all-optical ultrasound transducer-from optical and acoustical properties to imaging

A broadband all-optical ultrasound transducer has been designed, fabricated, and evaluated for high- frequency ultrasound imaging. The device consists of a 2-D gold nanostructure imprinted on top of a glass substrate, followed by a 3 microm PDMS layer and a 30 nm gold layer. A laser pulse at the resonance wavelength of the gold nanostructure is focused onto the surface for ultrasound generation, while the gold nanostructure, together with the 30 nm thick gold layer and the PDMS layer in between, forms an etalon for ultrasound detection, which uses a CW laser at a wavelength far from resonance as the probing beam. The center frequency of a pulse-echo signal recorded in the far field of the transducer is 40 MHz with -6 dB bandwidth of 57 MHz. The signal to noise ratio (SNR) from a 70 microm diameter transmit element combined with a 20 microm diameter receive element probing a near perfect reflector positioned 1.5 mm from the transducer surface is more than 10 dB and has the potential to be improved by at least another 40 dB. A high-frequency ultrasound array has been emulated using multiple measurements from the transducer while mechanically scanning an imaging target. Characterization of the device's optical and acoustical properties, as well as preliminary imaging results, strongly suggest that all-optical ultrasound transducers can be used to build high-frequency arrays for real-time high-resolution ultrasound imaging.     

A single-element transducer with nonuniform thickness for high-frequency broadband applications

The design, fabrication, and evaluation of a high-frequency single-element transducer are described. The transducer has an annular geometry, with the thickness of the piezoelectric material increasing from the center to the outside. This single-element annular transducer (SEAT) can provide a broader frequency range than a conventional single-element transducer with a uniform thickness (single-element uniform transducer, or SEUT). We compared the characteristics of a SEAT and a SEUT. Both transducers used 36deg-rotated, Y-cut lithium niobate (LiNbO₃) material. The SEAT had a diameter of 6 mm and comprised 6 subelements of equal area (electrically connected by a single electrode on each side) whose thickness ranged from 60 mum (center) to 110 mum (outside), which resulted in the center frequency of the subelements varying from 59.8 MHz to 25 MHz. The overall center frequency was 42.4 MHz. The annular pattern was constructed using an ultrasonic sculpturing machine that reduced the root-mean-square value of the surface roughness to 454.47 nm. The bandwidth of the SEAT was 19% larger than that of the SEUT. However, compared with the SEUT, the 2-way insertion loss of the SEAT was increased by 3.1 dB. The acoustic beam pattern of the SEAT was also evaluated numerically by finite-element simulations and experimentally by an ultrasound beam analyzer. At the focus (10.5 mm from the transducer surface), the -6 dB beam width was 108 mum. There was reasonable agreement between the data from simulations and experiments. The SEAT can be used for imaging applications that require a wider transducer bandwidth, such as harmonic imaging, and can be manufactured using the same techniques used to produce transducers with multiple frequency bands.     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers

Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, the authors have proposed the use of multi-layer 1-3 PZT/epoxy composites to increase both but have encountered significant fabrication challenges. These difficulties include making the bond thickness between the layers extremely small relative to the ultrasound wavelength and aligning the posts of the composite to increase the coupling coefficient. The authors have routinely achieved a bond thickness of less than 5 mum but aligning the posts is more complicated. Finite element (PZFlex; Weidlinger, Assoc., New York, NY and Los Altos, CA) simulations show that the pulse-echo SNR and bandwidth degrade significantly with misalignment of the posts. Alignment of greater than 90% of the post pitch (i.e., tolerance of 10 to 20 mum) is required to obtain significant increases in SNR and bandwidth relative to conventional transducer arrays. This will be a difficult tolerance for large-scale production. Thus, the authors have developed a multi-layer composite hybrid array that will not require post alignment. This structure consists of a layer of 5 MHz 1-3 composite material on top of conventional 5 MHz PZT, which will provide greater SNR relative to conventional composites and increased bandwidth over multi-layer PZT. PZFlex simulations show that for a 2 MHz linear array element, the 2 layer hybrid structure increases the pulse-echo SNR by 7.5 dB over that from a single layer PZT element. Even without a matching layer, an increase in the -6 dB pulse-echo fractional bandwidth from 22% for the PZT element to 35% for the hybrid element was also predicted. Experimentally, in a 32 element array, the authors achieved an increase of 5.2 dB in SNR and an increased -6 dB bandwidth from 23 to 30%. In vitro and in vivo images showed corresponding improvements.     

