The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol–gel process

The c-axis oriented ZnO thin films were prepared on various substrates by sol–gel processes. The stability of solution was examined through solvent and stabilizer. The c-axis orientation and grain size of films were increased with increasing of heat treatment temperature. The optical propogation losses of ZnO films deposited SiO₂/Si(111) substrates were measured using end-coupling method. The losses result in the scattering of the interface of ZnO/SiO₂, and the ZnO grain. Dielectric constant and resistivity of thin films deposited on Pt/SiO₂/Si(111) substrates are, respectively, in the range of 7–13 and 1.7×10⁴9.8×10⁵Ω cm.     

Electromagnetic shielder compatible ZnO transparent conducting oxides hybridized with various sizes of Ag metal nanoparticles

In this paper, the effect of different sizes of Ag-nanoparticles dispersed in ZnO matrix using sol–gel method has been focused. Low-temperature crystallized ZnO thin films was achieved by sol–gel process, using zinc acetate dihydrate and 2-methoxyethanol as starting precursor and solvent, respectively. Various sizes of Ag-nanoparticles could be prepared by the spontaneous reduction method with changing the preparation temperatures and mole concentrations of Ag 2-ethylhexanoate in dimethyl sulfoxide solvent. The crystallographic structure of the Ag–ZnO hybrid film was analyzed by X-ray diffraction. Ag-nanoparticle size and optical property of Ag–ZnO hybrid films were measured by UV–vis spectrophotometer.     

The self-assembled nanophase particle (SNAP) process: a nanoscience approach to coatings

In the corrosion protection of aluminum-skinned aircraft, surface pretreatment and cleaning are critical steps in protecting aerospace alloys from corrosion. Our recent discovery of a revolutionary new method of forming functionalized silica nanoparticles in situ in an aqueous-based sol–gel process, and then crosslinking the nanoparticles to form a thin film, is an excellent example of a nanoscience approach to coatings. This coating method is called the self-assembled nanophase particle (SNAP) process.

The SNAP coating process consists of three stages: (1) sol–gel processing; (2) SNAP solution mixing; (3) SNAP coating application and cure. Here, we report on key parameters in the ‘sol–gel processing’ and the ‘coating application and cure’ stages in the GPTMS/TMOS system. The SNAP process is discussed from the formation of the nanosized macromolecules to the coating application and curing process.

The ‘sol–gel processing’ stage involves hydrolysis and condensation reactions and is controlled by the solution pH and water content. Here, the molar ratio of water to hydrolysable silane is a key factor. SNAP solutions have been investigated by NMR, IR, light scattering, and GPC to identify molecular condensation structures formed as a function of aging time in the solution. In moderate pH and high water content solutions, hydrolysis occurs rapidly and condensation kinetic conditions are optimized to generate nanophase siloxane macromolecules.

In the ‘SNAP solution mixing’ stage, crosslinking agents and additives are added to the solution, which is then applied to a substrate by dip-coating to form the SNAP coating. The chemical structure and morphology of the films have been characterized using X-ray diffraction (XRD), time-of-flight secondary ion mass spectrometry (TOF-SIMS) and atomic force microscopy (AFM). SNAP films are amorphous but exhibit nanostructured assembly of siloxane oligomers at a separation of about 1.8 nm as well as molecular level ordering of O–Si–O species. The surface analytical data indicate that the films retain the basic chemical arrangement of the siloxane macromolecules/oligomers and crosslinking process creates a network of siloxane oligomers tethered together. Results of these analyses are then used to construct a model of the SNAP coating. Results of these analyses are discussed in detail.     

Effect of poly(vinyl acetate) on structure and property of bismuth-doped strontium titanate thin films derived by sol–gel method

Bismuth-doped strontium titanate thin films with pure perovskite phase have been successfully deposited on Pt (1 1 1)/Ti/SiO₂/Si substrate by polymer-assisted sol–gel method. Poly(vinyl acetate) (PVAc) in precursor solution promoted the formation of perovskite phase during the heat treatment. SEM results revealed an increasing thickness from 40 to 80 nm every single layer and a porous structure with the addition of PVAc. The addition of polymer made the dielectric constant decrease from 140 to 40 and the tunability slightly increase compared with films without polymer in precursor.     

