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1.
采用射频磁控溅射法在ZnO缓冲层上制备了不同Al掺杂量的ZnO(AZO)薄膜。利用X射线衍射(XRD)、扫描电子显微镜(SEM)和光致发光(PL)等表征技术,研究了AZO薄膜的微观结构、表面形貌和发光特性。结果表明,随着Al掺杂量的增加,ZnO薄膜的择优取向性发生了改变,且当Al的掺杂量为0.81%(原子分数)时,(002)衍射峰与其它衍射峰强度的比值达到最大,表明适合的Al掺杂使ZnO薄膜的择优取向性得到了改善。在可见光范围内薄膜的平均透过率超过70%。通过对样品光致发光(PL)谱的研究,发现所有样品出现了3个发光峰,分别对应于以444nm(2.80eV)、483nm(2.57eV)为中心的蓝光发光峰和以521nm(2.38eV)为中心较弱的绿光峰。并对样品的发光机理进行了详细的探讨。  相似文献   

2.
RF溅射稀土掺杂ZnO薄膜的结构与发光特性   总被引:1,自引:1,他引:0  
文军  陈长乐 《光电工程》2008,35(8):124-127
通过射频磁控溅射技术在Si(111)衬底上制备了未掺杂和La、Nd掺杂ZnO薄膜.XRD分析表明,ZnO薄膜具有c轴择优生长,La、Nd掺杂ZnO薄膜为纳米多晶薄膜.AFM观测,La、Nd掺杂ZnO薄膜表面形貌较为粗糙.从薄膜的室温光致光谱中看到,所有薄膜都出现了395 nm的强紫光峰和495 nm的弱绿光峰,La掺杂ZnO薄膜的峰强度增大,Nd掺杂ZnO薄膜的峰强度减弱,分析了掺杂引起PL峰强度变化的原因.  相似文献   

3.
采用静电纺丝法在Si基底上制备了不同Mg掺杂浓度的ZnO纳米纤维膜,利用扫描电子显微镜(SEM)、X射线衍射(XRD)、X射线光电子能谱(XPS)、光致发光(PL)等手段对不同Mg掺杂浓度ZnO纳米纤维膜的表面形貌、晶体结构、化学成分、发光性能进行研究。SEM结果表明MgxZn1-xO纳米纤维的直径在50~300nm。XRD结果表明在Mg掺杂浓度低于15%(x=0.15)时,晶体呈现ZnO六角纤锌矿结构,当掺杂浓度达到20%(x=0.2)时,晶体出现MgO的分相。XPS结果表明Mg已成功掺入到ZnO纳米纤维中。PL谱表明MgxZn1-xO纤维膜具有较强的紫外发射,而可见发射几乎观察不到,随着Mg掺杂浓度的增加,紫外发光峰明显蓝移且发光强度增加。  相似文献   

4.
采用水热法,在ZnO种子层上制备出不同Al掺杂量的ZnO纳米棒阵列薄膜,利用XRD、SEM、TEM、PL等检测手段对样品进行结构、形貌和发光性能分析.结果表明,纳米棒属于六方纤锌矿结构,具有垂直基底沿[002]方向生长的特征,PL谱上存在强的近紫外辐射峰.随着掺杂量的增加,纳米棒直径略有减小,近紫外辐射峰蓝移,强度先增加后减小,证明掺杂会形成非辐射中心,探讨了Al掺杂ZnO纳米棒阵列的发光机理.  相似文献   

5.
铝掺杂氧化锌薄膜的光学性能研究   总被引:1,自引:0,他引:1  
采用溶胶-凝胶法,在玻璃基底上制备了掺杂不同质量分数Al的ZnO薄膜,并采用X射线衍射(XRD)仪、扫描电子显微镜(SEM)、紫外-可见光谱仪(UV-Vis)、光致发光光谱(PL)等方法测试和分析了不同Al掺杂浓度对ZnO薄膜的形貌结构、光学性能影响。结果表明,Al的掺杂引起了晶体生长过程中择优取向的改变,掺杂ZnO薄膜的表面颗粒随Al掺杂量的增加而增大,可见光范围内的平均透射率78%,光致发光光谱分析表明,纯的ZnO薄膜有很强的紫外发光,而随Al的质量分数的增加,紫外发光强度迅速下降。  相似文献   