3-D ultrasound imaging using a forward-looking CMUT ring array for intravascular/intracardiac applications

Forward-viewing ring arrays can enable new applications in intravascular and intracardiac ultrasound. This work presents compelling, full-synthetic, phased-array volumetric images from a forward-viewing capacitive micromachined ultrasonic transducer (CMUT) ring array wire bonded to a custom integrated circuit front end. The CMUT ring array has a diameter of 2 mm and 64 elements each 100 microm x 100 microm in size. In conventional mode, echo signals received from a plane reflector at 5 mm had 70% fractional bandwidth around a center frequency of 8.3 MHz. In collapse mode, 69% fractional bandwidth is measured around 19 MHz. Measured signal-to-noise ratio (SNR) of the echo averaged 16 times was 29 dB for conventional operation and 35 dB for collapse mode. B-scans were generated of a target consisting of steel wires 0.3 mm in diameter to determine resolution performance. The 6 dB axial and lateral resolutions for the B-scan of the wire target are 189 microm and 0.112 radians for 8 MHz, and 78 microm and 0.051 radians for 19 MHz. A reduced firing set suitable for real-time, intravascular applications was generated and shown to produce acceptable images. Rendered three-dimensional (3-D) images of a Palmaz-Schatz stent also are shown, demonstrating that the imaging quality is sufficient for practical applications.     

Bandwidth and resolution enhancement through pulse compression

A novel pulse compression technique is developed that improves the axial resolution of an ultrasonic imaging system and provides a boost in the echo signal-to-noise ratio (eSNR). The new technique, called the resolution enhancement compression (REC) technique, was validated with simulations and experimental measurements. Image quality was examined in terms of three metrics: the eSNR, the bandwidth, and the axial resolution through the modulation transfer function (MTF). Simulations were conducted with a weakly-focused, single-element ultrasound source with a center frequency of 2.25 MHz. Experimental measurements were carried out with a single-element transducer (f/3) with a center frequency of 2.25 MHz from a planar reflector and wire targets. In simulations, axial resolution of the ultrasonic imaging system was almost doubled using the REC technique (0.29 mm) versus conventional pulsing techniques (0.60 mm). The -3 dB pulse/echo bandwidth was more than doubled from 48% to 97%, and maximum range sidelobes were -40 dB. Experimental measurements revealed an improvement in axial resolution using the REC technique (0.31 mm) versus conventional pulsing (0.44 mm). The -3 dB pulse/echo bandwidth was doubled from 56% to 113%, and maximum range sidelobes were observed at -45 dB. In addition, a significant gain in eSNR (9 to 16.2 dB) was achieved.     

A multi-IDT input tunable surface acoustic wave filter

Tunable surface acoustic wave (SAW) filters (TSF) have been widely used in the wireless telecommunication systems. A prototype of multi-IDT (interdigital transducer) input TSF has been developed. The device consists of 11 IDTs paralleled in the SAW propagation path. Different SAW filter configurations are realized by selecting or combining various IDTs, resulting in the tunability of both center frequency and 3 dB bandwidth. The center frequencies of the SAW filter range from 126.8 to 199.1 MHz; the 3 dB bandwidths range from 15.2 to 58.9 MHz. Impedance weighting methods have been applied. The passband ripple has been reduced from 6.44 to 1.37 dB after resistance weighting     

Design and fabrication of PZN-7%PT single crystal high frequency angled needle ultrasound transducers