Low dielectric loss and enhanced tunability of Ba(Zr0.3Ti0.7)O3-based thin film by sol–gel method

In this work, dopants and buffer layers were employed to simultaneously lower the dielectric loss and enhance the dielectric tunability of Ba(Zr_0.3Ti_0.7)O₃ (BZT) thin films. The BZT, 1 mol% La doping BZT (BZTL) with and without La_0.5Sr_0.5CoO₃ (LSCO) buffer layers were prepared by sol–gel technique. The dielectric properties of the thin films were investigated as a function of frequency and current bias field. As a result, the BZTL thin film with LSCO buffer layer showed lower dielectric loss and higher tunability simultaneously, which can be a promising candidate for tunable microwave device applications.     

Spectroscopic ellipsometry characterization of TiO2 thin films prepared by the sol–gel method

TiO₂ thin films were prepared on SiO₂/Si(100) substrates by the sol–gel process. XRD results indicate that the major phase of TiO₂ thin films is anatase. The surface morphology and cross-section are observed by FE-SEM. The surface of thin films is dense, free of cracks and flat. The average grain size is about 60–100 nm in diameter. The thickness of single layer TiO₂ thin films is about 60 nm, which increases with the concentration of solution. Ellipsometric angles ψ, Δ are investigated by spectroscopic ellipsometry. The optical constant and the thickness of TiO₂ thin films are fitted according to Cauchy dispersion model. The results reveal that the refractive index and the extinction coefficient of TiO₂ thin films in wavelength above 800 nm are about 2.09–2.20 and 0.026, respectively. The influences of processing conditions on the optical constants and thicknesses of TiO₂ thin films are also discussed.     

Dependence of the properties of compositionally graded Pb(Zr,Ti)O3 ferroelectric films of the bottom electrode

Compositionally graded Pb(Zr_,Ti)O₃ thin films were prepared on the Pt(1 1 1)/Ti/SiO₂/Si, LNO/Si(1 0 0) and LNO/Pt(1 1 1)/Ti/SiO₂/Si substrates by a modified sol–gel method and rapid heat-treatment. The composition depth profile of a typical up-graded film was determined using a combination of auger electron spectroscopy and Ar-ion etching. The crystallographic orientation and the microstructure of the resulting graded PZT thin films on the different substrates were characterized by XRD. The dielectric and ferroelectric properties of the graded PZT films were discussed. The graded PZT films on LNO/Pt/Ti/SiO₂/Si and LNO/Si(1 0 0) substrates have larger dielectric constant and remnant polarizations compared to that grown on Pt/Ti/SiO₂/Si substrates.     

Si field emitter arrays coated with thin ferroelectric films

This paper demonstrates novel approach on Si field emitter arrays (FEAs) coated with thin ferroelectric films for vacuum microelectronic applications, which exhibit enhanced electron emission behaviors. The films were deposited using sol–gel and sputtering process, respectively. In sol–gel approach, the emission behavior is highly correlated to the crystallinity of (Ba,Sr)TiO₃ (BST) layer. The interfacial reaction between Si and BST film would deteriorate the crystallinity of the films, and in turn impede the electron emission from silicon tips. The film thickness and the dopants also affect the emission behaviors significantly. In sputtering process, the nitrogen-incorporated SrTiO₃ (STO) films are deposited with eliminated interfacial due to relatively lower processing temperature. The enhanced emission characteristics are highly correlated with nitrogen-incorporation and film thickness. These encouraging results have offered great promise for the application of ferroelectric films in field emission devices.     

Enhanced dielectric tunability properties of Ba(ZrxTi1−x)O3 thin films using seed layers on Pt/Ti/SiO2/Si substrates

The compositionally graded and homogeneous Ba(Zr_xTi_1−x)O₃ (BZT) thin films were fabricated on LaNiO₃ (LNO) buffered Pt/Ti/SiO₂/Si and Pt/Ti/SiO₂/Si substrates by a sol–gel deposition method, respectively. These films crystallized into a single perovskite phase. The BZT thin films deposited on LaNiO₃/Pt/Ti/SiO₂/Si substrates had a highly (1 0 0) preferred orientation and exhibited a preferred (1 1 0) orientation when the thin films were deposited on Pt/Ti/SiO₂/Si substrates. The LNO and Ba(Zr_0.30Ti_0.70) served as seed layer on Pt/Ti/SiO₂/Si substrates and analyze the relationship of seed layer, microstructure and dielectric behavior of the thin films. The compositionally graded thin films from BaTiO₃ to BaZr_0.35Ti_0.65O₃ were fabricated on LNO/Pt/Ti/SiO₂/Si substrates. The tunability behavior of compositionally graded films was analyzed in order to produce optimum effective dielectric properties. The dielectric constant of BaZr_xTi_1−xO₃ compositionally graded thin films showed weak temperature dependence. This kind of thin films has a potential in a fabrication of a temperature stable tunable device.     