6.
Mg掺杂ZnO薄膜的结构及其光学性能研究   总被引:1,自引:0,他引:1  
利用射频磁控溅射技术在(100)Si和玻璃衬底上沉积系列Mg掺杂ZnO(x=0~0.20)薄膜,XRD分析结果表明,Zn1-xMgxO薄膜均为六角纤锌矿结构,薄膜呈现出c轴择优生长特性,但随着x值的增加,晶格常数c逐渐减小。当x=0.20时,薄膜出现(100)面衍射峰,薄膜的c轴择优生长特性减弱。SEM分析表明,x=0.10时,薄膜表面平坦光滑,晶粒大小均匀,结构更加致密,结晶质量最佳。紫外可见光透射光谱表明,Mg的掺入提高薄膜在可见光范围内的透过率;同时增大了薄膜的禁带宽度;室温PL谱分析显示所有薄膜均出现了紫外发射峰和蓝光发射带,且紫外发射峰和蓝光发光带都随x值的增加而蓝移。  相似文献   

7.
采用射频反应磁控溅射法以不同的氧氩比在玻璃衬底上制备了ZnO薄膜,并对薄膜进行了退火处理;利用X射线衍射仪(XRD)和原子力显微镜(AFM)分别对薄膜的物相组成和表面形貌进行了分析,利用荧光分光光度计对ZnO薄膜的室温光致发光(PL)谱进行了测试。结果表明:当氧氩气体积比为7∶5时,所制备的ZnO薄膜晶粒细小均匀,薄膜结晶质量最好;ZnO薄膜具有紫光、蓝光和绿光三个发光峰,随着氧氩比的增加,蓝光的发射强度增强,而紫光和绿光的发射强度先增强后减弱,当氧氩气体积比为7∶5时紫光和绿光的发射强度最强。  相似文献   

8.
采用射频磁控溅射方法在玻璃衬底上制备出不同Al掺杂量的ZnO(AZO)薄膜。利用X射线衍射(XRD)、扫描电子显微镜(SEM)和光致荧光发光(PL)等系统研究了不同Al掺杂量对ZnO薄膜的结晶性能、表面形貌和光学特性等的影响。结果显示,随着Al掺杂量的增加,薄膜的(002)衍射峰先增强后减弱,同时出现了(100)、(101)和(110)衍射峰,表明我们制备的AZO薄膜为多晶纤锌矿结构,适量的Al掺杂可提高ZnO薄膜的结晶质量,然而AZO薄膜的表面平整、晶粒致密均匀。薄膜在紫外-可见光范围的透过率超过90%,同时随着Al掺杂量的增加,薄膜的光学带隙值先增大,后减小。这与采用量子限域模型对薄膜的光学带隙作出相应的理论计算所得结果的变化趋势完全一致。  相似文献   

9.
采用燃烧合成法制备了六角锥形氧化锌(ZnO)粉体,利用X射线衍射谱(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL)研究了退火温度与Tb掺杂对ZnO粉体形貌结构和光学性能的影响,实验结果表明,600℃退火得到的晶粒六棱锥形最明显;不同退火温度处理后的样品光致发光谱都有紫光、蓝光和黄光;升高退火温度,样品结晶程度和发光强度提高,黄光发生蓝移;Tb掺杂使材料出现蓝移现象,并在546nm处出现了绿光发射峰。  相似文献   

10.
梳状氧化锌纳米材料的制备及结构、性能的表征   总被引:2,自引:1,他引:1  
通过纯锌粉蒸发,在600-650℃无催化条件下成功制备了高质量的梳状ZnO纳米结构。通过扫描电镜(SEM)及高分辨透射电镜(HRTEM)观察,所制备的梳状ZnO纳米结构具有两种典型形貌,且皆为单晶结构,分析表明其生长由气-固生长机理控制。室温光致发光谱显示,梳状ZnO纳米结构在385nm附近形成紫外发射峰;在以495nm为中心的范围内,形成较宽的绿光发射峰。  相似文献   