A high-frequency angled needle ultrasound transducer with an aperture size of 0.4 x 0.56 mm2 was fabricated using a lead zinc niobate-lead titanate (PZN- 7%PT) single crystal as the active piezoelectric material. The single crystal was bonded to a conductive silver particle matching layer and a conductive epoxy backing material through direct contact curing. A parylene outer matching layer was formed by vapor deposition. Angled needle probe configuration was achieved by dicing at 45 degrees to the single crystal poling direction to satisfy a clinical request for blood flow measurement in the posterior portion of the eye. The electrical impedance magnitude and phase of the transducer were 42 Omega and -63 degrees , respectively. The measured center frequency and the fractional bandwidth at -6 dB were 43 MHz and 45%, respectively. The two-way insertion loss was approximately 17 dB. Wire phantom imaging using fabricated PZN-7%PT single crystal transducers was obtained and spatial resolutions were assessed.     

Improvements in optical generation of high-frequency ultrasound

The thermoelastic effect in a black polydimethylsiloxane (PDMS) film is used to produce high-frequency, high-intensity ultrasound for applications in water and soft tissue. We show that the optoacoustic transduction efficiency is improved by about 10 dB by decreasing the thickness of the black PDMS film from 25 microm to 11 microm. The center frequency of the generated ultrasound is 60 MHz, with a -6 dB bandwidth of 80%. When a 5 ns laser pulse with energy of 50 microJ is delivered to a spot size of 25 microm, the acoustic pressure 10 mm away from the film surface is about 800 kPa. Furthermore, we demonstrate that the center frequency and bandwidth of the generated ultrasound is mainly determined by the temporal profile of the input optical pulse, and it has the potential to be easily improved to above 100 MHz.     

Design of efficient, broadband single-element (20-80 MHz) ultrasonic transducers for medical imaging applications

This paper discusses the design, fabrication, and testing of sensitive broadband lithium niobate (LiNbO/sub 3/) single-element ultrasonic transducers in the 20-80 MHz frequency range. Transducers of varying dimensions were built for an f# range of 2.0-3.1. The desired focal depths were achieved by either casting an acoustic lens on the transducer face or press-focusing the piezoelectric into a spherical curvature. For designs that required electrical impedance matching, a low impedance transmission line coaxial cable was used. All transducers were tested in a pulse-echo arrangement, whereby the center frequency, bandwidth, insertion loss, and focal depth were measured. Several transducers were fabricated with center frequencies in the 20-80 MHz range with the measured -6 dB bandwidths and two-way insertion loss values ranging from 57 to 74% and 9.6 to 21.3 dB, respectively. Both transducer focusing techniques proved successful in producing highly sensitive, high-frequency, single-element, ultrasonic-imaging transducers. In vivo and in vitro ultrasonic backscatter microscope (UBM) images of human eyes were obtained with the 50 MHz transducers. The high sensitivity of these devices could possibly allow for an increase in depth of penetration, higher image signal-to-noise ratio (SNR), and improved image contrast at high frequencies when compared to previously reported results.     

PMN-PT single crystal, high-frequency ultrasonic needle transducers for pulsed-wave Doppler application

High-frequency needle ultrasound transducers with an aperture size of 0.4 mm were fabricated using lead magnesium niobate-lead titanate (PMN-33% PT) as the active piezoelectric material. The active element was bonded to a conductive silver particle matching layer and a conductive epoxy backing through direct contact curing. An outer matching layer of parylene was formed by vapor deposition. The active element was housed within a polyimide tube and a 20-gauge needle housing. The magnitude and phase of the electrical impedance of the transducer were 47 omega and -38 degrees, respectively. The measured center frequency and -6 dB fractional bandwidth of the PMN-PT needle transducer were 44 MHz and 45%, respectively. The two-way insertion loss was approximately 15 dB. In vivo high-frequency, pulsed-wave Doppler patterns of blood flow in the posterior portion and in vitro ultrasonic backscatter microscope (UBM) images of the rabbit eye were obtained with the 44-MHz needle transducer.     