Morphology effect on the electrochromic and electrochemical performances of NiO thin films

NiO thin films on ITO substrate were prepared by chemical bath deposition (CBD) and sol–gel method, respectively. The microstructure and morphology of the NiO films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Both the films have polycrystalline cubic NiO, but have distinct morphology. The CBD NiO thin film with a highly porous structure exhibited a noticeable electrochromic performance. The variation of transmittance was high up to 82% at 550 nm and the coloration efficiency (CE) was calculated to be 42 cm² C⁻¹. The sol–gel NiO thin film with a smoothly compact structure presented 35% and 28 cm² C⁻¹ at 550 nm, respectively. The electrochemical properties of both the NiO thin films were investigated in 1 M KOH electrolyte by means of cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) measurements. The CV and EIS measurements revealed that the CBD NiO thin film had better electrochemical reversibility, higher reactivity and reaction kinetics due to its highly porous structure.     

Metal-organic chemical liquid deposited (1 1 0)-preferred LaNiO3 buffer layer for Pb0.97La0.02(Zr0.85Sn0.13Ti0.02)O3 antiferroelectric films

Conductive perovskite lanthanum nickelate LaNiO₃ (LNO) thin films were fabricated on SiO₂/Si substrates through metal-organic chemical liquid deposition method. The effect of annealing temperature on the orientation and sheet resistance of the LNO films were investigated. XRD patterns showed that the LNO films deposited on SiO₂/Si substrates exhibited preferred-(1 1 0) orientation. The lowest sheet resistance of the LNO thin films, 250 Ω/□ was obtained after being annealed at 650 °C for 1 h. Subsequently, Pb_0.97La_0.02(Zr_0.85Sn_0.13Ti_0.02)O₃ (PLZST) antiferroelectric thin films were prepared on the LaNiO₃ buffered SiO₂/Si substrates via sol–gel process. And the crystallinity, microstructure and electric properties of the PLZST thin films were studied in details.     

Low temperature synthesis of MgxAl2(1−x)Ti(1+x)O5 films by sol–gel processing

Aluminium titanate films thicker than 0.5 μm have been synthesized by sol–gel methods. The films have been deposited via repetitive dip-coating on silicon wafers and their thermal stability has been tested as a function of the annealing time and temperature. The sol–gel approach has allowed the formation of the aluminium titanate phase at temperatures (700 °C) much lower than those necessary for solid-state reactions (1450 °C). Magnesium oxide has been used to improve the thermal stability of the films at high temperatures. The behavior of samples prepared with two different Mg content, i.e. Mg_0.2Al_1.6Ti_0.8O₅ and Mg_0.6Al_0.8Ti_1.6O₅, has been studied. The films have proven to be stable at 1150 °C, for up to 90 h. X-ray photoelectron spectroscopy has shown that after firing at 500 °C the surface chemical composition of the films is in accordance with the nominal one, whilst at higher annealing temperatures some differences, attributed to diffusion effects, have been observed.     

Preparation, characterization and catalytic properties of Co–Nb2O5–SiO2 catalysts

Co–Nb₂O₅–SiO₂ catalysts were prepared using three different sol–gel procedures: (i) the colloidal sol–gel method using NbCl₅ and SiCl₄ as precursors; (ii) the polymeric sol–gel method using niobium ethoxide and tetraethyl-orthosilicate (TEOS); (iii) an intermediate procedure between the colloidal and polymeric sol–gel method in which the precursors were those utilized in the CSG but dissolved in a mixture of anhydrous ethanol and CCl₄. In all procedures, the elimination of the solvent carried out between 80 and 110°C was followed by a reduction in hydrogen flow (30 ml min⁻¹) at 773 K. Following these procedures, samples containing 10 wt.% Co and 15 wt.% niobium oxide (expressed as Nb₂O₅) were obtained. The characterization of the catalysts was performed using various techniques: N₂ adsorption and desorption curves at 77 K, NH₃- and H₂-chemisorption, TPO, XPS, XRD, and solid state ¹H MAS-NMR. Hydrogenolysis of butane was evaluated. The low reaction rates are assigned to the effect of the metal size, whereas the isobutane selectivity as well as the relatively high stability is due to the acidity of the support.     