11.
ZnO纳米棒Al掺杂和A1,N共掺杂的制备技术与光致发光性能   总被引:1,自引:0,他引:1  
采用水热法首先合成了Al掺杂ZnO(AZO)纳米棒,在此基础上通过550℃的氨气氛中退火制备了Al,N共掺杂ZnO(ANZ())纳米棒.运用X射线衍射(XRD),场发射扫描电镜(FESEM),透射电子显微镜(TEM),X射线能谱(EDS)和光致发光(PL)对样品进行了表征与分析.结果表明,制备的AZO和ANZ()纳米棒...  相似文献   

12.
Polycrystalline Mn doped ZnO (MZO) semiconductor thin films were deposited onto glass substrates employing different number of dipping at room temperature using Successive Ionic Layers by Adsorption Reaction (SILAR) technique. The thin film deposition conditions were optimized by altering the various deposition parameters based on their structure. The structural study was carried out using X-ray diffractometer (XRD). The XRD analysis indicated that there is no change in the structure of ZnO thin films due to Mn doping. The films exhibited hexagonal wurtzite structure. The structural studies on Mn doped samples revealed that the predominant orientation is (002) lattice plane and the position of this orientation shifted toward lower angle during doping. The intensity of photoluminescence (PL) emission of ZnO is found to be augmented for Mn doped samples. The room temperature Raman spectra measurements revealed the presence of additional modes. The Vibrating Sample Magnetometer (VSM) studies show that MZO thin film has ferromagnetic properties.  相似文献   

13.
Undoped and Co-doped ZnO thin films with different amounts of Co have been deposited onto glass substrates by sol–gel spin coating method. Zinc acetate dihydrate, cobalt acetate tetrahydrate, isopropanol and monoethanolamine (MEA) were used as a precursor, doping source, solvent and stabilizer, respectively. The molar ratio of MEA to metal ions was maintained at 1.0 and a concentration of metal ions is 0.6 mol L?1. The Co dopant level was defined by the Co/(Co + Zn) ratio it varied from 0 to 7 % mol. The structure, morphology and optical properties of the thin films thus obtained were characterized by X-ray diffraction (XRD), energy dispersive X-ray spectrometer (EDX), scanning electron microscopy (SEM), ultraviolet–visible (UV–Vis), photoluminescence (PL) and Raman. The XRD results showed that all films crystallized under hexagonal wurtzite structure and presented a preferential orientation along the c-axis with the maximum crystallite size was found is 23.5 nm for undoped film. The results of SEM indicate that the undoped ZnO thin film has smooth and uniform surface with small ZnO grains, and the doped ZnO films shows irregular fiber-like stripes and wrinkle network structure. The average transmittance of all films is about 72–97 % in the visible range and the band gap energy decreased from 3.28 to 3.02 eV with increase of Co concentration. DRX, EDX and optical transmission confirm the substitution of Co2+ for Zn2+ at the tetrahedral sites of ZnO. In addition to the vibrational modes from ZnO, the Raman spectra show prominent mode representative of ZnyCo3?yO4 secondary phase at larger values of Co concentration. PL of the films showed a UV and defect related visible emissions like violet, blue and green, and indicated that cobalt doping resulted in red shifting of UV emission and the reduction in the UV and visible emissions intensity.  相似文献   

14.
The chemical bath deposition method has often been employed to successfully deposit pure and Mg doped ZnO thin films on a glass substrate. The impact of Mg creates a strained stress in ZnO films affecting its structural and optical properties. XRD patterns revealed that all thin films possess a polycrystalline hexagonal wurtzite structure and Mg doped ZnO thin films (002) plane peak position is shifted towards a lower angle due to Mg doping. From the SEM image, it is understood that the Mg doped ZnO thin films are uniformly coated and are seen as dense rods like pillers deposited over the film. The energy dispersive X-ray analysis confirmed the presence of Mg in doped ZnO thin films. The transmittance spectra exhibit that it is possible for Mg doping to enhance ZnO thin films. The optical energy gap of the films was assessed by applying Tauc’s law and it is observed to show an increasing tendency with an improvement in Mg doping concentrations. The optical constants such as reflectance, index of refraction, extinction coefficient and optical conductivity are determined by using transmission at normal incidence of light by using wavelength range of 200–800 nm. In PL spectra, the band edge emission shifted to the blue with increasing amount of Mg doping.  相似文献   