Characterization of dual-electrode CMUTs: demonstration of improved receive performance and pulse echo operation with dynamic membrane shaping

A 1-D dual-electrode CMUT array for intracardiac echocardiography (ICE) with a center frequency of 8 MHz has been designed, fabricated, and used to demonstrate the potential of dual-electrode CMUTs. Using a dual-electrode CMUT, 9 dB higher receive signal level is obtained over the 6 dB fractional bandwidth as compared with a conventional CMUT with an identical center electrode biased close to its collapse voltage. Because the same device shows a 7.4 dB increase in maximum pressure output, 16.4 dB overall improvement in transduction performance has been achieved as compared with conventional CMUT. A net peak output pressure of 1.6 MPa on the dual-electrode CMUT membrane with tone burst excitation at 12 MHz is also reported. The frequency response of the dual-electrode CMUT is similar to that of a conventional CMUT with the same membrane geometry with about 15% increase in the center frequency. Monostatic operation of dual-electrode CMUTs shows that the high performance of the transducer is applicable in typical pulse-echo imaging mode of operation. With dynamic shaping of the CMUT membrane to optimize the transmit-and-receive modes of operation separately during each pulse-echo cycle, dual-electrode CMUT is a highly competitive alternative to its piezoelectric counterparts.     

Coded ultrasound for blood flow estimation using subband processing

This paper investigates the use of coded excitation for blood flow estimation in medical ultrasound. Traditional autocorrelation estimators use narrow-band excitation signals to provide sufficient signal-to-noise-ratio (SNR) and velocity estimation performance. In this paper, broadband coded signals are used to increase SNR, followed by subband processing. The received broadband signal is filtered using a set of narrow-band filters. Estimating the velocity in each of the bands and averaging the results yields better performance compared with what would be possible when transmitting a narrow-band pulse directly. Also, the spatial resolution of the narrow-band pulse would be too poor for brightness-mode (B-mode) imaging, and additional transmissions would be required to update the B-mode image. For the described approach in the paper, there is no need for additional transmissions, because the excitation signal is broadband and has good spatial resolution after pulse compression. This means that time can be saved by using the same data for B-mode imaging and blood flow estimation. Two different coding schemes are used in this paper, Barker codes and Golay codes. The performance of the codes for velocity estimation is compared with a conventional approach transmitting a narrow-band pulse. The study was carried out using an experimental ultrasound scanner and a commercial linear array 7 MHz transducer. A circulating flow rig was scanned with a beam-to-flow angle of 60 degrees. The flow in the rig was laminar and had a parabolic flow-profile with a peak velocity of 0.09 m/s. The mean relative standard deviation of the velocity estimate using the reference method with an 8-cycle excitation pulse at 7 MHz was 0.544% compared with the peak velocity in the rig. Two Barker codes were tested with a length of 5 and 13 bits, respectively. The corresponding mean relative standard deviations were 0.367% and 0.310%, respectively. For the Golay coded experiment, two 8-bit codes were used, and the mean relative standard deviation was 0.335%.     

Passband widening of transversely coupled resonator filters using the fundamental symmetric and antisymmetric modes

This paper describes a method for widening the passband of transversely coupled resonator filters (TCF) using only the fundamental symmetric and antisymmetric modes. The coupling of modes analysis in the transverse direction is applied to the TCF design to investigate the passband width. As a result, it is found that the passband width can be increased by making the surface acoustic wave (SAW) velocity difference between the interdigital transducer (IDT) region and the resonator gap region smaller. It is proposed that a grating structure be applied to the common ground bar, instead of the uniform metal, to reduce the SAW velocity difference. Using the grating-type common ground bar, filters are fabricated on ST-quartz substrate. The passband of a single filter with a center frequency of 248 MHz is widened up to 410 kHz without any increase of the insertion loss. The effect of the impedance mismatch at the junction of two cascaded devices is investigated. It is shown that the filter performance is improved by reduction of the small parasitic capacitance existing at the cascade point. Experimentally, the capacitance formed between the bus bar of the IDT and the bottom surface of the ceramic package is reduced. The insertion loss is reduced by 0.0 dB, and 3 dB passband is widened by 8 kHz for a filter with a center frequency of 248 MHz. On the basis of these two improvements, cascaded TCFs are fabricated. For a filter with a center frequency of 248 MHz, an insertion loss of 5.5 dB and a 3-dB passband width of 270 kHz are obtained     