Orientation Control and Laser-Beam-Assisted Crystallization of Sol-Gel-Derived, Titanium-Doped LiNbO3 Thin Films

Two processes for the crystallization of titanium-doped LiNbO₃ (LNT) gel thin films were investigated in the present study. LNT gel thin films were prepared on platinized glass and platinized sapphire substrates, as the application of a platinum intermediate layer greatly affected the orientation of LNT films on these substrates. X-ray pole figures revealed the well-oriented growth for LiNbO₃ both on the platinum (111)/sapphire C substrate and bare sapphire C. Another approach to crystallizing LNT gel film was attempted by developing a new technique to fabricate a LiNbO₃ waveguide on the sapphire substrate using a Nd:YAG laser beam. The crystallization of LNT was achieved successfully with no cracking or peeling. The prepared crystalline LNT films also were characterized by Raman microspectroscopy. S. E. Trolier-McKinstry—contributing editor     

Phase Separation of Alkoxy-derived (Ti,Sn)O2 Oriented Thin Films

Oriented (Ti,Sn)O₂ thin films with modulated microstructure were successfully synthesized on sapphire substrates by using sol–gel processing combined with spinodal decomposition. The degree of orientation of (Ti_0.5Sn_0.5)O₂ thin films increased in the following order: sapphire (0001), (11     0), and (01     2). (Ti_0.5Sn_0.5)O₂ thin films underwent spinodal decomposition at 900°C by annealing. The variation of the 2theta value of the 202 reflection of (Ti_0.5Sn_0.5)O₂ films showed the typical behavior of spinodal decomposition. The rate of spinodal decomposition of the (Ti_0.5Sn_0.5)O₂ films on sapphire (11     0) was faster than that on sapphire (01     2) substrates. The characteristic modulated microstructure was observed for the spinodally decomposed (Ti_0.5Sn_0.5)O₂ films on sapphire (01     2) substrates by transmission electron microscopy. (Ti_0.3Sn_0.7)O₂ films on sapphire (01     2) substrates were binodally decomposed during annealing at 1300°C.     

Excimer Laser Crystallized (Pb,La)(Zr,Ti)O3 Thin Films

A KrF pulsed excimer laser (248 nm) was utilized to crystallize sputtered La-modified Pb(Zr,Ti)O₃ (3:30:70) (PLZT) films on LaNiO₃-coated silicon substrates. The film surface was irradiated with defocused laser pulses in an oxygen ambient at various substrate temperatures. Polycrystalline, phase pure perovskite PLZT thin films were produced for substrate temperatures of 250°C and higher. The dielectric constant and loss tangent values of laser-assisted crystallized (10 min exposure at 10 Hz using a substrate temperature of 400°C) PLZT thin films at 10 kHz were 406 and 0.027; in comparison, rapid thermal annealed films (annealed at 700°C for 1 min) showed values of 400 and 0.021, respectively. Laser crystallized films exhibited a remanent polarization value of 14 μC/cm² with a coercive field |( E _+c+ E _−c)|/2 of 95 kV/cm.     

An organically modified zirconate film as a corrosion-resistant treatment for aluminum 2024-T3

Current coating systems for aircraft corrosion protection are based on a traditional chromate surface treatment, primer, and topcoat. The Air Force is seeking environmentally benign corrosion-resistant surface treatments for aluminum-skinned aircraft as a replacement for environmentally hazardous surface treatments involving chromates. Performance of replacement treatments must be able to satisfy the durability needed for dramatically extended lifetimes, be compatible with present and future environmental requirements, and be easily integrated into current primer/topcoat paint systems.

