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钛酸锶钡(BST)陶瓷材料在外置偏压直流电场作用下,具有高的介电可调性,可以广泛地应用于电可调陶瓷电容器以及无源可调微波器件的设计与开发.通过B-Li玻璃的有效掺杂,实现BST陶瓷材料与Ag、Cu贱金属电极材料的低温友好烧结,是发展混合集成厚膜电路的技术要求.主要采用丝网印刷工艺,在Al2O3陶瓷衬底上,制备了B-Li玻璃掺杂的Ba0.5Sr0.5TiO3厚膜材料,并对其最佳烧结温度、物相结构、显微形貌以及介电性能进行了研究.结果表明,B-Li玻璃掺杂的Ba0.5Sr0.5TiO3厚膜材料在950℃可以实现低温烧结,得到了厚度为20μm的均匀致密厚膜材料;相比于BST陶瓷块体材料,5%(质量分数)B-Li玻璃掺杂BST厚膜的居里峰发生了明显的弥散和宽化,介电常数显著降低;在室温和10kHz频率下,其介电常数为210,介电损耗为0.0037,介电可调性可达15%以上,可以适用于厚膜混合集成电路与可调器件的设计和开发. 相似文献
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采用溶胶.凝胶法制备了掺锆钛酸钡(Ba(Zr0.2Ti0.8)03,简称BZT20)介电陶瓷。通过SEM电镜观察其表面形貌,X射线衍射(XRD)分析其相结构,阻抗分析仪测量BZT陶瓷的介电温谱。结果发现,通过掺锆(Zr含量为20%(摩尔分数)),SEM电镜照片表明制备的BZT20陶瓷粒径约60gm,XRD结果说明掺锆钛酸钡BZT20陶瓷是单一的钙钛矿结构,室温下为三方相结构。锆钛酸钡介电常数温谱没有明显的频率弥散,提高测试频率,温谱的峰值未发生漂移。 相似文献
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以钡、锶和锰醋酸盐为原料,采用新型溶胶-凝胶法制备锰掺杂4%mol、Ba/Sr分别为60/40、65/35和70/30的纳米粉体,均匀分散于组分相同的BST溶胶中,形成稳定的厚膜先体凝胶.浓度0.4mol/L钛酸钡凝胶薄膜种子层,作为不同组分厚膜之间的中间夹层.利用旋转涂覆工艺在LNO/Pt/Ti/SiO2/Si复合底电极上,制备出厚度约为6~10μm的BST介电增强型夹层厚膜.XRD测试结果表明,650℃热处理2h后的夹层厚膜为单一钙钛矿相,750℃热处理后2h的夹层厚膜在室温、环境温度25℃、频率1kHz下相对介电常数εγ和介质损耗tanδ分别约为1200和0.03,室温25℃附近较宽范围介温变化率>1.2%/℃,BST夹层厚膜无裂纹出现,表面平整,致密,是制备大阵列非制冷红外焦平面阵列(UFPA)的优选材料. 相似文献
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研究了A位La^3+替代对Bi2O3-ZnO-Nb2O5(BZN)陶瓷结构和介电性能的影响。当La替代量X〈0.5时,陶瓷相结构为单一的立方焦绿石相。随着La替代量的增加,陶瓷样品的晶粒尺寸和密度逐渐减小。低温下的介电弛豫现象随着La替代量的增加也发生有规律的变化,介电常数逐渐减小,弛豫峰峰形逐渐宽化,峰值温度向低温方向移动。与La替代量为0.1、0.15、0.3和0.5相对应的弛豫峰的峰值温度分别为-95℃、-99℃、-109℃和-112℃。 相似文献
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LaNiO3缓冲层对Pb(Zr,Ti)O3铁电薄膜的影响 总被引:1,自引:0,他引:1
采用化学溶液法在Pt/Ti/SiO2/Si衬底上制备了PbZr0.4Ti0.6O3/LaNiO3(PZT/LNO)多层薄膜。X射线衍射测量表明LNO缓冲层的引入使PZT薄膜(111)择优取向度减小,(100)取向增加。原子力显微镜测量表明引入LNO缓冲层使得PZT薄膜表面更加平整、致密。在LNO缓冲层上制备的PZT薄膜具有优良的铁电特性和介电特性:LNO缓冲层厚度为40nm时,500kV/cm的外加电.场下。剩余极化(Pr)为37.6μC/cm^2,矫顽电场(Ec)为65kV/cm;100kHz时,介电常数达到822,并且发现LNO缓冲层的厚度为40nm,PZT的铁电、介电特性改进最为显著。 相似文献
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电泳沉积PNN-PZT陶瓷厚膜及其电学性能研究 总被引:1,自引:0,他引:1
利用电泳沉积法分别在Al2O3/Pt和Pt金属基底上制备了厚度为10~40μm的0.3Pb(Ni1/3Nb2/3)O3-0.7Pb(Zr,Ti)O3(PNN-PZT)厚膜, 研究了pH值、Zeta电位与PNN-PZT悬浮液稳定性的关系, 探索了沉积电压、沉积时间与电泳沉积量的关系. 结果表明, 当添加少量分散剂聚乙二醇时, pH值在3.5~5.5较宽的范围内, 悬浮液具有较高的Zeta电位, 容易制得稳定的悬浮液. 沉积电压为21V, 沉积时间为5min时, 在Pt金属基底上电泳沉积得到的PNN-PZT厚膜, 经过1200℃烧结30min后, SEM显微结构分析表明, 厚膜致密, 晶粒得到充分生长. 电学性能测试显示此厚膜具有良好的铁电介电性能, 其剩余极化强度Pr可达20.8μC/cm2, 介电损耗tanδ为3.2%. 相似文献
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用真空蒸发聚合法合成了亚微米厚度的芳香族聚脲薄膜。红外吸收和元素分析表明,沉积原状薄膜处于低聚状态(3-6单体分子),它的香分子化是在热极化或热处理过程中完成的。极化后的聚脲高分子在室温和10Hz的频率下测定应力压电常数,应变压电常数,弹性常数,热释电系数,介电常数和介电损耗分别为20mC/m^2,10pc/N,2.2GN/m^2,18μC/m^2K,4.0和0.005。芳香族聚脲薄膜的压电和热释 相似文献
