超短脉冲激光微孔加工(上)——理论研究

自20世纪60年代激光器被发明以来,其脉冲宽度被不断压缩至亚皮秒及飞秒量级,使得激光加工技术进入到了超短脉冲阶段。为了进一步优化超短脉冲激光的微加工,理论研究必不可少。主要论述了超短脉冲激光与不同类型材料之间的相互作用机制。简述了超短脉冲激光微孔加工中的典型物理特性,如等离子体效应、自聚焦和光丝效应及锥形辐射等。分析了超短脉冲激光微孔加工的理论研究现状,并得出了目前理论研究中存在的问题。     

飞秒激光在材料微加工中的应用

本文介绍了飞秒激光的特性以及超短脉冲激光与材料相互作用的机理，并着重指出了其与长脉冲激光的区别。飞秒激光可产生超高光强、具有精确的损伤阈值(并且损伤阈值较低较低)、很小的热影响区、几乎可精密加工所有种类材料，并且，加工精度极高，可进行亚微米尺寸的精密加工。通过分析飞秒激光材料微加工的特性，综述超短脉冲激光材料微加工的应用研究现状。     

飞秒激光微孔加工发展综述

随着飞秒激光器的成熟,飞秒激光的应用越来越广泛。由于飞秒激光独特的属性,在微孔加工中具有明显的优势。本文介绍了飞秒激光与材料之间的相互作用机理、飞秒激光打孔的理论研究发展、打孔方式的研究以及各种飞秒激光加工参数的探索。总结了目前发展遇到的问题,未来的发展趋势并提出自己的观点。     

超快激光辐照诱导金属钛的变化

为实现对超快激光诱导金属钛改变趋势的定性控制及材料改变范围的定量控制, 开展了飞秒和皮秒脉冲激光分别与金属钛烧蚀的对比实验研究。随后使用激光扫描共聚焦显微镜、X射线光电子能谱和透射电子显微镜分别就激光脉冲时间宽度变化对被烧蚀金属钛的表面形貌与烧蚀深度、化学成分、微结构状态的影响规律进行了分析。研究发现: 随着激光脉冲时间宽度从飞秒增加到皮秒量级, 被烧蚀金属钛的表面形貌质量逐渐变差, 最终烧蚀产物的化学成分愈加复杂, 微结构状态的无定形化程度也随之增加。最终认为伴随激光脉冲时间宽度增加, 金属钛中热累积效应的增强而造成被烧蚀材料内部更为严重的热与机械损伤是导致上述实验现象产生的主要原因。     

飞秒脉冲的破坏阈值研究

在Stuart等人理论模型的基础上,综合考虑Ming等人对电子密度衰减机制的研究,对飞秒激光的破坏机制进行了分析。通过计算模拟,分析了多光子电离、雪崩电离、电子衰减等机制与被辐照介质中自由电子密度之间的关系。分析表明脉冲宽度越窄,多光子电离过程提供的自由电子比例越小,其对激光破坏的作用也越小,此时雪崩电离过程将提供绝大部分电子,起到主导的作用;而随着脉宽增大,多光子电离提供的自由电子比例也将增大,其作用逐渐增强。当考虑衰减机制的影响后,电子密度在脉冲后沿不是维持在一个稳定的值,而是在达到极大值后呈下降趋势。在研究电子密度的基础上,利用计算飞秒脉冲破坏阈值的模型,分析了不同的衰减因子对破坏阈值的影响,研究表明,考虑电子衰减机制模拟得到的破坏阈值比不考虑时有所提高。     

基于OCDR的飞秒激光直写光波导微结构在线监测

飞秒激光直写技术具有无掩模、真三维、高精度等优点，在透明介质光波导器件立体加工中具有很好的应用前景。然而，实际加工中需根据目标材料的特性反复探索和优化加工参数，过程繁琐且复杂。提出了一种基于光相干域反射仪（OCDR）在线监测飞秒激光在已有波导中直写加工微结构或器件的新技术，以光纤波导为例研究了激光脉冲能量、脉冲频率及直写速率对加工结构回波反射特性的影响，并分析了反射特性与加工工艺参数的对应关系。研究结果表明：通过OCDR反射曲线突变点能够快速准确地确定引起材料性质改变的激光能量和脉冲频率的阈值条件，且根据曲线变化趋势和反射峰特点可判断材料性质改变类型；此外，通过分布式测量激光直写反射曲线，可获得加工速率对加工效果的影响规律。该技术为波导内飞秒激光直写微结构或器件工艺参数的摸索提供了一种非破坏、高效、在线的解决方案。     

