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挠性印制电路(FPC)在IC封装中的应用,推进了电子产品小型化、轻量化、高性能化的进程,同时也推动了FPC向高密度方向发展。本文概述了基于挠性印制电路的芯片级封装技术,包括平面封装和三维封装技术,以及芯片级封装技术的发展对挠性载板的影响。 相似文献
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电子元器件封装技术发展趋势 总被引:1,自引:1,他引:0
晶圆级封装、多芯片封装、系统封装和三维叠层封装是近几年来迅速发展的新型封装方式,在推动更高性能、更低功耗、更低成本和更小形状因子的产品上,先进封装技术发挥着至关重要的作用。晶圆级芯片尺寸封装(WCSP)应用范围在不断扩展,无源器件、分立器件、RF和存储器的比例不断提高。随着芯片尺寸和引脚数目的增加,板级可靠性成为一大挑战。系统封装(SIP)已经开始集成MEMS器件、逻辑电路和特定应用电路。使用TSV的三维封装技术可以为MEMS器件与其他芯片的叠层提供解决方案。 相似文献
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本文主要论述了现代微电子封装技术中倒装片封装技术和芯片规模封装技术的结构类型,应用产品,倒装片与晶片级规模封装,并阐述了倒装片封装与芯片规模封装的综合比较及其发展前景。 相似文献
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我国微电子封装研发能力现状 总被引:2,自引:1,他引:1
对从事微电子封装技术与培训、封装外壳与特种器件封装、封装设备、封装可靠性与标准化、封装材料、测试技术研发的科研院所进行了分析;对高等院校的微电子封装科研及人才培养机构进行了分析,对从事微电子封装研究、开发和服务的其他机构进行了分析。最后对我国封装研发和产业发展能力的培养进行了探讨。 相似文献
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准分子激光微制造技术及其应用 总被引:4,自引:1,他引:3
比较分析四种微加工工艺的基本特征和技术难点,简述准分子激光与Nd:YAG激光微制造技术的特点和应用范围。结合华中科技大学准分子激光微制造工作站的建设及其在微钻孔、微切割等方面的实际应用,分析准分子激光在MEMS(微机电系统)键合、焊接、封装过程中应用的可能性。 相似文献
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大功率半导体激光器阵列的封装技术 总被引:3,自引:0,他引:3
半导体激光器阵列的应用已基本覆盖了整个光电子领域,成为当今光电子科学的重要技术。本文介绍了半导体激光器阵列的发展及其应用。着重阐述了半导体激光器阵列的封装技术——热沉材料的选择及其结构优化、热沉与半导体激光器阵列之间的焊接技术、半导体激光器阵列的冷却技术、与光纤的耦合技术等。 相似文献
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Ultrasonic energy is widely used in wire bonding for microelectronics packaging. It is necessary to ensure that the maximum ultrasonic vibration displacement occurs at or near the tip of the bonding tool (capillary) for optimal performance. In this study, amplitude profiles of ultrasonic vibrations along capillaries were measured with load using a laser interferometer. This provided valuable information in understanding and improving capillary performance. The method was applied to real time applications to optimize capillary designs and bonding processes for specific bonding applications. First, the application of a new capillary material with different zirconia compositions was evaluated. The new material with certain amount of zirconia composition showed that it was the capillary material of choice for ultra-fine pitch wire bonding. Next, comparative analysis was conducted to investigate the ultrasonic energy transfer of a new ‘slimline’ bottleneck and the conventional bottleneck. The actual bonding response of the molded slimline bottleneck showed comparable performance with the ground conventional bottleneck using the same bonding parameters. Finally, optimization of a 60-μm-bond-pad-pitch process was performed on a wire bonder. Within the optimized parameter ranges, the ultrasonic displacement of the capillary was monitored. For all possible combinations of bond force and bond power, the ultrasonic displacement of the capillary increased with increasing bond power, without drastic changes caused by bond force changes. This indicated that the selected process window was located in a stable region. 相似文献
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文章主要论述了微机电系统(MEMS)和微系统诸如微传感器、驱动器和微流体元件的电机封装技术、封装等级和封装技术相关的问题.首先陈述并讨论了典型的MEMS产品诸如微压传感器、加速度计和微泵;微电子封装和微系统封装技术,重点阐述芯片级封装技术和器件级封装技术问题.芯片级封装技术主要涉及芯片钝化、芯片隔离和芯片压焊;器件级封... 相似文献
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聚合物低温键合技术是MEMS器件圆片级封装的一项关键技术。以苯并环丁烯(BCB)、聚对二甲苯(Parylene)、聚酰亚胺(Polyimide)、有机玻璃(PMMA)作为键合介质,对键合的温度、压力、气氛、强度等工艺参数进行了研究,并分析了其优缺点。通过改变Parylene的旋涂、键合温度、键合压力、键合时间等工艺参数进行了优化实验。结果表明,在230 ℃的低温键合条件下封装后的MEMS器件具有良好的键合强度(>3.600 MPa),可满足MEMS器件圆片级封装要求。 相似文献
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MEMS局部加热封装技术与应用 总被引:1,自引:0,他引:1
随着半导体技术的发展,封装集成度不断提高,迫切需要发展一种低温封装与键合技术,满足热敏器件封装和热膨胀系数差较大的同质或异质材料间的键合需求。针对现有整体加热封装技术的不足,首先介绍了局部加热封装技术的原理与方法,然后对电流加热、激光加热、微波加热、感应加热和反应加热等几种局部加热封装技术进行了比较分析,最后具体介绍了局部加热封装技术在热敏器件封装、MEMS封装和异质材料集成等方面的应用。由于局部加热封装技术具有效率高、对器件热影响小等优点,有望在MEMS技术、系统封装(SiP)、三维封装及光电集成等领域得到广泛应用。 相似文献
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K.S. Goh 《Microelectronic Engineering》2006,83(10):2009-2014
Although wire bonding has been a well-established technology for many years, the bonding tool design becomes more complex and the process is very sensitive for wire bonding of low-k ultra-fine-pitch microelectronics devices. In this study, two different types of external transition profile were considered in order to use lower ultrasonic-generator power for preventing pad damage. The ultrasonic vibration displacements of the capillaries were measured using a laser interferometer. The measurement results revealed that the amplification factor (the ratio of the vibration displacement at the capillary tip to that at the transducer point) of a capillary with a small radius transition between the bottleneck angle and the main taper angle was 37% higher than that of a capillary with a sharp transition, and this led to satisfactory results in terms of ball size, ball height, ball shear and stitch pull. To solve the ball lift problem for wire bonding of low-k ultra-fine-pitch devices, optimization of the capillary internal profile was attempted to improve bondability. Actual bonding responses were tested. Compared to a standard design, a capillary with a smaller chamfer angle, a larger inner chamfer and a larger chamfer diameter could increase the percentage of the intermetallic compound in the bond interface. Metal pad peeling and ball lift failures were not observed after an aging test. 相似文献
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无压力辅助硅/玻璃激光局部键合 总被引:1,自引:0,他引:1
提出了一种新的无需外压力作用的硅/玻璃激光局部键合方法,通过对晶圆进行表面活化处理,选择合适的激光参数及加工环境,成功地实现了无压力辅助硅/玻璃激光键合.同时研究了该键合工艺参数如激光功率、激光扫描速度、底板材料等的影响.实验表明,激光功率越大,扫描速度越小,键合线的宽度就越大.实验结果显示,该方法能有效减少键合片的残余应力,控制键合线宽,并能得到较好的键合强度.该工艺可为MEMS器件的封装与制造提供简洁、快速、键合区可选择的新型键合方法. 相似文献