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The effect of substrate temperature on the oxidation behavior of erbium thick films, fabricated by electron-beam vapor deposition (EBVD), was investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and scanning electron microscopy (SEM). The erbium thick film is black when it is deposited at substrate temperature below 450 °C and turns gray at higher substrate temperature in a vacuum pressure of approximately 1.5 × 10−6 Torr, which indicates that the thickness of erbium oxide layer formed on the surface of erbium films increases with the decreasing substrate temperature. XPS depth profile results demonstrate that the thickness of the surface erbium oxide layer of erbium film deposited at substrate temperature of 550 and 350 °C are about 50 and 75 nm, respectively. The thicker oxide layer at lower substrate temperatures may be attributed to grain size and the dynamic vacuum condition around the substrates. Other possible factors involved in the oxidation behavior are also discussed. 相似文献
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利用脉冲激光沉积法在LaNiO3/LaAlO3(001)基片上生长了Ba0.6Sr0.4TiO3(BST)和Ba(Zr0.2Ti0.8)O3(BZT)单层薄膜,以及Ba(Zr0.2Ti0.8)O3/Ba0.6Sr0.4TiO3/Ba(Zr0.2Ti0.8)O3(BZT/BST/BZT)多层薄膜.X射线衍射(XRD)分析发现,BST、BZT和LNO薄膜都具有高度的(00l)取向.原子力显微镜(AFM)显示三种样品表面光滑无裂纹,晶粒尺寸和表面粗糙度相当.电容测试表明,相对BST、BZT单层薄膜,多层薄膜具有最大的品质因数42.07.表明多层薄膜在微波应用中具有很大的潜力. 相似文献
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新型Sol-Gel技术PZT铁电厚膜的制备及电学性能研究 总被引:3,自引:0,他引:3
采用新型sol-gel技术在 Pt/Ti/SiO2/Si基片上制备出了厚度为 2~60μm的PZT铁 电厚膜材料;研究了PZT厚膜的结构及其介电、铁电性能.XRD谱分析显示,PZT厚膜 呈现出纯钙钛矿相结构,无焦绿石相存在.SEM电镜照片显示,PZT膜厚均匀一致,无裂 纹、高致密.厚度为50μm的PZT厚膜的介电常数为860,介电损耗为0.03,剩余极化强度 是25μC/cm2.矫顽场是40kV/cm. 相似文献
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《Journal of Experimental Nanoscience》2013,8(3):274-281
In this study, we report fabrication and characterisation of a nanocomposite system composed of a commercial resin and extremely small (several nanometres in diameter) titanium dioxide particles. Nanoparticles were synthesised in situ with particle nucleation occurring inside the resin matrix. In this nanodielectric fabrication method, the nanoparticle precursor was mixed to the resin solution, and the nanoparticles were in situ precipitated. Note that no high shear mixing equipment was needed to improve particle dispersion – nanoparticles were distributed in the polymer matrix uniformly since particle nucleation occurs uniformly throughout the matrix. The properties of in situ nanodielectrics are compared to the unfilled resin and an ex situ nanocomposite. We anticipate that the presented in situ nanocomposite would be employed in high-temperature superconductivity applications. In additions, the improvement shown in the dielectric breakdown indicates that conventional high-voltage components and systems can be reduced in size with novel nanodielectrics. 相似文献
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Xiaoli WANG Xi YAO Electronic Materials Research Laboratory Xi''an Jiaotong University Xi''an China 《材料科学技术学报》1993,9(6):461-463
A very strong dielectric relaxation was observed in Bi_2BaNb_2O_9 ceramic.The temperature differencebetween the maximum dielectric constant temperatures T_m measured at 1 kHz and 100 kHz is 65℃.which is about 2-4 times that of relaxor ferroelectrics.The possible mechanism of the anomalousdielectric relaxation was discussed. 相似文献