超短激光脉冲对硅表面微构造的研究

在特定的气体氛围下,用一定能量密度的超短脉冲激光连续照射单晶硅片表面,制备出表面具有准规则排列的微米量级锥形尖峰结构的“黑硅”新材料。不同背景气体下的实验表明,激光脉宽和背景气体对表面微构造的形成起着决定性的作用。具体分析了SF6气体氛围中,皮秒和飞秒激光脉冲作用下硅表面微结构的演化过程。虽然两者均可造成硅表面的准规则排列微米量级尖峰结构,但不同脉冲宽度的激光与硅表面相互作用的物理机制并不相同。在皮秒激光脉冲作用下,尖峰结构形成之前硅片表面先熔化;而飞秒激光脉冲作用下尖峰的演化过程中始终没有出现液相。对材料的光辐射吸收的初步研究表明,该材料对1.5~16μm的红外光辐射吸收率不低于80%。     

高反Al2O3/SiO2膜内超快激光预损伤动力学过程

利用紫外飞秒激光光谱技术研究了Al2O3/SiO2高反射膜内的超快载流子动力学。通过实验,发现该反射膜Al2O3层的载流子动力学在紫外反射膜的激光诱导损伤中起着至关重要的作用。通过泵浦-探测实验,发现紫外飞秒激光与光学薄膜作用后,光学薄膜反射率有所下降,且探测光反射率变化的峰值在约2.3 ps的时间内从417 nm左右转移到402 nm左右。为了更好的解释激光诱导载流子动力学,一个具体的理论模型被提出来,该模型指出导带自由电子弛豫过程中与晶格相互作用,产生距导带一个光子能量的中间缺陷态,其初始电子密度影响了材料损伤阈值高低。通过该理论模型得出的激光损伤阈值数据和实验数据吻合得很好。     

超短脉冲激光加工碳纤维复合材料研究进展

超短脉冲激光加工作为一种非接触式的特种加工方法,利用高功率密度的聚焦激光束烧蚀碳纤维增强复合材料(CFRP)表面,实现高精密加工,有望解决传统机械加工工艺造成的刀具损坏、残余应力和表面质量差等问题。因此,本文综述了近些年超短脉冲激光加工CFRP的研究进展。首先梳理了超短脉冲激光加工CFRP的加工机理,其中包括了材料去除机理、相互作用过程机理和对激光的吸收与反射机理。其次,着重阐述了热影响区和锥度这两类缺陷,分析了缺陷的形成原因,并提出了相应抑制方法。本文对超短脉冲激光加工CFRP的理论研究具备一定借鉴意义。     

飞秒激光加工SiC/SiC复合材料厚板的孔型特征研究

为了探究飞秒激光加工SiC/SiC复合材料厚板的孔型特征, 采用光束同心圆填充扫描方式对厚度为4mm的SiC/SiC复合材料进行制孔实验, 分析了飞秒激光加工参数对入口直径、孔深、锥度等孔型特征的影响规律和影响机理。结果表明, 脉冲能量、重复频率、线重合度以及扫描速率对小孔入口直径影响较小, 但对孔深和锥度影响较大; 上述实验参数与光束扫描面积内的能量密度密切相关, 小孔锥度随能量密度增大而减小, 小孔深度则反之; 当采用最大脉冲能量130μJ、最大重复频率100kHz、最小扫描速率100mm/s、最大线重合度77%以及最小进给量0.1mm时, 小孔锥度达到最小值12.38°; 上层材料对光束的遮挡以及排屑困难导致深孔加工锥度不易控制。该研究可以为今后SiC/SiC超快激光制孔应用提供参考。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.