SAW filters based on parallel-connected coupled resonator filters with offset frequencies

The concept of coupled resonators is applied to synthesize surface acoustic wave filters. Employing two parallel-connected filter tracks, with a frequency shift imposed between them, a wide passband with low insertion loss together with well-controlled rejections is achieved. The operation of the two-track device is based on the mutual interaction of the individual transfer functions for the pair of tracks. Each track serves to contribute a part of the passband, enabling a wide band. Outside of the passband, the signals passing through the two channels may cancel each other, thus facilitating efficient control over the rejections. However, obtaining rejection stopbands at just the predetermined frequencies requires precise values for the materials parameters and a reliable fabrication process. Prototype devices fabricated with this approach are demonstrated both on quartz and, for the first time, on 42 degrees-LiTaO3. Results for two-track devices having either two or three transducers per track and operating either single-ended or with a balanced output are presented. The devices are designed employing the coupling-of-modes model and transmission-matrix approach, and the separate tracks are optimized simultaneously and independently. The center frequencies are 868 MHz and 1960 MHz. On quartz, a minimum insertion loss of 4 dB and a passband width of 0.23% are achieved at 868 MHz. On 42 degrees-LiTaO3, the corresponding figures of merit are 1.3 dB for minimum insertion loss and 4.1% bandwidth at 1960 MHz. The filters on 42 degrees-LiTaO3 also have remarkably flat passbands.     

Wideband linear power amplifier for high-frequency ultrasonic coded excitation imaging

Linear power amplifiers are critical components in ultrasonic imaging systems that implement chirp-coded excitation. Bench-top commercial power amplifiers are usually used in academic laboratories for high-frequency ultrasound imaging, and the imaging performance depends greatly on these general-purpose instruments. To achieve a wide dynamic range, a power amplifier consisting of two stages is developed for chirp-coded ultrasound imaging applications through the implementation of custom-designed broadband 1:1 transformers and the optimization of feedback circuits. The amplifier has broad bandwidth (5 to 135 MHz), maintaining a linearity up to the 1-dB gain compression point (P1dB) of 41.5 dBm, allowing 16 dBm input power level at 60 MHz. The mean and the maximum values of output third-order intercept points (OIP3) are 51.8 and 53.5 dBm, respectively, between 20 and 110 MHz. With 12 dBm input power, the gain of the amplifier varies between 24 and 29 dB, offering a uniformity which would allow excitation of a 70-MHz single-element transducer with windowed chirp-coded bursts sweeping from 40 to 100 MHz. The performance in high-frequency ultrasound imaging is evaluated with a wire phantom. Echo signal-to-noise ratio (eSNR) of the designed amplifier is 7 dB better than a commercial amplifier, and spatial resolution is maintained.     

Real-time 3-D ultrasound guidance of interventional devices

We have previously developed 2-D array transducers for many real-time volumetric imaging applications. These applications include transducers operating up to 7 MHz for transthoracic imaging, up to 15 MHz for intracardiac echocardiography (ICE), 5 MHz for transesophageal echocardiography (TEE) and intracranial imaging, and 7 MHz for laparoscopic ultrasound imaging (LUS). Now we have developed a new generation of miniature ring-array transducers integrated into the catheter deployment kits of interventional devices to enable real-time 3-D ultrasound scanning for improved guidance of minimally invasive procedures. We have constructed 3 new ring transducers. The first consists of 54 elements operating at 5 MHz. Typical measured transducer element bandwidth was 25%, and the 50 Ohm round trip insertion loss was -65 dB. Average nearest neighbor cross talk was -23.8 dB. The second is a prototype 108-element transducer operating at 5 MHz. The third is a prototype 108-element ring array with a transducer center frequency of 8.9 MHz and a -6 dB bandwidth of 25%. All transducers were integrated with an 8.5 French catheter sheath of a Cook Medical, Inc. vena cava filter deployment device.     