15.
The epitaxial growth of indium phosphide nanowires (InP NWs) on transparent conductive aluminum-doped zinc oxide (ZnO:Al) thin films is proposed and demonstrated. ZnO:Al thin films were prepared on quartz substrates by radio frequency magnetron sputtering, then InP NWs were grown on them by plasma enhanced metal organic chemical vapor deposition with gold catalyst. Microstructure and optical properties of InP nanowires on ZnO:Al thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectric spectroscopy (XPS), photoluminescence and Raman spectroscopy at room temperature. SEM shows that randomly oriented and intersecting InP nanowires were grown to form a network on ZnO:Al thin films. Both wurtzite (WZ) and zincblende (ZB) structures coexist in the random orientation InP NWs on ZnO:Al thin film had been proved by XRD analysis. XPS result indicates Zn diffusion exists in the InP NWs on ZnO:Al. The photoluminescence spectra of InP nanowires with Zn diffusion present an emission at 915 nm. Zn diffusion also bring effect on Raman spectra of InP NWs, leading to more Raman-shift and larger relative intensity ratio of TO/LO.  相似文献   

16.
CdO doped (doping concentration 0, 1, 3 and 16 wt%) ZnO nanostructured thin films are grown on quartz substrate by pulsed laser deposition and the films are annealed at temperature 500 °C. The structural, morphological and optical properties of the annealed films are systematically studied using grazing incidence X-ray diffraction (GIXRD), energy dispersive X-ray analysis (EDX), scanning electron microscopy (SEM), atomic force microscopy (AFM), Micro-Raman spectra, UV–vis spectroscopy, photoluminescence spectra and open aperture z-scan. 1 wt% CdO doped ZnO films are annealed at different temperatures viz., 300, 400, 500, 600, 700 and 800 °C and the structural and optical properties of these films are also investigated. The XRD patterns suggest a hexagonal wurtzite structure for the films. The crystallite size, lattice constants, stress and lattice strain in the films are calculated. The presence of high-frequency E2 mode and the longitudinal optical A1 (LO) modes in the Raman spectra confirms the hexagonal wurtzite structure for the films. The presence of CdO in the doped films is confirmed from the EDX spectrum. SEM and AFM micrographs show that the films are uniform and the crystallites are in the nano-dimension. AFM picture suggests a porous network structure for 3% CdO doped film. The porosity and refractive indices of the films are calculated from the transmittance and reflectance spectra. Optical band gap energy is found to decrease in the CdO doped films as the CdO doping concentration increases. The PL spectra show emissions corresponding to the near band edge (NBE) ultra violet emission and deep level emission in the visible region. The 16CdZnO film shows an intense deep green PL emission. Non-linear optical measurements using the z-scan technique indicate that the saturable absorption (SA) behavior exhibited by undoped ZnO under green light excitation (532 nm) can be changed to reverse saturable absorption (RSA) with CdO doping. From numerical simulations the saturation intensity (Is) and the effective two-photon absorption coefficient (β) are calculated for the undoped and CdO doped ZnO films.  相似文献   

17.
In this paper, we report a new and simple method to prepare different concentrations in molarities Eu-doped ZnO films on the ITO glass substrates by ultrasonic spray pyrolysis. The morphologies, crystal structures and optical properties were investigated by using scanning electro microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL). The SEM images show that the morphologies of Eu doping concentrations 3 and 9 at.% of ZnO films are lamellae. When the Eu doping concentration in molarities is 6 at.%, the morphology of films are graininess and dense, particle diameter is about 200–250 nm. The XRD results indicate that when the Eu doping concentration is 6 at.%, the structure of Eu-doped ZnO films have better hexagonal polycrystalline structure, and characteristic diffraction peak of Eu2O3 was appeared at 2θ = 50.47°. The PL spectra of different concentrations Eu-doped ZnO films show that for the Eu doping concentration 6 at.%, ZnO film has a stronger red emission at 613 nm with excitation wavelength at 280 nm.  相似文献   

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