Organically modified zirconate sol–gel films were investigated as an environmentally compliant replacement for chromated surface treatments, which included functionalized components to tailor the chemistry at both the aluminum oxide substrate/surface treatment interface and the surface treatment/topcoat interface. Sol–gel films were applied to aluminum 2024-T3 alloy coupons, and the resulting film chemistry was investigated. FTIR was used to identify organic components in the film and X-ray photoelectron spectroscopy was used to investigate the interface chemistry. The result of the chemically modified sol–gel synthesis was a coating in which a concentration gradient was formed at the surface, which is discussed. The corrosion protection attributes of these films was also studied and the electrochemical evaluation of sol–gel films will be discussed, both as stand-alone coatings and as part of a full coating system.

Organically modified sol–gels exhibited significantly better protection in terms of barrier properties in comparison to a typical chromate-based processes. The resulting data from evaluations of sol–gel produced coatings show promise towards the goal of producing a robust chemical interaction/bonding of such corrosion-resistant coatings on the surface of aluminum-skinned aircraft without the use of environmentally hazardous chromate agents.     

Preparation of rough anatase films and the evaluation of their photocatalytic efficiencies

Sol–gel derived rough anatase films without controlled particle sizes were prepared by surfactant templating. The coating sol–gel was obtained by hydrolysis of Ti(OC₃H₇)₄ in ethanol/HNO₃ solution. The gel films, prepared by dipping glass substrates in surfactant solutions, were dried after immersion under an atmospheric pressure. The rough films of TiO₂ anatase were obtained after calcining at 500 °C. The resultant films were transparent, semitransparent or opaque and 136–402 nm thick. It was found that the TiO₂ films prepared from the sol–gel with surfactant showed a granular nanostructure, and they were composed of regular particles, for example; between 50 and 70 nm. The roughness of the films was found to depend on the surfactant concentration in the sol–gel solution and can show a roughness between 0.82 and near of 17 nm. The photocatalytic activity of the films for the degradation and mineralization of phenol, an industrial pollutant, in water and under 365 nm irradiation was improved by the surfactant modification. Kinetic analysis of degradation and mineralization of phenol in water were employed to evaluate the different TiO₂ films under the same experimental conditions. The global photonic efficiency for degradation and mineralization of phenol ξ_g, was calculated to facilitate comparison with a TiO₂ standard photocatalyst named Degussa P-25.     

Comparative photocatalytic behavior of Ta catalysts prepared by d.c.-sputtering, sol–gel and grafting in acetone degradation

Ta-doped photocatalysts were prepared using three different techniques: reactive d.c.-magnetron sputtering, sol–gel and grafting of tantalum on MCM-41 and TiO₂. The composition of the catalysts prepared by reactive d.c.-magnetron sputtering consisted in tantalum and titania, while that of sol–gel and grafted catalysts of Ta–titania–silica mixed oxides. The characterization of these catalysts was carried out using the adsorption-desorption isotherms of N₂ at 77 K, X-ray diffraction (XRD) patterns, small-angle X-ray scattering (SAXS), atomic force microscopy (AFM), XPS, TEM, and ²⁹Si- and ¹⁸¹Ta-CP/MAS NMR spectra. The behavior of these photocatalysts was checked in acetone degradation. The photocatalytic tests indicate that, depending on the preparation conditions and tantalum content, an enhancement of the activity occurs as compared with pure titania. Sol–gel and Ta-grafted MCM and TiO₂ catalysts exhibited a rather poor activity, which was correlated with the lack of crystallinity of titania.     

Photo-induced super-hydrophilic property and photocatalysis on transparent Ti-containing mesoporous silica thin films

The transparent Ti-containing mesoporous silica thin films can be prepared on quartz plate using a spin-coating sol–gel method. The spectroscopic characterization has revealed that the Ti-containing mesoporous silica thin films contain isolated and tetrahedrally-coordinated titanium oxide moieties in the frameworks. Compared with the common mesoporous silica thin films, these Ti-containing mesoporous silica thin films have demonstrated a strong hydrophilic surface property even before UV-irradiation. After UV-light irradiation, the contact angle of water droplet on the Ti-containing mesoporous silica thin films became lower, indicating the appearance of the super-hydrophilic property. Under UV-light irradiation Ti-containing mesoporous silica thin films also exhibited highly selective activity for the photocatalytic oxidation of propylene. The isolated and tetrahedrally-coordinated titanium oxide moieties are responsible for these photo-induced surface reactions.