Optimal design of an RSPUDT-based SAW filter with constant group delay

This paper describes the application of resonant single-phase unidirectional transducers (RSPUDTs) to the development of low-loss SAW filters with constant group delay in transition bands as well as in the passband. A low-loss SAW filter with constant group delay was designed and fabricated on a 128 degrees YX-LiNbO3 substrate. Experimental results were in good agreement with the design; the group delay deviation of 20 ns was realized over the range of +/-8 MHz at the center frequency of 512 MHz. The minimum insertion loss and -3 dB bandwidth were 4.3 dB and 8.5 MHz, respectively. The application of this technique is also extended to develop high-performance wideband filters employing quasi-slanted interdigital transducers.     

Forward-viewing CMUT arrays for medical imaging

This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for 1-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.     

Double-resonance SAW filters

A novel surface acoustic wave filter on a leaky-wave substrate is studied. It features a hiccup-type resonance occurring around a distributed gap between two long interdigital transducers. Compared to a classical coupled resonator filter, it enables a relatively narrow passband (1% to 2% of center frequency) with low insertion loss, steep skirts, and improved suppression levels. The structure consists of long transducers having the number of fingers greater than 1/K2 and 1/kappa where K2 is the coupling coefficient of the substrate material and kappa is the reflectivity per wavelength, separated with short transducer sections constituting a distributed gap. A strong, localized resonance is formed in the gap region, in addition to the resonance arising in the long structures-hence, the name double-resonance filter. The substrate studied here is 42 degrees-rotated lithium tantalite. We show experimental results for both single-ended and unbalanced-to-balanced filters at 1.6 GHz, having a minimum insertion loss of 1.07 dB, suppressions of 30 dB, and absolute -3-dB bandwidth of 29 MHz (1.9% of the center frequency). For the balanced device, the amplitude imbalance over the passband ranges from -0.6 dB to 2 dB and the phase imbalance from 1 degrees to 4.5 degrees. Furthermore, we have measured the acoustical power distributions using a scanning laser interferometer, and we compare these results with the profiles simulated using a coupling-of-modes model.     

Arbitrary waveform coded excitation using bipolar square wave pulsers in medical ultrasound

This paper presents a new coded excitation scheme that efficiently synthesizes codes for arbitrary waveforms using a bipolar square wave pulser. In a coded excitation system, pulse compression is performed to restore the axial resolution. In order to maintain low range sidelobes, the system needs to transmit signals that have smooth spectra. However, such a transmitter requires the generation of arbitrary waveforms and, therefore, is more expensive. In other words, a trade-off is necessary between the compression performance and the transmitter cost. Here we propose a method that preserves the low-cost advantage of a bipolar pulser while achieving approximately the same compression performance as an arbitrary waveform generator. The key idea of the proposed method is the conversion of a nonbinary code (i.e., requiring an arbitrary waveform generator) with good compression performance into a binary code (i.e., requiring only a bipolar pulser) by code translation and code tuning. The code translation is implemented by sending the nonbinary code into a virtual one-bit, sigma-delta modulator, and the code tuning involves minimizing the root-mean-square error between the resultant binary code and the original nonbinary code by sequential and iterative tuning while taking the transducer response into account. Tukey-windowed chirps are known to have good compression performance. Such chirps of different durations (16, 20, and 24 micros), all with a taper ratio of 0.15, a center frequency of 2.5 MHz, and an equivalent bandwidth of 1.5 MHz, were converted into binary Tukey-windowed chirps that were compared with pseudochirps (i.e., direct binary approximations of the original chirp) over the same spectral band. The bit rate was 40 MHz. Simulation results show that the use of binary Tukey-windowed chirps can reduce the code duration by 20.6% or the peak sidelobe level by 6 dB compared to the commonly used pseudochirps. Experimental results obtained under the same settings were in agreement with the simulations. Our results demonstrate that arbitrary waveform coded excitation can be realized using bipolar square wave pulsers for applications in medical ultrasound.