共查询到18条相似文献,搜索用时 109 毫秒
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为解决硅压阻式压力芯片灵敏度随着温度变化发生漂移的问题,设计了一种在片上集成温度补偿结构的压力芯片。在压力芯片上制备电阻温度系数(TCR)为负数的多晶硅电阻用于分压,调整不同温度下的惠斯通电桥端电压以达到灵敏度补偿的效果。本文的研究包含理论分析、参数计算,并进行了芯片制备和性能测试。性能测试结果表明,补偿后的耐高温封装传感器芯片在-50℃~270℃区间内,温漂为-0.034%FS/℃,简易封装传感器芯片在-40℃~125℃区间内的温漂为-0.008%FS/℃,该补偿芯片的温漂远小于无补偿的压力芯片。 相似文献
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本文提出了一种硅压阻式压力传感器校准和温度补偿的新思想,根据这种思想,把压阻惠斯顿电桥同可调的多晶硅电阻电路组合在同一芯片上,本文叙谜了这种传感器的设计、制作及其测最特性。 相似文献
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一种集成式多参数硅微传感器 总被引:1,自引:1,他引:0
为了实现小体积多参数的测量,提出一种单片集成多功能传感器.该传感器包括压力、温度和湿度传感器.各部分分别基于半导体压阻效应、电阻迁移率变化、极板间电容变化为原理制作而成.该传感器采用n型(100)基底,利用体硅和面硅工艺加工而成.测量电阻通过离子注入B 形成扩散电阻.为减小各参数间的相互影响,压力传感器的测量电阻布置于[110]晶向,测温电阻沿[100]晶向布置.温度输出信号可以实现对传感器中压力输出时温度漂移的精确补偿.芯片大小为5mm× 5 mm.试验表明传感器具有良好的线性,小迟滞,较高的灵敏度. 相似文献
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新型扩散硅低压传感器 总被引:1,自引:0,他引:1
介绍一种采用矩形双岛硅膜结构,量程为6kPa的扩散硅低压传感器。该传感器具有非线性内补偿和20倍量程以上的过压保护功能。着重介绍了该产品的设计、芯片制造与封装工艺、温度系数补偿办法和传感器技术性能的测试结果。 相似文献
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本文介绍一种周边固支圆形膜片硅压阻式冲击加速度计的工作原理和结构,以及硅膜片尺寸与传感器输出的计算关系,冲击加速度传感器的电阻设计,及其器件的制作工艺流程。通过冲击试验,证明了该加速度传感器在高加速度作用下的实用性。 相似文献
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双E 型硅加速度传感器的研制 总被引:5,自引:1,他引:4
本文在简要介绍了,利用硅的各向异性腐蚀工艺研制的,双E非整体弹性膜式硅芯片结构的同时,又较详细的报告了,用此芯片封装成的硅加速度敏感元件及硅加速度传感器结构,最后介绍这种加速度传感器的优良性能。 相似文献
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This study applies conventional micro-electro-mechanical systems (MEMS) techniques to develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding cantilever and an integrated resistive thermal sensor. The cantilever has a composite structure comprising a thin layer of platinum (Pt) deposited on a silicon nitride layer and then covered with a polyimide sensing layer. The cantilever deflected in the upward direction as water molecules absorbed by the polyimide sensing layer. The humidity sensor chip caused a measurable change in the resistance of the platinum layer. By compensating the change in the measured resistance by the ambient temperature, the absolute value of the relative humidity can be directly derived. The experimental results show that the sensor has a time-response of 0.9 s when exposed to a sudden humidity change of 65%RH to 95%RH. The sensitivity of the sensors decreases as the temperature increases. Furthermore, the sensor with the longest Pt resistor has the greatest sensitivity. In additions, the temperature-calibrated resistance signal generated by the sensor varies linearly with the ambient humidity. 相似文献
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双E形结构硅压力传感器的研制 总被引:3,自引:1,他引:2
介绍利用硅的各向异性腐蚀工艺腐蚀出的一种双E形结构非整体结构弹性膜硅芯片及用此芯片封装成的压力敏感元件。借助于这种硅芯片与不同厚度的封孔膜结合 ,制成了灵敏度和量程范围各不相同的性能优良的压力传感器 相似文献
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An anemometric flow sensor for liquids based on a single temperature sensor is presented. The sensor is based on a probe composed by a silicon chip glued to a copper cylinder acting as thermal feed-through. A precise temperature sensor and a resistive heater are integrated on the chip surface. The sensor is operated in pulsed mode to eliminate the interference of the fluid temperature, switching either the heater power or the probe temperature. The results of water flow tests in the range (1–30) l/h are presented. The problem of reducing the duration of the measurement cycle has been addressed with theoretical and experimental arguments. 相似文献
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We have developed a compensated capacitive pressure and temperature sensor for kraft pulp digesters (pH 13.5, temperatures
25–175°C reaching a local maximum of 180°C and pressures up to 2 MPa). The gauge capacitive pressure sensor was fabricated
by bonding silicon and Pyrex chips using a high temperature, low viscosity UV (ultraviolent) adhesive as the gap-controlling
layer and heat curing adhesive as the bonding agent. A simple chip bonding technique, involving insertion of the adhesive
into the gap between two chips was developed. A platinum thin-film wire was patterned on top of a silicon chip to form a resistance
temperature detector (RTD) with a nominal resistance of 1,500 Ω. A silicon dioxide layer and a thin layer of Parylene were
deposited to passivate the pressure sensor diaphragm and the sensors were embedded into epoxy for protection against the caustic
environment in kraft digesters. The sensors were tested up to 2 MPa and 170°C in an environment chamber. The maximum thermal
error of ±1% (absolute value of ±20 kPa) full scale output (FSO) and an average sensitivity of 0.554 fF/kPa were measured.
Parylene-coated silicon chips were tested for a full kraft pulping cycle with no signs of corrosion. 相似文献
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This paper reports on a method for the investigation of mechanical stress on MEMS sensor and actuator structures due to packaging
processes. A silicon test chip is developed and manufactured to validate the simulation results. Finite element analysis (FEA)
is used to optimize the geometric parameters and to find a stress sensitive sensor geometry. A diaphragm structure is used
as mechanical amplifier for bulk induced stresses during the packaging process. Piezo resistive solid state resistors are
doped into the surface of the chip to measure the stress in the diaphragms and at the contact pads being most significant
locations for analysis. A high precision ohmmeter was used to measure the resistance prior and past the packaging process.
The captured data allows for computation of the resulting stress loads in magnitude. Therefore, a stress evaluation of different
packaging technologies is conducted and the impact of the packaging process on reliability can be estimated immediately. 相似文献